Method and system for cleaning wafer and scrubber

Patent metadata

Field	Value
Publication number	US-10522369-B2
Application number	US-201514632103-A
Country	US
Kind code	B2
Filing date	Feb 26, 2015
Priority date	Feb 26, 2015
Publication date	Dec 31, 2019
Grant date	Dec 31, 2019

Abstract

A method of cleaning a wafer in semiconductor fabrication is provided. The method includes cleaning a wafer using a wafer scrubber. The method further includes moving the wafer scrubber into an agitated cleaning fluid. The method also includes creating a contact between the wafer scrubber and a cleaning stage in the agitated cleaning fluid. In addition, the method includes cleaning the wafer or a second wafer by the wafer scrubber after the wafer scrubber is cleaned by the agitated cleaning fluid.

First claim

What is claimed is:

1. A method for cleaning a wafer, comprising:
cleaning the wafer using a wafer scrubber;
supplying a cleaning fluid into a container and agitating the cleaning fluid;
moving the wafer scrubber into the agitated cleaning fluid in the container with a lower surface of the wafer scrubber facing a bottom wall of the container;
supplying air bubbles to the agitated cleaning fluid by discharging a gas by a gas supply positioned on the bottom wall of the container;
creating a contact between the lower surface of the wafer scrubber and a cleaning stage in the agitated cleaning fluid;
moving the wafer scrubber alternately into contact with the cleaning stage and detaching from the cleaning stage by moving the wafer scrubber relative to the cleaning stage;
detecting, in the container, a contamination level of the agitated cleaning fluid;
adjusting a flow rate of the gas based on the detected contamination level of the agitated cleaning fluid;
removing the agitated cleaning fluid from the container, wherein an applying and the removal of the agitated cleaning fluid are adjusted in response to an amount of the detected contamination level of the agitated cleaning liquid in the container; and
cleaning the wafer or a second wafer by the wafer scrubber after the wafer scrubber is cleaned by the agitated cleaning fluid.

2. The method as claimed in claim 1 , wherein in moving the wafer scrubber alternately into contact with the cleaning stage and detaching from the cleaning stage, the lower surface of the wafer scrubber is moved away from the cleaning stage to a position no higher than a liquid surface of the agitated cleaning fluid.

3. The method as claimed in claim 1 , wherein the operation of moving the wafer scrubber alternately into contact with the cleaning stage and detaching from the cleaning stage in a time period ranging from about 5 seconds to about 10 seconds.

4. The method as claimed in claim 1 , further comprising:
continuously applying a thrust force on the wafer scrubber along an inclined direction relative to the cleaning stage so as to produce a contact pressure to enable a deformation of the wafer scrubber.

5. The method as claimed in claim 1 , wherein the contact is created between the wafer scrubber and a rugged surface of the cleaning stage which is formed with a plurality of embossed members.

6. The method as claimed in claim 1 , wherein the agitated cleaning fluid is ultrasonically agitated at a frequency in a range from about 10 KHz to about 500 KHz by an agitation generator, and the power supplied to the agitation generator is from about 20 W to about 100 W.

7. A method for cleaning a wafer, comprising:
cleaning the wafer using a wafer scrubber;
moving the wafer scrubber into a container with a lower surface of the wafer scrubber facing a bottom wall of the container;
applying an agitated cleaning fluid on the wafer scrubber to clean the wafer scrubber, wherein the agitated cleaning fluid is agitated at an ultrasonic frequency;
supplying air bubbles to the agitated cleaning fluid by discharging a gas, with a first flow rate;
detecting a contamination level of the agitated cleaning fluid in the container, wherein when the contamination level of the cleaning fluid is higher than a critical value, the flow rate of the gas is adjusted from the first flow rate to a second flow rate, wherein the second flow rate is higher than the first flow rate; and
cleaning the wafer or a second wafer by the wafer scrubber after the wafer scrubber is cleaned by the agitated cleaning fluid.

