Micromechanical component and method for adjusting an adjustable part simultaneously about two axes of rotation inclined in relation to one another

Patent metadata

Field	Value
Publication number	US-10488650-B2
Application number	US-201715604065-A
Country	US
Kind code	B2
Filing date	May 24, 2017
Priority date	May 24, 2016
Publication date	Nov 26, 2019
Grant date	Nov 26, 2019

Abstract

A micromechanical component includes an adjustable part, a mounting, at least one bending actuator, and a permanent magnet. The part is positioned on the mounting so as to be adjustable relative to the mounting about a first rotation axis and about a second rotation axis inclined relative to the first axis. The actuator includes at least one movable subregion. Movement of the subregion results in a restoring force that moves the part about the first axis. The part is connected indirectly to the magnet to be adjustable about the second axis of rotation via a magnetic field built up by the magnet together with a yoke device of the component or an external yoke. A micromirror device includes the micromechanical component. A method for adjusting the part includes adjusting the part simultaneously about the first and the second axes.

First claim

What is claimed is:

1. A micromechanical component, comprising:
a mounting element;
an adjustable part mounted on the mounting element so as to be simultaneously adjustable about a first axis of rotation and a second axis of rotation inclined with respect to the first axis of rotation;
at least one permanent magnet indirectly connected to the adjustable part such that the adjustable part is adjustable about the second axis of rotation via a magnetic field interacting with the at least one permanent magnet; and
at least one bending actuator that includes a first subregion and a second subregion, wherein:
the at least one bending actuator is configured to at least partially deform in response to receiving at least one electrical signal and move the first subregion in an adjusting movement relative to the second subregion; and
the adjusting movement results in a restoring force that acts to adjust the adjustable part about the first axis of rotation with respect to the mounting element.

2. The micromechanical component of claim 1 , further comprising:
a yoke device configured to build up the magnetic field together with the at least one permanent magnet.

3. The micromechanical component of claim 1 , wherein the at least one permanent magnet is configured to interact with an external yoke device to build up the magnetic field.

4. The micromechanical component of claim 1 , further comprising at least one outer spring and at least one inner spring that suspend the adjustable part on the mounting element such that the at least one inner spring is configured to deform about the first axis of rotation and the at least one outer spring is configured to deform about the second axis of rotation as the adjustable part is adjusted relative to the mounting element.

5. The micromechanical component of claim 4 , wherein at least one of:
the at least one inner spring is anchored to at least one point of the adjustable part lying on the first axis of rotation and on the at least one bending actuator; and
the micromechanical component further comprises at least one bending-actuator-carrying structure, the at least one inner spring anchored to at least one point on the bending-actuator-carrying structure lying on the second axis of rotation.

6. The micromechanical component of claim 4 , further comprising:
at least one intermediate spring;
wherein at least one of:
the at least one bending actuator is connected to the at least one permanent magnet via the at least one intermediate spring; and
the micromechanical component further comprises at least one bending-actuator-carrying structure, the at least one bending-actuator-carrying structure connected to the at least one permanent magnet via the at least one intermediate spring.

7. The micromechanical component of claim 6 , wherein the at least one inner spring is anchored to at least one of:
at least one point of the adjustable part lying on the first axis of rotation and on the at least one bending actuator; and
at least one point on the bending-actuator-carrying structure lying on the second axis of rotation.

8. The micromechanical component of claim 1 , further comprising:
a control device configured to supply the at least one electrical signal to the at least one bending actuator so as to set the adjustable part in a resonant oscillating movement about the first axis of rotation relative to the mounting element due to the restoring force resulting from the adjusting movement of the first subregion of the at least one bending actuator.

9. The micromechanical component of claim 8 , further comprising:
a yoke device that is operable to build up the magnetic field together with the at least one permanent magnet;
wherein the control device is further configured to operate the yoke device so as to adjust the adjustable part quasi-statically about the second axis of rotation via the magnetic field.

10. The micromechanical component of claim 1 , wherein the at least one bending actuator further includes at least one of:
at least one piezoelectric material;
at least one thermal-effect material; and
at least one shape-memory material.

11. The micromechanical component of claim 1 , wherein the at least one bending actuator is a bimetal bending arm.

12. A micromirror device, comprising:
a micromechanical component, comprising:
a mounting element;
an adjustable part mounted on the mounting element so as to be simultaneously adjustable about a first axis of rotation and a second axis of rotation inclined with respect to the first axis of rotation;
at least one permanent magnet indirectly connected to the adjustable part such that the adjustable part is adjustable about the second axis of rotation via a magnetic field interacting with the at least one permanent magnet; and
at least one bending actuator that includes a first subregion and a second subregion, wherein:
the at least one bending actuator is configured to at least partially deform in response to receiving at least one electrical signal and move the first subregion in an adjusting movement relative to the second subregion; and
the adjusting movement results in a restoring force that acts to adjust the adjustable part about the first axis of rotation with respect to the mounting element.

13. A method of adjusting an adjustable part simultaneously about two axes of rotation that are inclined relative to each other, comprising:
in response to at least one electrical signal, activating at least one bending actuator so as to at least partially deform the at least one bending actuator and set a first subregion of the at least one bending actuator in an adjusting movement with respect to a second subregion of the at least one bending actuator, the adjusting movement configured to result in a restoring force that acts to adjust the adjustable part about a first axis of rotation with respect to a mounting element on which the adjustable part is mounted; and
simultaneously to the adjusting of the adjustable part about the first axis, adjusting the adjustable part about a second axis of rotation relative to the mounting element that is inclined relative to the first axis of rotation via a magnetic field interacting with a permanent magnet connected indirectly with the adjustable part.

Assignees

• Bosch Gmbh Robert

Inventors

• Grutzeck Helmut
• Muchow Joerg
• Hattass Mirko
• Mark Stefan
• Balslink Thorsten
• Schatz Frank

Classifications

• G02B26/101

  with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129) · CPC title

• G02B26/0858 Primary

  the reflecting means being moved or deformed by piezoelectric means · CPC title

• B81B2203/058

  Rotation out of a plane parallel to the substrate · CPC title

• B81B7/02

  containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS] (B81B7/04 takes precedence) · CPC title

• G02B26/0833

  the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B) · CPC title