System and method for manufacturing a semiconductor junction

Patent metadata

Field	Value
Publication number	US-10514503-B2
Application number	US-201615331043-A
Country	US
Kind code	B2
Filing date	Oct 21, 2016
Priority date	Mar 4, 2016
Publication date	Dec 24, 2019
Grant date	Dec 24, 2019

Abstract

A method of fabricating a P-N junction in a semiconductor structure, e.g. silicon (Si) structure, is presented. The method may include several implantation steps performed at a single implantation angle with respect to the Si structure. In a first implantation step, a first dopant species is implanted over a first portion of the Si structure including a first edge of the Si structure. In a second implantation step, a second dopant species is implanted over a second portion of the Si structure including a second edge of the Si structure opposed to the first edge but excluding the first edge. The first portion and the second portion may overlap in a central portion of the Si structure between the first edge and the second edge, such that the second dopant species may be implanted below the first dopant species. In a third implantation step, the second dopant species is implanted over the second portion of the Si structure including the second edge of the Si structure opposed to the first edge but excluding the first edge, such that the second dopant species is implanted above the first dopant species.

First claim

The invention claimed is:

1. A method of fabricating a P-N junction in a silicon (Si) structure defining a ring modulator, the method comprising:
implanting a first dopant species over a first portion of the Si structure including a first edge of the Si structure;
deep implanting a second dopant species over a second portion of the Si structure including a second edge of the Si structure opposed to the first edge but excluding the first edge, wherein the first portion and the second portion overlap in a central portion of the Si structure between the first edge and the second edge, and wherein the second dopant species is implanted below the first dopant species; and
shallow implanting the second dopant species over the second portion of the Si structure including the second edge of the Si structure opposed to the first edge but excluding the first edge, wherein the second dopant species is implanted above the first dopant species;
wherein a first side face adjacent the first edge corresponds to an outer surface of the ring modulator, and a second side face adjacent the second edge corresponds to an inner face of the ring modulator.

2. The method of claim 1 , wherein the implanting of the first dopant species and the deep and shallow implanting of the second dopant species is performed at a generally normal angle of incidence to the Si structure.

3. The method of claim 1 , wherein the deep implanting and the shallow implanting of the second dopant species are performed such that area predominantly doped with the second dopant species is a single electrically contiguous area.

4. The method of claim 3 , wherein the P-N junction comprises a U-shaped P-N junction.

5. The method of claim 1 , wherein the implanting of the first dopant species is performed with a first mask extending over, and shielding, the second edge.

6. The method of claim 5 , wherein the deep implanting and the shallow implanting of the second species is performed with a second mask extending over, and shielding, the first edge.

7. The method of claim 1 , wherein the deep implanting of the second dopant species is performed at a higher energy than the implanting of the first dopant species.

8. The method of claim 1 , wherein the deep implanting of the second dopant species is performed at a higher energy than the shallow implanting of the second dopant species.

9. The method of claim 7 , wherein the shallow implanting of the second dopant species is performed at a lower energy than the implanting of the first dopant species.

10. The method of claim 7 , wherein the shallow implanting of the second dopant species is performed at a same energy as the implanting of the first dopant species.

11. The method of claim 1 , wherein the deep implanting of the second dopant species is performed at a higher dose than the implanting of the first dopant species.

12. The method of claim 1 , wherein the deep implanting of the second dopant species is performed at a higher dose than the shallow implanting of the second dopant species.

13. The method of claim 1 , wherein the deep implanting of the second dopant species is performed at a higher energy than both the implanting of the first dopant species and the shallow implanting of the second dopant species.

14. The method of claim 1 , wherein the first dopant species comprises a P-type dopant, and wherein the second dopant species comprises an N-type dopant.

15. The method of claim 1 , wherein the first dopant species comprises an N-type dopant, and wherein the second dopant species comprises a P-type dopant.

16. The method of claim 1 , wherein the first dopant species comprises boron, and wherein the second dopant species comprises phosphorus.

17. The method of claim 1 , wherein the Si structure comprises an optical waveguide.

18. A P-N junction manufactured using the method of claim 1 .

19. A Mach-Zehnder interferometer comprising the P-N junction of claim 18 .

20. An optical modulator comprising the P-N junction of claim 18 .

Assignees

• Poon Joyce Kai See
• Yong Zheng
• Sacher Wesley David
• Governing Council Univ Toronto

Inventors

• Poon Joyce Kai See
• Yong Zheng
• Sacher Wesley David

Classifications

• G02B6/1347 Primary

  using ion implantation (ion implantation in glass C03C23/0055; ion implantation in general C23C) · CPC title

• G02B2006/12119

  Bend · CPC title

• G02F1/2257

  the optical waveguides being made of semiconducting material · CPC title

• G02B2006/12097

  Ridge, rib or the like · CPC title

• G02F1/025 Primary

  in an optical waveguide structure (G02F1/017, {G02F1/2257} take precedence) · CPC title