Electric device for detecting pressure

Patent metadata

Field	Value
Publication number	US-10488287-B2
Application number	US-201815944205-A
Country	US
Kind code	B2
Filing date	Apr 3, 2018
Priority date	Apr 6, 2016
Publication date	Nov 26, 2019
Grant date	Nov 26, 2019

Abstract

An electric device for detecting pressure and a pressure sensor includes an electric current channel arranged to conduct an electric current, wherein the electric current channel is disposed adjacent or proximate to a pressure sensitive structure. Upon the pressure sensitive structure being subjected to a change of an external pressure, the pressure sensitive structure is arranged to manipulate a first electrical characteristic of the electric current channel.

First claim

The invention claimed is:

1. An electric device for detecting pressure, comprising: a substrate; an electric current channel disposed on one side of the substrate, arranged to conduct an electric current; and a pressure sensitive structure disposed on the other side of the substrate, arranged to manipulate a first electrical characteristic of the electric current channel; wherein the pressure sensitive structure comprises a spacer structure and is subjected to a change in external pressure.

2. The electric device in accordance with claim 1 , wherein the first electrical characteristic of the electric current channel varies in response to a second electrical characteristic of the pressure sensitive structure.

3. The electric device in accordance with claim 1 , wherein the first electrical characteristic is an electrical resistance.

4. The electric device in accordance with claim 3 , wherein the electric current channel is defined by a first layer of material, and the electric current is conducted through at least a portion of the first layer of material.

5. The electric device in accordance with claim 4 , wherein the first layer of material includes a semiconductor material.

6. The electric device in accordance with claim 5 , wherein the first layer of material includes at least one of an organic semiconductor material and an oxide-based semiconductor material.

7. The electric device in accordance with claim 4 , further comprises at least two electrodes disposed on the first layer of material, wherein the at least two electrodes arranged to facilitate an electrical connection between the electric current channel and an electric current source.

8. The electric device in accordance with claim 7 , wherein the at least two electrodes are further arranged to define a source terminal and a drain terminal of a transistor structure.

9. The electric device in accordance with claim 2 , wherein the pressure sensitive structure comprises a second layer of material with the second electrical characteristic.

10. The electric device in accordance with claim 9 , wherein the second electrical characteristic is an electrical capacitance.

11. The electric device in accordance with claim 10 , wherein the second layer of material includes a dielectric material.

12. The electric device in accordance with claim 11 , wherein the second layer of material includes at least one of a polymeric filling and air.

13. The electric device in accordance with claim 10 , wherein the electrical capacitance varies with a thickness of the second layer of material.

14. The electric device in accordance with claim 13 , wherein the pressure sensitive structure further comprises a third layer of material arranged to change the thickness of the second layer of material in response to the change in external pressure subjected by the pressure sensitive structure.

15. The electric device in accordance with claim 14 , wherein the third layer of material is flexible, and the third layer of material deforms at least partially so as to change the thickness of the second layer of material when upon the pressure sensitive structure is subjected to the change in external pressure.

16. The electric device in accordance with claim 15 , wherein the spacer structure is arranged to define a dimension of the second layer of material, and wherein the second layer of material is encapsulated by at least the spacer structure and the third layer of material.

17. The electric device in accordance with claim 16 , wherein the spacer structure includes at least one of an adhesive tape and a layer of photoresist.

18. The electric device in accordance with claim 14 , wherein the third layer of material includes an electric conductor material.

19. The electric device in accordance with claim 18 , wherein the third layer of material includes at least one of a film of aluminum and a polymeric film with a coating of conductive material.

20. The electric device in accordance with claim 9 , wherein the pressure sensitive structure is further arranged to define a gate terminal of a transistor structure.

21. The electric device in accordance with claim 1 , further comprising an insulating layer deposited between the substrate and the electric current channel.

22. The electric device in accordance with claim 21 , wherein the insulating layer includes at least one of a polymeric material and a metal-oxide material.

23. A pressure sensor comprising:
at least one electric device for detecting pressure in accordance with claim 1 ; and
an electric current source in electrical connection with an electric current channel of each of the at least one electric device;
wherein a detection of the change in external pressure is represented by a measurement result of an electrical resistance of the electric current channel.

Assignees

• Univ City Hong Kong

Inventors

• Vellaisamy A L Roy
• Sun Qijun
• Zhuang Jiaqing

Classifications

• G01L9/0051

  using variations in ohmic resistance · CPC title

• G01L9/06 Primary

  of piezo-resistive devices · CPC title

• G01L9/0072 Primary

  using variations in capacitance · CPC title

• G01L9/0098

  using semiconductor body comprising at least one PN junction as detecting element · CPC title