Inspection apparatus, inspection method, and program

Patent metadata

Field	Value
Publication number	US-10489900-B2
Application number	US-201715586301-A
Country	US
Kind code	B2
Filing date	May 4, 2017
Priority date	Jun 9, 2014
Publication date	Nov 26, 2019
Grant date	Nov 26, 2019

Abstract

To facilitate setting of a parameter at the time of generating an inspection image from an image acquired by using a photometric stereo principle. A photometric processing part generates an inspection image based on a plurality of luminance images acquired by a camera. A display control part and a display part switch and display the luminance image and the inspection image, or simultaneously display these images. An inspection tool setting part adjusts a control parameter of the camera and a control parameter of an illumination apparatus. Further, when the control parameter is adjusted, the display control part updates the image being displayed on the display part to an image where the control parameter after the change has been reflected.

First claim

What is claimed is:

1. An inspection apparatus comprising:
an illumination section which has a plurality of light segments to illuminate the inspection target from three or more illumination directions;
an imaging section for capturing an image of the inspection target illuminated by the illumination section;
a processor for controlling the illumination section for lighting each light segment sequentially one by one with respect to the three or more illumination directions and lighting all light segments simultaneously, and controlling the imaging section to acquire three or more luminance images with respectively different illumination directions and all-directional illumination image obtained by simultaneous illumination from three or more directions;
an inspection image generating section for obtaining a normal vector of a surface of the inspection target based on the three or more luminance images acquired by the imaging section and generating a shape image showing a shape of the workpiece based on the normal vector by a photometric stereo method;
an image selection section for selecting an inspection image, which is to be saved or outputted, out of the shape image and the all-directional illumination image;
a determination section for determining defectiveness/non-defectiveness of the inspection target by using the inspection image selected by the image selection section,
a display for switching and displaying at least one of the plurality of luminance images and the inspection image, or simultaneously displaying at least one of the plurality of luminance images and the inspection image;
an inspection tool setting part for adjusting at least one of a control parameter of the imaging section and a control parameter of the illumination section; and
a display control part for updating an image being displayed on the display to an image where the control parameter has been reflected when the control parameter is adjusted,
wherein, when the display displays an inspection image, the inspection tool setting part adjusts a generation condition for the inspection image by the photometric stereo method and the inspection tool setting part adjusts a characteristic size out of the generation conditions.

2. The inspection apparatus according to claim 1 , further comprising;
an inspection region setting section for executing search processing to set an inspection region on the inspection image, wherein
the all-directional image is used for executing a pattern search to set the inspection region on the shape image selected by the image selection section as the inspection image.

3. The inspection apparatus according to claim 1 , further comprising;
a pull-down menu for setting one illumination pattern out of a plurality of illumination patterns including a first lighting pattern which illuminates the inspection target from four directions sequentially and a second lighting pattern which illuminates the inspection target with lighting all light segments simultaneously.

4. The inspection apparatus according to claim 1 , wherein
when the inspection tool setting part changes exposure time of the imaging section, the imaging section captures an image of the inspection target based on the exposure time to acquire a plurality of luminance images, and
the display control part switches and displays, or simultaneously displays, at least one of the plurality of luminance images acquired after the exposure time is changed and the inspection image on the display.

5. The inspection apparatus according to claim 1 , wherein, when an illumination light amount is changed by the inspection tool setting part, an illumination light amount of each of a plurality of light sources provided in the illumination section is changed.

6. The inspection apparatus according to claim 1 , wherein, at the time of displaying a luminance image, the display emphasizes pixels whose pixel values are saturated out of pixels constituting the luminance image, or displays information indicating a ratio of pixels whose pixel values are saturated to pixels whose pixel values are not saturated.

7. The inspection apparatus according to claim 1 , wherein, at the time of displaying a synthesized luminance image obtained by synthesizing the plurality of luminance images, the display emphasizes pixels whose pixel values are saturated out of pixels constituting the synthesized luminance image, or displays information indicating a ratio of pixels whose pixel values are saturated to pixels whose pixel values are not saturated.

8. The inspection apparatus according to claim 1 , wherein, at the time of displaying the inspection image, the display emphasizes pixels whose coordinates match with those of pixels whose pixel values are saturated in the luminance image out of pixels of the inspection image, or displays information indicating a ratio of pixels whose pixel values are saturated to pixels whose pixel values are not saturated.

9. The inspection apparatus according to claim 1 , wherein the inspection tool setting part adjusts the number of lighting times of the illumination section.

10. The inspection apparatus according to claim 1 , wherein the inspection tool setting part changes a light source to be lighted out of a plurality of light sources provided in the illumination section.

11. The inspection apparatus according to claim 10 , wherein
the display displays a user interface for designating the light source to be lighted when the inspection tool setting part changes the light source to be lighted, and
the inspection tool setting part accepts designation of the light source to be lighted in the user interface.

12. The inspection apparatus according to claim 1 , wherein the display switches and displays, or simultaneously displays, a plurality of inspection images whose generation conditions are respectively different.

13. The inspection apparatus according to claim 1 , wherein
the display displays one inspection image selected out of a plurality of inspection images whose generation conditions are respectively different,
the inspection image generating section regenerates the one selected inspection image in accordance with the characteristic size adjusted by the inspection tool setting part, and
the display control part displays the regenerated inspection image on the display.

14. The inspection apparatus according to claim 1 , wherein the generation conditions include a common setting item that is commonly set for a plurality of inspection images and individual setting items that are individually set for the plurality of inspection images.

15. The inspection apparatus according to claim 1 , wherein the image selection section selects an image, which is to be saved or outputted, out of the plurality of inspection images with respectively different characteristic sizes.

16. The inspection apparatus according to claim 1 , wherein the image selection section selects an image, which is to be saved or outputted, out of the plurality of luminance images, the shape image, and a reflectance image whose pixel value is a reflectance of the surface of the inspection target.

Assignees

• Keyence Co Ltd

Inventors

• Ando Daisuke

Classifications

• G01N2201/061

  Sources · CPC title

• G06T2207/10152

  Varying illumination · CPC title

• G06T2207/30164

  Workpiece; Machine component · CPC title

• G01N21/8851

  Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges (G01N21/8806 and G01N21/93 - G01N21/95692 take precedence; optical measurement of dimensions G01B11/00; optical scanning G02B26/10; image transformation G06T3/00; computerised image enhancement G06T5/00; image processing per se for flaw detection G06T7/0002) · CPC title

• G01N2201/06

  Illumination; Optics · CPC title