Deposition apparatus and manufacturing process including film forming step by deposition apparatus

Patent metadata

Field	Value
Publication number	US-10507488-B2
Application number	US-201615095325-A
Country	US
Kind code	B2
Filing date	Apr 11, 2016
Priority date	Apr 16, 2015
Publication date	Dec 17, 2019
Grant date	Dec 17, 2019

Abstract

A deposition apparatus includes a dome rotatable around the central axis; a loop chain surrounding the central axis on the dome; a power transmission shaft transmitting rotational motion of the dome; a first gear section transforming the rotational motion of the dome to rotational motion of the shaft; a second gear section provided with a chain-driving sprocket and configured to transform the rotational motion of the shaft to rotational motion of the sprocket; and a tray holder located beside the loop chain, the tray holder including a first internal power transmission shaft and a rotating portion holding a tray. The sprocket is rotated through the rotation of the dome to drive the loop chain, the first internal power transmission shaft of the tray holder is rotated by motion of the loop chain, and the rotating portion is rotated through rotation of the first internal power transmission shaft.

First claim

What is claimed is:

1. A deposition apparatus comprising:
a dome configured to be rotatable around the central axis;
a loop chain arranged on the dome, the loop chain surrounding the central axis;
a power transmission shaft configured to transmit rotational motion of the dome;
a first gear section configured to transform the rotational motion of the dome to rotational motion of the power transmission shaft;
a second gear section provided with a chain-driving sprocket and configured to transform the rotational motion of the power transmission shaft to rotational motion of the chain-driving sprocket; and
a tray holder located beside the loop chain and fixed on the dome, the tray holder including a first internal power transmission shaft and a rotating portion configured to hold a tray,
wherein the deposition apparatus is configured such that the chain-driving sprocket is rotated through the rotation of the dome to drive the loop chain, the first rotating shaft of the tray holder is rotated by motion of the loop chain, and the rotating portion is rotated through rotation of the first internal power transmission shaft, wherein the tray holder is further provided with
a fixing portion located beside the loop chain and fixed on the dome of the deposition apparatus, the first internal power transmission shaft being held rotatably by the fixing portion;
a swinging portion fixed to a swing pivot held rotatably by the fixing portion so as to be swingable; and
a second internal power transmission shaft connected to the first internal power transmission shaft through a universal joint and held rotatably by the swinging portion; and
a crank mechanism connecting the first internal power transmission shaft and the swinging portion such that the swinging portion is made to swing by rotation of the first internal power transmission shaft,
wherein the first internal power transmission shaft is held rotatably by the fixing portion, the rotating portion is held by the second internal power transmission shaft and configured to hold a tray, and the swinging portion is configured to swing with the rotating portion through rotation of the first internal power transmission shaft, and wherein
the deposition apparatus is configured such that the ratio of the number of revolutions of the tray per unit time to the number of revolutions of the dome per unit time and the ratio of the period of the swing to the number of revolutions of the dome per unit time can be set to desired values by changing gear ratios.

2. A deposition apparatus according to claim 1 , comprising plural loop chains and plural power transmission shafts, each of the plural power transmission shafts corresponding to a separate one of the plural loop chains.

3. A deposition apparatus according to claim 1 , wherein the tray holder is further provided with a crank mechanism including a rotating plate and a crank rod, the rotating plate is configured to be rotated through the rotation of the first internal power transmission shaft, and the crank rod connecting the rotating plate and the swinging portion is configured to swing the swinging portion through the rotation of the first internal power transmission shaft.

4. A deposition apparatus according to claim 3 , wherein the tray holder is configured such that a distance between the position where the crank rod is connected to the rotating plate and the center of the rotating plate can be changed to change the maximum value of an angle of inclination of a tray face with respect to a reference position.

Assignees

• Nalux Co Ltd

Inventors

• Higuchi Toshiro
• Ueno Hiroshi
• Kimura Hitoshi

Classifications

• B05D1/002 Primary

  the substrate being rotated · CPC title

• G02B1/10

  Optical coatings produced by application to, or surface treatment of, optical elements (G02B1/08 takes precedence) · CPC title

• B05D1/60

  Deposition of organic layers from vapour phase (vapour phase deposition in general C23C14/00, C23C16/00) · CPC title

• C23C14/24

  Vacuum evaporation · CPC title

• C23C14/505 Primary

  for rotation of the substrates · CPC title