Substrate Processing Method, Apparatus, and System
US-2024363405-A1 · Oct 31, 2024 · US
US9711333B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9711333-B2 |
| Application number | US-201514704317-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 5, 2015 |
| Priority date | May 5, 2015 |
| Publication date | Jul 18, 2017 |
| Grant date | Jul 18, 2017 |
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An atmospheric-pressure plasma treatment system includes a plasma source including at least one electrode, a gas in a gas chamber, and an AC power supply that supplies power to the at least one electrode to form a plasma in the gas. A radial-flow surface has a jet nozzle through which the gas flows and the radial-flow surface has a surface profile that conforms to a nonplanar treatment surface of an object. The radial-flow surface is separated from the nonplanar treatment surface by a gap that is less than 2 times a diameter of the jet nozzle so that the gas flows radially outward from the nozzle and between the radial-flow surface and the nonplanar treatment surface.
Opening claim text (preview).
The invention claimed is: 1. An atmospheric-pressure plasma treatment system, comprising: a plasma source including at least one electrode, a gas in a gas chamber, and an AC power supply that supplies power to the at least one electrode to form a plasma in the gas; and a radial-flow surface having a jet nozzle through which the gas flows, the jet nozzle having a nozzle diameter, wherein the radial-flow surface has a surface profile that conforms to a nonplanar treatment surface of an object, the radial-flow surface separated from the nonplanar treatment surface by a gap that is less than two times the nozzle diameter so that the gas flows radially outward from the nozzle and between the radial-flow surface and the nonplanar treatment surface. 2. The atmospheric-pressure plasma treatment system of claim 1 , wherein the radial-flow surface is an electrode. 3. The atmospheric-pressure plasma treatment system of claim 1 , wherein the radial-flow surface is flexible and topographically compliant. 4. The atmospheric-pressure plasma treatment system of claim 1 , wherein the AC power supply is a tunable power supply. 5. The atmospheric-pressure plasma treatment system of claim 4 , wherein the tunable power supply operates between 1 kHz and 1 GHz. 6. The atmospheric-pressure plasma treatment system of claim 1 , wherein the electrode is a first electrode and the plasma source further includes a second electrode. 7. The atmospheric-pressure plasma treatment system of claim 6 , wherein either the first electrode or the second electrode is covered by a dielectric coating. 8. The atmospheric-pressure plasma treatment system of claim 1 , wherein the gas includes one or more of helium, neon, argon, krypton, nitrogen, oxygen or a mixture thereof. 9. The atmospheric-pressure plasma treatment system of claim 1 , wherein the object is an inkjet printhead. 10. The atmospheric-pressure plasma treatment system of claim 1 , wherein the object is not rigid. 11. The atmospheric-pressure plasma treatment system of claim 1 , wherein the object includes a web. 12. The atmospheric-pressure plasma treatment system of claim 1 , wherein the nonplanar treatment surface includes a polymer. 13. The atmospheric-pressure plasma treatment system of claim 1 , further including a plurality of plasma sources, each plasma source having a radial-flow surface conforming to a different portion of the nonplanar treatment surface. 14. The atmospheric-pressure plasma treatment system of claim 1 , wherein the gas includes plasma-generated gas species. 15. The atmospheric-pressure plasma treatment system of claim 14 , wherein the confined radial flow of gas extends over only a portion of the nonplanar treatment surface. 16. The atmospheric-pressure plasma treatment system of claim 14 , wherein the nonplanar treatment surface is electrically conductive or the radial-flow surface is electrically conductive. 17. The atmospheric-pressure plasma treatment system of claim 1 , wherein the plasma source is a first plasma source, the radial-flow surface is a first radial-flow surface, the jet nozzle is a first nozzle, and the gas is a first gas; and further including a second plasma source having a second radial-flow surface having a second jet nozzle through which a second gas passes. 18. The atmospheric-pressure plasma treatment system of claim 17 , wherein the first plasma source is located to provide a first confined jet impingement to a first side of an object and the second plasma source is located to provide a second confined jet impingement to a second side of the object. 19. The atmospheric-pressure plasma treatment system of claim 17 , wherein the first gas is a different gas than the second gas. 20. The atmospheric-pressure plasma treatment system of claim 1 , wherein the plasma source includes three electrodes. 21. The atmospheric-pressure plasma treatment system of claim 1 , wherein the radial flow is radially symmetric along at least a portion of the nonplanar treatment surface and the radial-flow surface. 22. The atmospheric-pressure plasma treatment system of claim 1 , wherein the gap is substantially constant. 23. The atmospheric-pressure plasma treatment system of claim 1 , wherein the radial-flow surface has a minimum radius of greater than five times the nozzle diameter of the jet nozzle. 24. The atmospheric-pressure plasma treatment system of claim 1 , wherein the radial-flow surface has a minimum radius of greater than ten times the nozzle diameter of the jet nozzle. 25. The atmospheric-pressure plasma treatment system of claim 1 , wherein gas flow exiting the jet nozzle has a Reynolds number of greater than 2700. 26. An atmospheric-pressure plasma treatment system, comprising: a plasma source including at least one electrode, a gas in a gas chamber, and an AC power supply that supplies power to the at least one electrode to form a plasma in the gas; and a radial-flow surface having a jet nozzle through which the gas flows, the jet nozzle having a nozzle diameter, wherein the radial-flow surface has a surface profile that conforms to a nonplanar treatment surface of an object, the radial-flow surface separated from the nonplanar treatment surface by a gap that is less than two times the nozzle diameter so that the gas flows radially outward from the nozzle and between the radial-flow surface and the nonplanar treatment surface; wherein the plasma source includes a piezoelectric element and the AC power supply has a voltage amplitude that is less than or equal to 50 volts.
using applied electromagnetic fields, e.g. high frequency or microwave energy (H05H1/26 takes precedence) · CPC title
Electricity · mapped topic
Dielectric barrier discharge · CPC title
using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes · CPC title
Electricity · mapped topic
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