Ion pump with direct molecule flow channel through anode

Patent metadata

Field	Value
Publication number	US-9960026-B1
Application number	US-201414466711-A
Country	US
Kind code	B1
Filing date	Aug 22, 2014
Priority date	Nov 11, 2013
Publication date	May 1, 2018
Grant date	May 1, 2018

Abstract

An ultra-high vacuum (UHV) system includes a UHV cell and an ion pump to maintain the UHV in the UHV cell. The ion pump has a GCC (glass, ceramic, or crystalline) housing. An interior wall of the ion-pump housing serves as an anode or bears a coating that serves as an anode. At least one cathode is disposed with respect to the housing so that it can cooperate with the anode to form an electric field for establishing a Penning trap. The GCC housing defines a flow channel that extends radially through the anode so that a molecule can flow directly into the most ionizing region of a Penning trap.

First claim

What is claimed is:

1. A vacuum system comprising: an ion-pump housing, said ion-pump housing being a silicon monocrystal with first and second apertures machined therethrough to define a manifold, said first aperture defining a cylindrical wall that in turn defines an axis of cylindrical symmetry, a portion of said cylindrical wall either serving as a wall anode or bearing a coating that serves as a wall anode, said second aperture defining a hollow flow channel with a doped silicon wall, the hollow flow channel extending more orthogonal to than parallel to said axis of cylindrical symmetry through said wall anode, said hollow flow channel extending through said wall anode to a hollow interior of said cylindrical wall; and at least one cathode for cooperating with said anode to establish an electric field to generate free electrons at said cathode and to accelerate them toward said anode.

2. The vacuum system of claim 1 wherein the ion-pump housing defines a boundary between a vacuum side of a vacuum chamber and an ambient side of the vacuum chamber, said at least one cathode being electrically insulated from said ion-pump housing.

3. The vacuum system of claim 1 wherein said at least one cathode includes sputterable material.

4. The vacuum system of claim 1 wherein the silicon monocrystal has a rectangular parallelpiped shape.

Assignees

• Coldquanta Inc
• Coldquanta Inc

Inventors

• Hughes Steven Michael

Classifications

• H01J41/14 Primary

  with ionisation by means of thermionic cathodes · CPC title

• H01J41/18

  with ionisation by means of cold cathodes · CPC title

• F04B37/14

  to obtain high vacuum · CPC title