X-ray imaging technique

Patent metadata

Field	Value
Publication number	US-10545100-B2
Application number	US-201615264132-A
Country	US
Kind code	B2
Filing date	Sep 13, 2016
Priority date	Nov 18, 2015
Publication date	Jan 28, 2020
Grant date	Jan 28, 2020

Abstract

An x-ray source for computer tomography uses several sub-sources. An electron beam impacts the several sub-sources to achieve a high x-ray flux with high resolution. The several sub-sources produce a composite image, which is deconvolved to disentangle the composite image and render a useful image. The configuration of the several sub-sources can be optimized for a given specimen structure.

First claim

The invention claimed is:

1. A method of imaging a specimen using an X-ray imaging apparatus, comprising:
providing the specimen on a specimen holder;
directing a flux of X-rays from a source through the specimen and onto an X-ray camera,
embodying the source as a cluster of component sources, with a confined angular span relative to the specimen;
using said camera to record a cumulative, composite image from said component sources; and
mathematically deconvolving said composite image, wherein
the source comprises a body of supporting material in which each of the cluster of the component sources are incorporated as discrete metallic bodies, and wherein the discrete metallic bodies are incorporated into the body of the supporting material in an irregular areal distribution such that a separation between any given neighboring pair of discrete metallic bodies is variable; and
component sources are caused to emit X-rays by irradiating them with a charged-particle beam.

2. A method according to claim 1 , wherein said deconvolution is performed using an iterative re-weighted convergence technique employing a Point Spread Function kernel for said cluster of component sources.

3. A method according to claim 2 , wherein at least some of said component sources are deployed sequentially to image the specimen.

4. A method according to claim 2 , wherein at least some of said component sources are deployed simultaneously to image the specimen.

5. A method according to claim 2 , wherein said angular distribution is non-regular.

6. A method according to claim 1 , wherein at least some of said component sources are deployed simultaneously to image the specimen.

7. A method according to claim 6 , wherein said angular distribution is non-regular.

8. A method according to claim 1 , wherein said angular distribution is non-regular.

9. A method according to claim 1 , wherein said angular span θ relative to the specimen satisfies θ<10°.

10. A method according to claim 1 , wherein said source comprises an array of individually selectable FEGs.

11. A method according to claim 1 , wherein the deconvolved composite image is employed as an input component image in a tomographic imaging procedure.

12. A method according to claim 1 , wherein said angular span θ relative to the specimen satisfies θ<5°.

13. A method according to claim 1 , wherein said angular span θ relative to the specimen satisfies θ<1°.

14. A method according to claim 1 , wherein the average separation between any given neighboring pair of discrete metallic bodies is of the same order of magnitude as the diameter of the discrete metallic bodies.

15. An X-ray imaging apparatus comprising:
a specimen holder, for holding a specimen;
an X-ray source, for directing a flux of X-rays through the specimen and onto an X-ray camera; and
an automatic controller, for controlling at least part of the operation of the apparatus,
wherein the source is embodied as a cluster of component sources incorporated as discrete metallic bodies within a body of supporting material, the discrete metallic bodies having a confined angular span relative to the specimen holder and having an irregular areal distribution within the body of the supporting material such that a separation between any given neighboring pair of discrete metallic bodies is variable; and
said controller is configured to:
use said camera to record a cumulative, composite image from said component sources;
perform a mathematical deconvolution procedure on said composite image.

16. An X-ray imaging apparatus according to claim 15 , wherein said controller is configured to performed said deconvolution using an iterative re-weighted convergence technique employing a Point Spread Function kernel for said cluster of component sources.

17. A charged-particle microscope comprising an X-ray imaging apparatus as claimed in claim 16 .

18. A charged-particle microscope comprising an X-ray imaging apparatus as claimed in claim 15 .

19. A method of imaging a specimen using an X-ray apparatus, comprising:
directing a flux of X-rays from a cluster of component sources incorporated as discrete metallic bodies within a body of supporting material and having a confined angular span relative to the specimen through the specimen and onto an X-ray camera, wherein the discrete metallic bodies are incorporated into the body of the supporting material in an irregular areal distribution such that a separation between any given neighboring pair of discrete metallic bodies is variable;
recording a cumulative, composite image from said component sources; and
forming an image of the specimen by mathematically deconvolving said composite image.

Assignees

• Fei Co

Inventors

• Buijsse Bart
• Boughorbel Faysal

Classifications

• H01J2235/086

  Target geometry · CPC title

• G01N23/04 Primary

  and forming images of the material · CPC title

• H01J37/28

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• G01N2223/03

  by transmission · CPC title

• G01N2223/419

  computed tomograph · CPC title