8. The method as claimed in claim 7 , wherein the applying of the agitated cleaning fluid comprises:
supplying a cleaning fluid to the container; and
agitating the cleaning fluid held by the container to generate the agitated cleaning fluid.

9. The method as claimed in claim 7 , wherein the air bubbles include nitrogen gas or argon gas.

10. The method as claimed in claim 7 , wherein the agitated cleaning fluid is agitated at an ultrasonic frequency in a range from about 10 KHz to about 500 KHz.

11. The method as claimed in claim 1 , further comprising rotating wafer scrubber in the agitated cleaning fluid during the contact of the wafer scrubber and a cleaning stage.

12. The method as claimed in claim 7 , wherein the flow rate of the gas is adjusted according to the particle size accumulated in the wafer scrubber.

13. The method as claimed in claim 7 , further comprising:
moving the wafer scrubber alternately into contact with the rugged surface and detaching from a rugged surface by moving the wafer scrubber relative to the rugged surface; and
continuously applying a thrust force on the wafer scrubber along an inclined direction relative to the cleaning stage so as to produce a contact pressure to enable a deformation of the wafer scrubber.

14. The method as claimed in claim 7 , further comprising:
compressing the gas;
providing the compressed gas into the agitated cleaning fluid in the container; and
applying the compressed gas toward the wafer scrubber.

15. The method as claimed in claim 7 , further comprising removing the agitated cleaning fluid from the container;
wherein the applying and the removal of the agitated cleaning fluid are adjusted in response to a detecting signal produced from a sensor used to detect the contamination level of the agitated cleaning liquid in the container.

16. The method as claimed in claim 1 , further comprising:
compressing the gas;
providing the compressed gas into the agitated cleaning fluid in the container via the gas supply; and
applying the compressed gas toward the wafer scrubber.

17. The method as claimed in claim 7 , further comprising:
periodically draining away the agitated cleaning fluid in the container via an outlet line connected to the container; and
supplying new cleaning fluid into the container and agitating the new cleaning fluid.

18. A method for cleaning a wafer, comprising:
cleaning the wafer using a wafer scrubber;
supplying a cleaning fluid into a container and agitating the cleaning fluid;
performing a scrubber cleaning operation, wherein the scrubber cleaning operation comprises:
immersing the wafer scrubber into the agitated cleaning fluid held by the container and creating a contact with the scrubber and a cleaning stage in the agitated cleaning fluid;
applying a thrust force on the wafer scrubber to produce a persistent contact pressure over the cleaning stage such that the wafer scrubber remains in contact with the cleaning stage;
discharging a gas to the agitated cleaning fluid with a first flow rate;
detecting, in the container, a contamination level of the agitated cleaning fluid;
adjusting the flow rate of the gas based on the detected contamination level of the agitated cleaning fluid;
detaching the wafer scrubber from the cleaning stage, wherein the scrubber cleaning process is finished once the wafer scrubber is detached from the cleaning stage; and
cleaning the wafer or a second wafer by the wafer scrubber after the scrubber cleaning operation is finished.

19. The method as claimed in claim 18 , wherein when the contamination level of the cleaning fluid is higher than a critical value, the flow rate of the gas is increased from the first flow rate.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Hu Chien-Chun
• Chang Chen-Liang
• Hsieh Ju-Ru
• Chen Po-Chia
• Chuang Shun-Yu
• Lin Wei-Tuzo

Classifications

• H10P72/0414

  using mainly spraying means, e.g. nozzles · CPC title

• H10P72/0412 Primary

  using mainly scrubbing means, e.g. brushes · CPC title

• B08B3/102

  with means for agitating the liquid (by agitating the container B08B3/042, B08B3/044, B08B3/045, B08B3/06) · CPC title

• B08B3/12

  by sonic or ultrasonic vibrations · CPC title

• H01L21/67051

  Electricity · mapped topic