Self-assembled monolayer to adjust fly height
US-9437233-B1 · Sep 6, 2016 · US
US10522192B1 · US · B1
| Field | Value |
|---|---|
| Publication number | US-10522192-B1 |
| Application number | US-201815988282-A |
| Country | US |
| Kind code | B1 |
| Filing date | May 24, 2018 |
| Priority date | May 24, 2017 |
| Publication date | Dec 31, 2019 |
| Grant date | Dec 31, 2019 |
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A slider is provided with a conformal coating (e.g., an oxide) on the air-bearing surface (ABS) to provide a consistent surface energy to the ABS. The conformal coating may be formed by an atomic layer deposition (ALD) process. A consistent surface energy inhibits accumulation of contaminants on the slider ABS, such as at topographical transition areas.
Opening claim text (preview).
What is claimed is: 1. A slider having a body with an air-bearing surface (ABS) having a topography including at least one recessed area and at least one raised area, with a transition region between a recessed area and a raised area, the slider comprising: a working surface comprising a first material in the at least one recessed area and having a first surface energy and a second material in the at least one raised area and having a second surface energy different than the first surface energy; a constant-thickness oxide coating on the working surface across the at least one recessed area and the at least one raised area; and a self-assembled monolayer (SAM) coating on the oxide coating. 2. The slider of claim 1 , wherein the oxide coating is SiO 2 . 3. The slider of claim 1 , wherein the oxide coating has a thickness no greater than 200 nm. 4. The slider of claim 1 , wherein the first material is AITiC and the second material is DLC. 5. The slider of claim 1 , wherein the oxide coating surface across the at least one recessed area and the at least one raised area has a consistent and continuous surface energy. 6. The slider of claim 5 , wherein the surface energy differs by no more than 0.1 V across the at least one recessed area and the at least one raised area. 7. A slider having a body with an air-bearing surface (ABS) having a topography including at least one recessed area and at least one raised area, the slider comprising: the ABS comprising a first material and a second material different than the first material; a dielectric coating over the ABS, the coating providing a consistent and continuous surface energy across the ABS. 8. The slider of claim 7 , wherein the surface energy differs by no more than 0.1 V across the ABS. 9. The slider of claim 7 , wherein the first material is in the at least one recessed area and the second material is in the at least one raised area. 10. The slider of claim 9 , wherein the first material is AITiC. 11. The slider of claim 9 , wherein the second material is a layer of DLC forming the at least one raised area. 12. The slider of claim 7 , wherein the coating is an oxide coating having a constant thickness. 13. The slider of claim 7 , wherein the dielectric coating is over the entire ABS. 14. A method of making a slider, the slider having a body with an air-bearing surface (ABS) having a topography including recessed areas comprising a first material and raised areas comprising a second material, the method comprising: applying an oxide coating via a conformational coating technique on the ABS recessed areas comprising the first material and on the raised areas comprising the second material; and applying a self-assembled monolayer (SAM) coating on the oxide coating. 15. The method of claim 14 , wherein the conformational coating technique is an atomic layer deposition (ALD) process. 16. The method of claim 15 , wherein the oxide coating has a thickness no greater than 200 nm. 17. The method of claim 15 , wherein the oxide coating has a thickness that varies no more than 2 nm. 18. The method of claim 14 , wherein the first material is AITiC and the second material is DLC. 19. The method of claim 14 , wherein the oxide coating is applied on all the recessed areas and all the raised areas.
Atomic layer deposition [ALD] · CPC title
of aluminium, magnesium or beryllium · CPC title
containing silicon · CPC title
Design of the air bearing surface · CPC title
where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination (G11B5/3133 takes precedence) · CPC title
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