Exposure device, substrate processing apparatus, exposure method for substrate and substrate processing method
US-9972516-B2 · May 15, 2018 · US
US10493759B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10493759-B2 |
| Application number | US-201816131076-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 14, 2018 |
| Priority date | Sep 22, 2017 |
| Publication date | Dec 3, 2019 |
| Grant date | Dec 3, 2019 |
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A foil transfer device includes a light emitter that emits light, a driver that causes scanning to be performed with the light by moving one or both of an irradiator and a substrate relative to each other, the irradiator casting the light emitted by the light emitter, and a controller that causes the light emitter to change power of the light according to a velocity indication value during at least one of an acceleration period from a time when at least one of the irradiator and the substrate begins to move to a time when a velocity thereof becomes constant and a deceleration period from a time when the velocity is constant to a time when at least one of the irradiator and the substrate stops.
Opening claim text (preview).
What is claimed is: 1. A foil transfer device to transfer a foil film to a substrate into a predetermined shape by scanning with light, the substrate on which the foil film is provided, the foil transfer device comprising: a light emitter that emits the light; a driver to cause the scanning to be performed with the light by moving one or both of an irradiator and the substrate relative to each other, the irradiator casting the light emitted by the light emitter; and a controller that controls the light emitter so as to allow the light emitter to change power of the light according to a velocity indication value during at least one of an acceleration period from a time when at least one of the irradiator and the substrate begins to move to a time when a velocity thereof becomes constant and a deceleration period from a time when the velocity is constant to a time when at least one of the irradiator and the substrate stops. 2. The foil transfer device according to claim 1 , wherein the controller controls the light emitter so as to allow the light emitter to change the power of the light by analog control. 3. The foil transfer device according to claim 1 , wherein the controller controls the light emitter so as to allow the light emitter to change the power of the light by PWM control.
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