Peakforce photothermal-based detection of IR nanoabsorption

Patent metadata

Field	Value
Publication number	US-10520426-B2
Application number	US-201715666477-A
Country	US
Kind code	B2
Filing date	Aug 1, 2017
Priority date	Nov 13, 2008
Publication date	Dec 31, 2019
Grant date	Dec 31, 2019

Abstract

An apparatus and method of performing photothermal chemical nanoidentification of a sample includes positioning a tip of a probe at a region of interest of the sample, with the tip-sample separation being less than about 10 nm. Then, IR electromagnetic energy having a selected frequency, ω, is directed towards the tip. Using PFT mode AFM operation, absorption of the energy at the region of interest is identified. Calorimetry may also be performed with the photothermal PFT system.

First claim

What is claimed is:

1. A method of photo thermal nanocalorimetry on a sample using an AFM operating in Peak Force Tapping mode, the method including:
positioning a tip at a region of interest of the sample;
directing IR electromagnetic energy having a selected frequency, ω, towards the tip;
determining a mass of the region by obtaining 3D topography data corresponding to the region in response to the directing step; and
determining a ΔT in response to the directing step.

2. The method of claim 1 , wherein the tip has an apex with a radius between about 10 nm and 100 nm.

3. The method of claim 2 , wherein the tip is made so as to concentrate IR fields along a length of the tip in response to the directing step.

4. The method of claim 3 , wherein an IR conductivity of the distal 10 nm to 100 nm of the tip is higher than the remainder of the tip.

5. The method of claim 4 , wherein the tip is silicon and is metalized with a Platinum Iridium or Platinum Silicide coating.

6. The method of claim 3 , wherein the tip is one of a solid metal probe and a probe made of a heavily doped material.

7. The method of claim 1 , further comprising calculating a heat capacity, [C], of the region according to [C]=Q/mΔT.

8. The method of claim 7 , further comprising repeating each of the previous steps at a plurality of regions of interest.

9. The method of claim 7 , further comprising repeating each of the previous steps at a plurality of selected frequencies, ω, at the regions of interest.

10. The method of claim 1 , wherein the directing step includes using an IR source that is monochromatic with a line width below 1 cm −1 and a peak power greater than 1 mW.

11. The method of claim 10 , wherein the monochromatic source is a tunable Quantum Cascade Laser (QCL).

12. The method of claim 1 , wherein ΔT is measured using Peak Force QNM mode.

Assignees

• Bruker Nano Inc

Inventors

• Andreev Gregory O
• Su Chanmin

Classifications

• G01N21/171 Primary

  with calorimetric detection, e.g. with thermal lens detection · CPC title

• G01N2201/06113

  Coherent sources; lasers · CPC title

• B82Y35/00

  Methods or apparatus for measurement or analysis of nanostructures · CPC title

• G01N2201/12

  Circuits of general importance; Signal processing · CPC title

• G01Q30/02

  Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope · CPC title