Force detection apparatus and robot

Patent metadata

Field	Value
Publication number	US-10520375-B2
Application number	US-201815964709-A
Country	US
Kind code	B2
Filing date	Apr 27, 2018
Priority date	Apr 28, 2017
Publication date	Dec 31, 2019
Grant date	Dec 31, 2019

Abstract

A force detection apparatus includes a plurality of piezoelectric sensor parts placed around a first axis, and two fastening portions provided in correspondence with the piezoelectric sensor parts and applying precompression to the corresponding piezoelectric sensor part, wherein the two fastening portions are placed so that the piezoelectric sensor part may be located between the portions along a direction of the first axis. Further, four of the piezoelectric sensor parts are provided around the first axis. Furthermore, the plurality of piezoelectric sensor parts has a plurality of piezoelectric substrates.

First claim

What is claimed is:

1. A force detection apparatus comprising:
a base having a first axis and an outer circumference around the first axis;
a plurality of piezoelectric sensor devices disposed at position directly adjacent to the outer circumference of the base; and
two fastening members disposed in the outer circumference of the base, the two fastening members being configured to apply precompression to a corresponding one of the plurality of piezoelectric sensor devices,
wherein the two fastening members sandwich the corresponding one of the plurality of piezoelectric sensor devices, and
the two fastening members and the corresponding one of the plurality of piezoelectric sensor devices are aligned with each other parallel to the first axis.

2. The force detection apparatus according to claim 1 ,
wherein the of the plurality of piezoelectric sensor devices include four of the piezoelectric sensor devices that are provided at positions directly adjacent to the outer circumference of the base.

3. The force detection apparatus according to claim 1 ,
wherein each of the plurality of piezoelectric sensor devices has a plurality of piezoelectric substrates.

4. The force detection apparatus according to claim 3 , wherein the plurality of piezoelectric substrates are stacked in a direction crossing the first axis.

5. The force detection apparatus according to claim 3 , wherein the plurality of piezoelectric substrates include a Y cut quartz crystal plate.

6. A force detection apparatus comprising:
a plurality of piezoelectric sensor devices placed around a first axis; and
two fastening members provided in correspondence with the plurality of piezoelectric sensor devices and applying precompression to a corresponding one of the plurality of piezoelectric sensor devices,
wherein the two fastening members are placed so that the corresponding one of the plurality of piezoelectric sensor devices is located between the two fastening members, and
the two fastening members and the corresponding one of the plurality of piezoelectric sensor devices are aligned with each other along a third axis respectively tilted relative to the first axis and a second axis orthogonal to the first axis.

7. The force detection apparatus according to claim 6 ,
wherein the plurality of piezoelectric sensor devices include four of the piezoelectric sensor devices that are provided around the first axis.

8. The force detection apparatus according to claim 6 ,
wherein each of the plurality of piezoelectric sensor devices has a plurality of piezoelectric substrates.

9. The force detection apparatus according to claim 8 , wherein the plurality of piezoelectric substrates are stacked in a direction crossing the first axis.

10. The force detection apparatus according to claim 8 , wherein the plurality of piezoelectric substrates include a Y cut quartz crystal plate.

11. A robot comprising:
a body;
an arm attached to the body;
an end effector attached at a distal end of the arm;
a force detection apparatus disposed at the end effector, the force detection apparatus including:
a base having a first axis and an outer circumference around the first axis;
a plurality of piezoelectric sensor devices disposed at position directly adjacent to the outer circumference of the base; and
two fastening members disposed in the outer circumference of the base, the two fastening members being configured to apply precompression to a corresponding one of the plurality of piezoelectric sensor devices,

wherein the two fastening members sandwich the corresponding one of the plurality of piezoelectric sensor devices, and
the two fastening members and the corresponding one of the plurality of piezoelectric sensor devices are aligned with each other parallel to the first axis.

Assignees

• Seiko Epson Corp

Inventors

• Kamiya Toshiyuki

Classifications

• B25J18/04

  rotatable · CPC title

• G01L1/16 Primary

  using properties of piezoelectric devices · CPC title

• G01L5/0076

  Force sensors associated with manufacturing machines (G01L5/0066, G01L5/0071 and B23Q17/09 take precedence; for the specific machine or operation involved see relevant class, e.g. B21 - B42) · CPC title

• G01L5/167

  using piezoelectric means · CPC title

• G01L5/009

  Force sensors associated with material gripping devices · CPC title