Wafer support device and method for removing lift pin therefrom
US-10998219-B2 · May 4, 2021 · US
This page is not indexed by search engines while we improve data quality.
Chang Chen-Liang patents
Chang Chen-Liang is listed as an inventor on 4 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Chang Chen-Liang |
| Total patents | 4 |
| First publication | Sep 1, 2016 |
| Latest publication | May 4, 2021 |
Notable patents
Publications ranked by popularity score, then publication date.
Method and system for cleaning wafer and scrubber
US-10522369-B2 · Dec 31, 2019 · US
Wafer Support Device and Method for Removing Lift Pin Therefrom
US-2017358474-A1 · Dec 14, 2017 · US
Method and system for cleaning wafer and scrubber
US-2016254170-A1 · Sep 1, 2016 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Taiwan Semiconductor Mfg Co Ltd | 4 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/722 | 2 |
| H10P72/72 | 2 |
| H10P72/7612 | 2 |
| H01L21/68742 | 2 |
| H01L21/6833 | 2 |