Delivery container with flow distributor

Patent metadata

Field	Value
Publication number	US-10480070-B2
Application number	US-201715587095-A
Country	US
Kind code	B2
Filing date	May 4, 2017
Priority date	May 12, 2016
Publication date	Nov 19, 2019
Grant date	Nov 19, 2019

Abstract

Described herein are delivery containers, systems and methods using same for providing improvements to precursor utilization in the containers for deposition process, as well as the cleaning and refilling of the containers. The containers are designed with structures which allow a carrier gas to be delivered from a flow distributor. The flow distributor comprises a plurality of small openings (jets) through which the carrier gas enters the precursor chamber and impinges upon the surface of the chemical precursors to produce a vapor.

First claim

The invention claimed is:

1. A container for delivering a chemical precursor to a process tool, comprising:
a sidewall;
a base,
a lid having a flat surface,
an inlet tube,
a hollow flow distributor comprising a plurality of small openings as jets, and
an outlet passing through the lid;
wherein
the inlet tube passes through the lid and extended into the flow distributor, and is in fluid communication with the flow distributor,
the jets are facing the base at an angle ranging from 60 to 90 degrees to the lid,
each jet has an equivalent diameter ranging from 0.01 inches (0.025 cm) to 0.25 inches (0.64 cm); and
the hollow flow distributor has hollow bars and a hollow showerhead, the hollow showerhead is centered in the hollow flow distributor with the hollow bars extended from the hollow showerhead parallel to the lid, the hollow showerhead is in fluid communication with the hollow bars.

2. The container of claim 1 , wherein the container has a shape selected from the group consisting of cylindrical, rectangular cuboid, right cuboid, rectangular box, rectangular hexahedron, right rectangular prism, rectangular parallelepiped, and combinations thereof; and the hollow flow distributor has a cross section shape selected from the group consisting of tubular, circular, square, rectangular, and combinations thereof.

3. The container of claim 1 , wherein the hollow showerhead has a cross section shape selected from the group consisting of tubular, circular, square, rectangular, and combinations thereof.

4. The container of claim 1 , wherein the hollow bars have an inner equivalent diameter ranging from ⅛″ to 1″ and each jet on the hollow bars has an equivalent diameter ranging from 0.01 inches (0.025 cm) to 0.05 inches (0.125 cm).

5. The container of claim 1 , wherein the hollow flow distributor has 2 to 16 hollow bars having an inner equivalent diameter ranging from ⅛″ to 1″ and sealed on the sides, and each jet on the hollow bars has an equivalent diameter ranging from 0.01 inches (0.025 cm) to 0.05 inches (0.125 cm).

6. The container of claim 1 , wherein the hollow showerhead structure having a height of ⅛″ to 1″ with cross section area parallel to the lid ranging from 30% to 90% of cross section area of the container parallel to the lid, and each jet on the hollow showerhead has an equivalent diameter ranging from 0.01 inches (0.025 cm) to 0.05 inches (0.125 cm).

7. The container of claim 1 , wherein the hollow showerhead has a height of ⅛″ to 1″, the hollow bars have an inner equivalent diameter ranging from ⅛″ to 1″ and are sealed on the sides, and each jet on the flow distributor has an equivalent diameter ranging from 0.01 inches (0.025 cm) to 0.05 inches (0.125 cm).

