Method and device for manipulating particle beam

Patent metadata

Field	Value
Publication number	US-10497537-B2
Application number	US-201815925965-A
Country	US
Kind code	B2
Filing date	Mar 20, 2018
Priority date	Jan 21, 2014
Publication date	Dec 3, 2019
Grant date	Dec 3, 2019

Abstract

A method of manipulating an electron beam is disclosed. The method comprises transmitting the beam through a phase mask selected to spatially modulate a phase of the beam over a cross-section thereof.

First claim

What is claimed is:

1. A method of manipulating a particle beam, comprising:
transmitting the beam through a phase mask selected to spatially modulate a phase of a wavefront of the beam over a cross-section thereof, wherein said phase modulation is selected to at least partially compensate for aberration generated by a beam focusing system; and
applying a multipole electromagnetic field to the beam so as to also at least partially compensate for aberrations generated by said beam focusing system;
wherein said compensation by said multipole electromagnetic field is complementary to said compensation by said phase mask.

2. The method of claim 1 , wherein said phase modulation is selected to at least partially compensate for spherical aberrations generated by said beam focusing system, and said multipole electromagnetic field is selected so as to at least partially compensate for chromatic aberrations generated by said beam focusing system.

3. The method according to claim 1 , wherein said phase modulation is selected to at least partially compensate for aberrations generated by said beam focusing system along a first axis, and said multipole electromagnetic field is selected so as to at least partially compensate for aberrations generated by said beam focusing system along a second axis.

4. A system for manipulating a particle beam, comprising:
a beam focusing system;
a phase mask having a solid material being transmissive to a particle beam and being patterned such to spatially modulate a phase of a wavefront of said particle beam over a cross-section of said particle beam, wherein said phase modulation is selected to at least partially compensate for aberrations generated by said beam focusing system; and
an active aberration corrector configured for applying a multipole electromagnetic field to the beam so as to also at least partially compensate for aberrations generated by said beam focusing system;
wherein said compensation by said multipole electromagnetic field is complementary to said compensation by said phase mask.

5. The system of claim 4 , wherein said beam focusing system is positioned behind said phase mask.

6. The system of claim 4 , wherein said beam focusing system is positioned in front of said phase mask.

7. The system of claim 4 , wherein said beam focusing system is integrated with said phase mask.

8. A particle beam system, comprising a particle beam source and a particle beam manipulation system, wherein said particle beam manipulation system comprises the system according to claim 4 .

9. The system of claim 8 , being configured as one of a transmission electron microscope system, a scanning electron microscope system, an electron beam tomography (EBT) system, an electron beam lithography system, a spectroscopy system, a mass spectroscopy system and a free electron laser system.

10. The system according to claim 4 , wherein said phase mask is selected to provide a predetermined pattern at an image plane of said beam focusing system.

11. The system according to claim 4 , wherein said phase mask is selected to provide a predetermined pattern at a diffraction plane of said beam focusing system.

12. The system according to claim 4 , wherein said phase modulation is selected to at least partially compensate for spherical aberrations generated by said beam focusing system, and said multipole electromagnetic field is selected so as to at least partially compensate for chromatic aberrations generated by said beam focusing system.

13. The system according to claim 4 , wherein said phase modulation is selected to at least partially compensate for aberrations generated by said beam focusing system along a first axis, and said multipole electromagnetic field is selected so as to at least partially compensate for aberrations generated by said beam focusing system along a second axis.

14. The method according to claim 1 , wherein said wherein said phase modulation is also selected to at least partially compensate at least one type of aberrations selected from the group consisting of astigmatism and trefoil.

15. The method according to claim 1 , wherein said phase mask is discrete.

16. The method according to claim 1 , wherein said phase mask is continuous.

17. The method according to claim 1 , wherein said phase mask is characterized by a rectangular lattice.

18. The method according to claim 1 , wherein said phase mask is characterized by a non-rectangular lattice.

19. The method according to claim 1 , wherein a thickness of said phase mask vary across a surface thereof.

20. The method according to claim 1 , wherein said phase mask is characterized by a thickness function that does not exceed a critical point in which the accumulated phase equals a predetermined threshold.

21. The method according to claim 20 , wherein said predetermined threshold is selected from the group consisting of about π and about 2π.

22. The method according to claim 1 , wherein said phase mask is a binary thickness phase mask.

23. The method according to claim 1 , wherein the particle beam is a substantially coherent particle beam.

24. The method according to claim 1 , wherein said phase mask is selected also to modulate amplitude of the beam.

25. The system according to claim 4 , wherein said phase mask is selected also to modulate amplitude of the beam.

Assignees

• Univ Ramot

Inventors

• Shiloh Roy
• Lereah Yossi
• Arie Ady

Classifications

• H01J37/263

  Contrast, resolution or power of penetration · CPC title

• H01J2237/1532

  Astigmatism · CPC title

• H01J37/261

  Details · CPC title

• H01J37/26

  Electron or ion microscopes; Electron or ion diffraction tubes · CPC title

• H01J2237/2614

  Holography or phase contrast, phase related imaging in general, e.g. phase plates · CPC title