Fluid delivery system and method

Patent metadata

Field	Value
Publication number	US-10495259-B2
Application number	US-201715634686-A
Country	US
Kind code	B2
Filing date	Jun 27, 2017
Priority date	Feb 24, 2012
Publication date	Dec 3, 2019
Grant date	Dec 3, 2019

Abstract

A fluid supply system adapted for vacuum and pressure cycling of fluid, including a transfer vessel adapted to supply a process canister with fluid drawn from a bulk canister under a vacuum, wherein delivery of fluid from the transfer vessel to the process canister is accomplished with positive pressure. A method is also disclosed of delivering fluid, including drawing fluid under vacuum from a bulk canister and pressurizing the transfer vessel to effect dispensing of the fluid into a process canister for delivery to a location of use.

First claim

What is claimed is:

1. A fluid supply system adapted for vacuum and pressure cycling of fluid, the system comprising:
at least one bulk canister;
a process canister for delivery of fluid to a location of use; and
a transfer vessel in fluid communication with the at least one bulk canister via a first fluid line and the process canister via a second fluid line, the transfer vessel adapted to supply the process canister with fluid from the at least one bulk canister,
wherein the transfer vessel has a volumetric capacity that is less than the volumetric capacity of the at least one bulk canister and the process canister and wherein the transfer vessel is coupled with (i) a vacuum source including a first valve for drawing fluid from the at least one bulk canister through the first fluid line into the transfer vessel ( 103 ) and selectively maintaining a vacuum condition in the at least one bulk canister through activation of the first valve, and (ii) a first source of pressurizing gas for pressure-mediated transfer of fluid from the transfer vessel into said process canister via the second fluid line through activation of a second valve, wherein the transfer vessel is adapted to be cycled between a vacuum state and a pressure state.

2. The system of claim 1 , wherein the process canister is coupled with a second source of pressurizing gas for pressure-mediated delivery of fluid to the location of use.

3. The system of claim 2 , wherein the first source of pressurizing gas creates greater pressure than the second source of pressurizing gas.

4. The system of claim 1 , wherein the at least one bulk canister is coupled with a third source of pressurizing gas arranged to selectively counter-balance the vacuum condition.

5. The system of claim 1 , wherein the at least one bulk canister comprises any one of a stainless steel vessel, a plastic vessel, a glass bottle, or a collapsible bag.

6. The system of claim 1 , further comprising at least one pressure transducer adapted to sense pressure of fluid in the at least one bulk canister and produce a transducer output indicative of the said pressure, and a processor adapted to receive said transducer output and responsively determine rate of change of pressure of said fluid and provide a processor output indicative of an increased rate of change correlative to onset of exhaustion of fluid in the at least one bulk canister, when the at least one bulk canister is at onset of exhaustion of fluid.

7. The system of claim 1 , wherein fluid holding volume of the transfer vessel is less than fluid holding volume of any one of the at least one bulk canister and the process canister.

8. The system of claim 1 , wherein the location of use comprises a semiconductor manufacturing tool.

9. The system of claim 1 , wherein at least one of the at least one bulk canister, transfer vessel and process canister is of non-stainless steel construction.

10. The system of claim 9 , wherein the at least one bulk canister is of non-stainless steel construction.

11. A method of delivering fluid for use thereof, the method characterized by:
drawing fluid under vacuum from at least one bulk canister into a transfer vessel;
pressurizing the transfer vessel to dispense the fluid to a process container; and
selectively maintaining a vacuum condition in the at least one bulk canister.

Assignees

• Entegris Inc

Inventors

• Tom Glenn M
• Ware Donald D
• Chism Richard D
• Hodges Jordan
• Mcferon Mitchell W

Classifications

• B67D7/0272 Primary

  specially adapted for transferring liquids of high purity · CPC title

• F17C7/00

  Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass · CPC title

• B67D7/025

  specially adapted for transferring liquids of high purity · CPC title

• F17C9/00 Primary

  Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure · CPC title

• B67D7/0283

  specially adapted for transferring liquids of high purity · CPC title