Apparatus for generating an atmospheric pressure plasma

Patent metadata

Field	Value
Publication number	US-10506699-B2
Application number	US-201716061860-A
Country	US
Kind code	B2
Filing date	Oct 20, 2017
Priority date	Oct 25, 2016
Publication date	Dec 10, 2019
Grant date	Dec 10, 2019

Abstract

An apparatus for generating an atmospheric pressure plasma is disclosed. In an embodiment an apparatus includes a first support element and a piezoelectric transformer supported by the first support element, wherein the piezoelectric transformer is supported at a position at which an oscillation node is formed when the piezoelectric transformer is operated at an operating frequency that is lower than its parallel resonant frequency, and wherein the piezoelectric transformer is configured to generate a non-thermal atmospheric pressure plasma.

First claim

The invention claimed is:

1. An apparatus for generating an atmospheric pressure plasma, the apparatus comprising:
a first support element; and
a piezoelectric transformer supported by the first support element,
wherein the piezoelectric transformer is supported at a position at which an oscillation node is formed when the piezoelectric transformer is operated at an operating frequency that is lower than its parallel resonant frequency, and wherein the piezoelectric transformer is configured to generate a non-thermal atmospheric pressure plasma.

2. The apparatus according to claim 1 , wherein a difference between the operating frequency and the parallel resonant frequency is between about 10 kHz and 0.1 kHz.

3. The apparatus according to claim 1 , wherein the parallel resonant frequency is defined as a frequency at which an impedance of the piezoelectric transformer has a maximum when an AC voltage at the frequency is applied to the piezoelectric transformer and the piezoelectric transformer does not generate plasma.

4. The apparatus according to claim 1 , wherein the piezoelectric transformer has an input region and an output region, wherein the input region has an input-side end side of the piezoelectric transformer, the input-side end side pointing away from the output region, and wherein the output region has an output-side end side, which points away from the input region.

5. The apparatus according to claim 4 , wherein the piezoelectric transformer has a length L, wherein the length L specifies a distance of the input-side end side to the output-side end side, and wherein a distance of the position on which the piezoelectric transformer is supported on the first support element from the input-side end side is in a range between ¼ L-5.0 mm and ¼ L-0.05 mm.

6. The apparatus according to claim 4 , further comprising a contact element fastened to the piezoelectric transformer and designed to apply an AC voltage to the input region, and wherein the contact element is fastened at a position at the input region whose distance from the input-side end side corresponds to the distance from the position at which the first support element is arranged.

7. The apparatus according to claim 4 , wherein the input region is configured to convert an applied AC voltage to a mechanical oscillation, and wherein the output region is configured to convert a mechanical oscillation to an electrical voltage.

8. The apparatus according to claim 1 , further comprising a second support element on which the piezoelectric transformer is supported, wherein the piezoelectric transformer is supported on the second support element at a position at which an oscillation node is formed when the piezoelectric transformer is operated at the operating frequency and the piezoelectric transformer is configured to generate the non-thermal atmospheric pressure plasma.

9. The apparatus according to claim 8 , wherein a distance of the position at which the piezoelectric transformer is supported on the second support element from an input-side end side is in a range between ¾ L-5.0 mm and ¾ L-0.05 mm.

10. The apparatus according to claim 9 , wherein a distance of the position at which the piezoelectric transformer is supported on the first support element from the input-side end side is ¼ L-A, wherein a distance of the position at which the piezoelectric transformer is supported on the second support element from the input-side end side is ¾ L-B, and wherein B>A.

11. The apparatus according to claim 1 , wherein the first support element is configured in such a way that it elastically deforms in an event of compression and in an event of expansion of the piezoelectric transformer.

12. The apparatus according to claim 1 , wherein the first support element comprises a material selected from the group consisting of polybutylene terephthalate, polytetrafluoroethylene, polyamide and polyamide comprising glass-fiber proportions.

13. The apparatus according to claim 1 , wherein the first support element has a shape that tapers in a wedge shape in a direction of the piezoelectric transformer and bears against the piezoelectric transformer in approximately linear fashion.

14. The apparatus according to claim 1 , wherein the piezoelectric transformer is configured to generate the non-thermal atmospheric pressure plasma at an output-side end side.

15. A plasma generator comprising:
an apparatus according to claim 1 ; and
a housing in which the apparatus is arranged.

16. The plasma generator according to claim 15 , further comprising an actuation circuit for actuating the piezoelectric transformer, the actuation circuit being arranged in the housing.

Assignees

• Epcos Ag

Inventors

• Rinner Franz
• Kudela Pavol
• Puff Markus

Classifications

• H05H2001/2481

  Electricity · mapped topic

• H01L41/053

  Electricity · mapped topic

• H01L41/107

  Electricity · mapped topic

• H01L41/044

  Electricity · mapped topic

• H05H1/24 Primary

  Generating plasma {(nuclear fusion reactors G21B1/00; gas-filled discharge reactors H01J37/32)} · CPC title