Substrate storing container

Patent metadata

Field	Value
Publication number	US-10535540-B2
Application number	US-201515508354-A
Country	US
Kind code	B2
Filing date	Feb 27, 2015
Priority date	Sep 26, 2014
Publication date	Jan 14, 2020
Grant date	Jan 14, 2020

Abstract

A substrate storing container includes a container main body, a lid body, and a lateral substrate support portion. The lateral substrate support portion of the substrate storing container includes substrate contact portions touching a substrate when supporting an edge portion of the substrate, and contact portion support portions supporting the substrate contact portions. The substrate contact portions are made of a material having a heat-resisting property with respect to temperature of the substrate touching the substrate contact portions. The contact portion support portions are made of a material having a lower heat-resisting property than that of the substrate contact portions and having a lower coefficient of moisture absorption than that of the substrate contact portions.

First claim

The invention claimed is:

1. A substrate storing container comprising:
a container main body in which a substrate storing space capable of storing a plurality of substrates is formed therein, and a container main body opening portion in communication with the substrate storing space is formed at one end portion;
a lid body removably attached to the container main body opening portion, the lid body removably capable of closing the container main body opening portion; and
lateral substrate support portions disposed to form a pair of the lateral substrate support portions in the substrate storing space, the lateral substrate support portions being capable of supporting edge portions of the plurality of substrates in a state in which adjacent substrates among the plurality of substrates are arranged in parallel to be spaced by a predetermined interval when the container main body opening portion is not closed by the lid body,
wherein each of the lateral substrate support portions includes a substrate contact portion that touches the substrates when the edge portions of the substrates are supported, and a contact portion support portion that supports the substrate contact portion,
the contact portion support portion is made of a cycloolefin polymer or a cycloolefin copolymer, and has a heat-resisting property for preventing the substrate storing container from changing in dimension due to heat strain, whereby preventing the substrates from being damaged due to contact with a substrate ejector,
the substrate contact portion is made of a material having a heat-resisting property with respect to temperature of the substrates touching the substrate contact portion, and
the contact portion support portion is made of a material having a lower heat-resisting property than a heat-resisting property of the substrate contact portion and having a lower coefficient of moisture absorption than a coefficient of moisture absorption of the substrate contact portion,
the substrate contact portion comprises a plurality of front side inward convex portions and one plate-shaped base portion, and in the substrate contact portion, all of the front side inward convex portions are molded integrally with the one plate-shaped base portion.

2. The substrate storing container according to claim 1 , wherein the substrate contact portion is formed to be separated from the contact portion support portion and fixed to the contact portion support portion.

3. The substrate storing container according to claim 1 ,
wherein the container main body has a pair of side walls,
at least one of the pair of the lateral substrate support portions is provided, one of the lateral substrate support portions is fixed to one of the side walls, and the other one of the lateral substrate support portions is fixed to the other one of the side walls,
the one of the lateral substrate support portions is allowed to be fixed to the other one of the side walls, and the other one of the lateral substrate support portions is allowed to be fixed to the one of the side walls, and
the substrate contact portion of the one of the lateral substrate support portions is allowed to be fixed to the contact portion support portion of the other one of the lateral substrate support portions, and the substrate contact portion of the other one of the lateral substrate support portions is allowed to be fixed to the contact portion support portion of the one of the lateral substrate support portions.

4. The substrate storing container according to claim 2 ,
wherein the contact portion support portion has a locking portion,
a wide hole portion and a narrow hole portion in communication with the wide hole portion are formed in the locking portion,
the substrate contact portion includes a main body of the substrate contact portion and a locked portion locked in the locking portion,
the main body of the substrate contact portion is not insertable into the wide hole portion and the narrow hole portion,
the locked portion includes a head portion insertable into the wide hole portion and not insertable into the narrow hole portion, and a neck portion insertable into the wide hole portion and the narrow hole portion, one end portion of the neck portion being connected to the head portion, an other end portion of the neck portion being connected to the main body of the substrate contact portion, and
a locked portion movement inhibiting portion is included to inhibit the neck portion from moving from the narrow hole portion to the wide hole portion when the neck portion is inserted into the narrow hole portion.

5. The substrate storing container according to claim 4 ,
wherein a plurality of the locking portion and a plurality of the locked portion are included,
a width of the narrow hole portion is substantially equal to a width of the neck portion in a direction orthogonal to a direction in which the narrow hole portion and the wide hole portion are connected to each other in one of the narrow hole portions, and
a width of the narrow hole portion is larger than a width of the neck portion in the direction orthogonal to the direction in which the narrow hole portion and the wide hole portion are connected to each other in another one of the narrow hole portions.

6. The substrate storing container according to claim 1 , wherein the substrate contact portion is fixed to the contact portion support portion using insert molding.

7. The substrate storing container according to claim 1 , wherein the substrate contact portion is formed by overmolding with respect to the contact portion support portion.

8. The substrate storing container according to claim 1 , wherein the container main body is made of a material having a lower coefficient of moisture absorption than a coefficient of moisture absorption of the substrate contact portion.

9. The substrate storing container according to claim 1 , wherein the container main body is molded integrally with the contact portion support portion.

10. The substrate storing container according to claim 1 , wherein the substrate contact portion can be removably attached to the contact portion support portion, the lateral substrate support portions including the substrate contact portion and the contact portion support portion is fixed to the container main body.

Assignees

• Miraial Co Ltd

Inventors

• Kanamori Yuta
• Matsutori Chiaki
• Tomita Minoru
• Ozawa Kazunori

Classifications

• H10P72/1921

  characterised by substrate supports · CPC title

• H10P72/1911 Primary

  characterised by materials, roughness, coatings or the like · CPC title

• H10P72/15 Primary

  Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls · CPC title

• H01L21/67383

  Electricity · mapped topic

• H01L21/67326 Primary

  Electricity · mapped topic