Exposure mask and method of manufacturing a substrate using the exposure mask

Patent metadata

Field	Value
Publication number	US-10529751-B2
Application number	US-201816135003-A
Country	US
Kind code	B2
Filing date	Sep 19, 2018
Priority date	Nov 27, 2012
Publication date	Jan 7, 2020
Grant date	Jan 7, 2020

Abstract

An exposure mask includes a first transmission portion, a second transmission portion, and a blocking portion. The first transmission portion is configured to, when illuminated with light, transmit the light at a first energy level. The first transmission portion is disposed in association with formation of a first contact hole in an underlying layer. The second transmission portion is configured to, when illuminated with the light, transmit the light at a second energy level. The second transmission portion is disposed in association with formation of a second contact hole in the underlying layer. The blocking portion is configured to block the light, and is disposed in association with a boundary region between a first region and a second region of the underlying layer. The second transmission portion is further configured to enable the second contact hole to be formed deeper into the underlying layer than the first contact hole.

First claim

What is claimed is:

1. A display device comprising:
a base substrate;
a first conductive layer on the base substrate;
a second conductive layer on the base substrate;
an organic insulating layer on the first conductive layer and the second conductive layer, the organic insulating layer having a first contact hole exposing a first portion of the first conductive layer and a second contact hole exposing a second portion of the second conductive layer; and
a third conductive layer covering the organic insulating layer, the first contact hole, and the second contact hole,
wherein the third conductive layer contacts the first portion of the first conductive layer and the second portion of the second conductive layer, thereby the first conductive layer and the second conductive layer are electrically connected, and
wherein the first portion of the first electrode is equal or greater than the second portion of the second electrode.

2. The display device of claim 1 , further comprising:
a first insulation layer between the first conductive layer and the second conductive layer,
Wherein the first contact hole is formed through the organic insulating and the first insulation layer.

3. The display device of claim 2 , wherein the first conductive layer is at least partially overlapped with the second conductive layer.

4. The display device of claim 1 , further comprising:
a passivation layer between the organic insulating layer and the first and second conductive layers,
wherein the first contact hole is formed through the organic insulating layer and the passivation layer, and
wherein the second contact hole is formed through the organic insulating layer and the passivation layer.

5. The display device of claim 1 , wherein a depth of the first contact hole is greater than a depth of the second contact hole.

6. The display device of claim 1 , further comprising:
a first insulation layer between the first conductive layer and the second conductive layer,
wherein the first conductive layer and the second conductive layer include a circuitry wiring of a gate driving part in a peripheral area which is non-display area, and
wherein the first conductive layer includes a gate line in a display area in which an image is displayed.

Assignees

• Samsung Display Co Ltd

Inventors

• Shim Seung-Bo
• Kim Jun-Gi
• Park Yong-Jun
• Jung Yang-Ho
• Ju Jin-Ho

Classifications

• G03F1/22

  Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof · CPC title

• G03F1/38

  Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof · CPC title

• H01L27/124

  Electricity · mapped topic

• H01L27/1288 Primary

  Electricity · mapped topic

• H10D86/441

  Interconnections, e.g. scanning lines · CPC title