Ion trajectory manipulation architecture in an ion pump

Patent metadata

Field	Value
Publication number	US-10550829-B2
Application number	US-201615259424-A
Country	US
Kind code	B2
Filing date	Sep 8, 2016
Priority date	Sep 8, 2016
Publication date	Feb 4, 2020
Grant date	Feb 4, 2020

Abstract

An ion pump includes an anode, a backing surface having at least one surface structure extending toward the anode and a cathode positioned between the anode and the backing surface and having an opening such that the at least one surface structure is aligned with and extends from the backing surface towards the opening.

First claim

What is claimed is:

1. An ion pump comprising:
an anode;
a backing surface having at least one surface structure extending toward the anode;
a cathode positioned between the anode and the backing surface and having an opening such that the at least one surface structure is aligned with and extends from the backing surface towards the opening and wherein the cathode is configured to be at a different electrical potential than the surface structure.

2. The ion pump of claim 1 wherein the anode comprises a cylinder and wherein the opening in the cathode is aligned with an opening in the cylinder.

3. The ion pump of claim 1 wherein the at least one surface structure extends into the opening in the cathode.

4. The ion pump of claim 1 further comprising a plurality of anodes, wherein the cathode further comprises a plurality of openings and wherein the backing surface further comprises a plurality of surface structures, each surface structure extending toward a respective anode and aligned with a respective opening in the cathode.

5. The ion pump of claim 4 wherein each of the plurality of anodes comprises a cylinder and wherein each opening in the cathode is aligned with a respective opening in one of the plurality of anodes.

6. The ion pump of claim 4 wherein some of the plurality of surface structures extend further toward the respective anode than others of the plurality of surface structures.

7. The ion pump of claim 1 further comprising a non-evaporative getter (NEG) material on a side of the cathode facing the anode.

8. The ion pump of claim 1 further comprising a non-evaporative getter (NEG) material on a side of the cathode facing the backing surface.

9. An ion pump comprising:
a cylindrical anode having an opening;
a cathode comprising a cathode plate having an opening aligned with the opening of the cylindrical anode such that the opening of the cathode plate is devoid of the cathode; and
a post aligned with the opening in the cathode plate.

10. The ion pump of claim 9 wherein the post extends into the opening in the cathode plate.

11. The ion pump of claim 9 further comprising:
a plurality of cylindrical anodes, each having a respective opening;
wherein the cathode plate further comprises a plurality of openings each aligned with a respective opening in a respective one of the plurality of cylindrical anodes.

12. The ion pump of claim 11 further comprising a plurality of posts including the post, each post aligned with a respective opening in the cathode plate.

13. The ion pump of claim 12 wherein at least one post of the plurality of posts extends into a respective opening in the cathode plate.

14. The ion pump of claim 13 wherein at least one post of the plurality of posts extends toward the cathode plate further than another post of the plurality of posts extends toward the cathode plate.

15. The ion pump of claim 9 wherein one side of the cathode plate is coated with a non-evaporative getter (NEG) material.

Assignees

• Edwards Vacuum Llc

Inventors

• Wynohrad Anthony
• Langeberg Joel

Classifications

• H01J41/12

  Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps · CPC title

• H01J3/04 Primary

  Ion guns · CPC title

• F04B19/006

  Micropumps (F04B43/043 and F04B43/095 take precedence) · CPC title

• F04B37/04 Primary

  Selection of specific absorption or adsorption materials · CPC title

• F04B37/14

  to obtain high vacuum · CPC title