Device and method for two dimensional active carrier profiling of semiconductor components

Patent metadata

Field	Value
Publication number	US-10495666-B2
Application number	US-201816026428-A
Country	US
Kind code	B2
Filing date	Jul 3, 2018
Priority date	Jul 18, 2017
Publication date	Dec 3, 2019
Grant date	Dec 3, 2019

Abstract

A method of measuring an electrical characteristic of a current path is disclosed. In one aspect, the method includes a probe for scanning spreading resistance microscopy (SSRM), a test sample contacted by the probe, a back contact on the test sample, a bias voltage source and a logarithmic SSRM amplifier, when a modulation at a predefined frequency is applied to either the contact force of the probe or to the bias voltage, the device comprising electronic circuitry for producing in real time a signal representative of the electrical characteristic, according to the formula lognA=±VSSRM±logn(dV)+Vmultiplier.

First claim

What is claimed is:

1. A device for measuring an electrical characteristic of a current path that includes a probe for scanning spreading resistance microscopy (SSRM), a test sample contacted by the probe, a back contact on the test sample, a bias voltage source (Vb) and a logarithmic SSRM amplifier, when a modulation at a predefined frequency is applied to either the contact force of the probe or to the bias voltage, the device comprising electronic circuitry for producing in real time a signal representative of the electrical characteristic, according to the formula:
log n A=±V SSRM ±log n (dV)+ V multiplier

where:
A is the electrical characteristic,
n is the base of the logarithmic function applied in the logarithmic SSRM amplifier,
V SSRM is the DC component of the signal produced by the logarithmic SSRM amplifier,
log n (dV) is the logarithm of the modulation of the signal produced by the logarithmic amplifier, at the frequency of the modulation applied to either the contact force of the probe or to the bias voltage (Vb),
V multiplier is a constant that depends on the type of electric characteristic that is measured, and
the plus or minus signs depend on the sign of the bias voltage (V b ) and on the type of characteristic that is measured.

2. The device according to claim 1 , further comprising circuitry for producing a drive signal (V d ) for driving the contact force or the bias voltage.

3. The device according to claim 1 , further comprising a tuneable resistor configured to be included in the current path.

4. The device according to claim 1 , wherein the electric characteristic is the modulation dR of the resistance of said current path when a modulation is applied to the contact force, and wherein V multiplier is log n (ln 10/g) with g an integer.

5. The device according to claim 1 , wherein the device is produced as an electrical apparatus configured to be added to an SSRM measurement setup, the apparatus comprising input connections for receiving signals representative of V SSRM and dV and at least one output connection for delivering a signal representative of log n A.

6. The device according to claim 5 , wherein the input connection for receiving a signal representative of dV is configured to be coupled to a lock-in amplifier arranged to produce said signal in real time.

7. The device according to claim 5 , wherein the apparatus further comprises manual interfaces.

8. The device according to claim 7 , wherein the manual interfaces comprise an interface that allows to select which electrical parameter is to be measured.

9. The device according to claim 1 , comprising a summing circuit comprising inputs configured to receive signals which are respectively representative of ±V SSRM , ±log n (dV) and V multiplier .

10. The device according to claim 9 , configured to allow a reference voltage to be connected to the input configured to receive a signal representative of ±V SSRM , instead of said signal representative of ±V SSRM .

11. A method for measuring an electrical characteristic of a current path that includes a probe for scanning spreading resistance microscopy (SSRM), a test sample contacted by the probe, a back contact on the test sample, a bias voltage source (V b ) and a logarithmic SSRM amplifier, comprising:
applying a modulation at a predefined frequency to either the contact force of the probe or to the bias voltage (Vb),
measuring the output voltage V SSRM dV of the logarithmic SSRM amplifier, wherein V SSRM is the DC component of the signal produced by the logarithmic SSRM voltage amplifier and wherein dV is the modulation of the signal produced by the logarithmic amplifier, at the frequency of the modulation applied to either the contact force of the probe or to the bias voltage,
determining dV by a lock-in amplifier,
determining V SSRM ,
calculating the electrical characteristic on a logarithmic scale in real time by the function:
log n A=±V SSRM ±log n (dV)+ V multiplier

where:
A is the electrical characteristic
n is the base of the logarithmic function applied in the logarithmic SSRM amplifier,
V multiplier is a constant that depends on the type of electric characteristic that is measured, and
the plus or minus signs depend on the sign of the bias voltage (V b ) and on the type of characteristic that is measured.

12. The method according to claim 11 , wherein a modulation is applied to the contact force, wherein the electric characteristic is the modulation dR of the resistance of said current pat, and wherein V multiplier is log n (ln 10/g) with g an integer.

Assignees

• Imec Vzw

Inventors

• Paredis Kristof
• Celano Umberto
• Vandervorst Wilfried
• Dixon-Luinenburg Oberon

Classifications

• H10P74/207

  Electrical properties, e.g. testing or measuring of resistance, deep levels or capacitance-voltage characteristics · CPC title

• G01R27/02

  Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant (by measuring phase angle only G01R25/00) · CPC title

• G01Q60/30 Primary

  Scanning potential microscopy · CPC title

• H01L22/14

  Electricity · mapped topic