Group III nitride based high electron mobility transistors

Patent metadata

Field	Value
Publication number	US-10546949-B2
Application number	US-201314758035-A
Country	US
Kind code	B2
Filing date	Dec 23, 2013
Priority date	Dec 26, 2012
Publication date	Jan 28, 2020
Grant date	Jan 28, 2020

Abstract

Contemplated is a semiconductor device comprising: a substrate; a group (III)-nitride layer; a metal-group (III)-nitride layer deposited between the substrate and group (III)-nitride layer; and a metal-nitride layer deposited between the substrate and the metal-group (III)-nitride layer. Also a method for making a semiconductor device with the above mentioned structure is contemplated. Furthermore, the substrate can be a silicon on insulator (SOI) substrate; the metal-nitride layer can be an aluminium nitride layer; the metal-group (III)-nitride layer can be an aluminium gallium nitride layer; and the group (III)-nitride layer can be a gallium nitride layer.

First claim

The invention claimed is:

1. A method of making a semiconductor device, the method comprising the steps of:
(a) providing a silicon-on-insulator (SOI) substrate, wherein the step of providing the silicon-on-insulator (SOI) substrate comprises providing the SOI substrate that is comprised of a bulk Si (111) handle substrate;
(b) depositing a metal-nitride layer on the substrate, comprising the step of depositing a low-temperature metal-nitride layer on the substrate at a temperature in the range of about 900° C. to about 1000° C. and at a thickness in the range of 30 nm to 50 nm, and depositing a high temperature metal-nitride layer directly onto the low-temperature metal-nitride layer at a temperature in the range of about 1050° C. to about 1075° C. and at a thickness greater than 300 nm;
(c) depositing a metal-group (III)-nitride layer on the metal-nitride layer; and
(d) depositing a high pressure group (III)-nitride layer directly on the metal-group (III)-nitride layer at a pressure in the range of about 200 Torr to about 400 Torr and depositing a low pressure group (III)-nitride layer at a pressure in the range of about 150 Torr to about 190 Torr directly adjacent to the high pressure group (III)-nitride layer to form a compositionally homogeneous group (III)-nitride layer, wherein the compositionally homogeneous group (III)-nitride layer has a thickness dimension greater than a thickness dimension of a combination of the metal-nitride layer and the metal-group (III)-nitride layer.

2. The method as claimed in claim 1 , wherein the homogeneous group (III)-nitride layer comprises gallium nitride (GaN) to form a GaN layer, the metal-group (III) nitride layer comprises aluminium gallium nitride (AlGaN) to form a AlGaN layer, the metal-nitride layer comprises aluminium nitride (AlN) to form a AlN layer and the step of depositing the AlN layer in step (b) and the step of depositing the AlGaN layer in step (c) comprises the depositing of Al in the AlN layer and in the AlGaN layer in an amount to reduce strain between the GaN layer and SOI substrate.

3. The method as claimed in claim 2 , comprising the step of reducing the amount of Al in the AlGaN layer during step (c).

4. The method as claimed in claim 3 , wherein the reducing step comprises depositing discrete layers of decreasing Al content in the AlGaN layer.

5. The method as claimed in claim 2 , wherein depositing the AlN layer is performed using an alkyl metal in the presence of a nitrogen source.

6. The method as claimed in claim 2 , wherein step (c) comprises the steps of:
measuring the curvature of the substrate; and
adjusting an amount of AlGaN being deposited during deposition.

7. The method as claimed in claim 1 , wherein all the deposition steps are performed using metal organic chemical vapour deposition (MOCVD).

Assignees

• Agency Science Tech & Res

Inventors

• Manippady Krishna Kumar
• Bin Dolmanan Surani
• Lin Kaixin Vivian
• Tan Hui Ru
• Tripathy Sudhiranjan

Classifications

• H10P14/3416

  Nitrides · CPC title

• H10P14/3251

  consisting of three or more layers · CPC title

• H10P14/3216

  Nitrides · CPC title

• H10P14/2926

  Crystal orientations · CPC title

• H10P14/2905 Primary

  Silicon, silicon germanium or germanium · CPC title