8. A system for delivering a chemical precursor to a process tool, comprising:
the chemical precursor selected from the group consisting of metal halides, metal β-diketonates, metal β-diketoesterates, metal β-ketoiminates, metal β-diiminates, metal alkyls, metal carbonyls, alkyl metal carbonyls, metal cyclopentadienyls, metal cyclopentadienyls carbonyls, metal pyrrolyls, metal imidazolyls, metal amidinates, metal alkoxides, and combinations thereof;
wherein
the metal is selected from the group consisting of Mg, Ca, Sr, Ba, Y, La, Ce, Sm, Tb, Er, Yb, Lu, Ti, Zr, Hf, Fe, Co, Ni, Ru, Ir, Rh, Cu, Al, Sn, Pb, Sb, Bi, Te, Cr, Mo Ta, and W;

a container containing the chemical precursor; comprising:
sidewall,
a base,
a lid having a flat surface,
an inlet tube,
a hollow flow distributor comprising a plurality of small openings as jets, and
an outlet passing through the lid;
wherein
the inlet tube passes through the lid and extended into the flow distributor, and is in fluid communication with the flow distributor,
the jets are facing the base at an angle ranging from 60 to 90 degrees to the lid,
tip of each jet is located with a distance of greater or equal to 0.5 inches from the chemical precursor the jet is facing,
each jet has an equivalent diameter ranging from 0.01 inches (0.025 cm) to 0.25 inches (0.64 cm); and
the hollow flow distributor has hollow bars and a hollow showerhead, the hollow showerhead is centered in the hollow flow distributor with the hollow bars extended from the hollow showerhead parallel to the lid, the hollow showerhead is in fluid communication with the hollow bars.

9. The system of claim 8 , wherein the chemical precursor is selected from the group consisting of tungsten hexachloride, tungsten pentachloride, tantalum pentachloride, molybdenum pentachloride, hafnium tetrachloride, zirconium tetrachloride, dicobalt hexacarbonyl tert-butylacetylene (CCTBA), cyclopentadienyltungsten tricarbonyl hydride (CpW(CO) 3 H)), bis(isopropylcyclopentadienyl) tungsten dihydride (iPrCp) 2 WH 2 , bis(alkylcyclopentadienyl) tungsten dihydride (RCp)WH 2 , Ni(II)N,N′-di-tertiary-butylamidinate (Ni(II)(tBu-AMD) 2 ), Ni(II)N,N′-di-isopropylamidinate(Ni(II)(iPr-AMD) 2 ), Ni(II)N,N′-di-ethylamidinate(Ni(II)(Et-AMD) 2 ), Ni(II)N,N′-di-methylamidinate(Ni(II)(Me-AMD) 2 ), Co(II)N,N′-di-tertiary-butylamidinate(Co(II)(tBu-AMD) 2 ), Co(II)N,N′-di-isopropylamidinate(Co(II)(iPr-AMD) 2 ), tetrakis(dimethylamido)hafnium (TDMAH), tert-butylimino-tris(diethylamino)tantalum (TBTDET), tert-butylimido-tris(methylethylamino)tantalum (TBTEMT), pentakis(dimethylamino)tantalum, bis(tert-butylimino)bis(dimethylamino)tungsten (BTBMW), bis(tert-butylimino)bis(diethylamino)tungsten, bis(tert-butylimino)bis(ethylmethylamino)tungsten, bis(2,2,6,6-tetramethyl-3,5-heptanedionato)strontium, and combinations thereof.

10. The system of claim 8 , wherein the chemical precursor is selected from the group consisting of tungsten pentachloride, dicobalt hexacarbonyl tert-butylacetylene (CCTBA), tantalum pentachloride, tungsten hexachloride, molybdenum pentachloride, pentakis(dimethylamino)tantalum, and combinations thereof.

11. The system of claim 8 , wherein the container has a shape selected from the group consisting of cylindrical, rectangular cuboid, right cuboid, rectangular box, rectangular hexahedron, right rectangular prism, rectangular parallelepiped, and combinations thereof; and the hollow flow distributor has a cross section shape selected from the group consisting of tubular, square, rectangular, and combinations thereof.

12. The system of claim 8 , wherein the hollow showerhead has a cross section shape selected from the group consisting of tubular, circular, square, rectangular, and combinations thereof.

13. The system of claim 8 , wherein
the hollow flow distributor has connected hollow bars and extended parallel to the lid, wherein the hollow bars have an inner equivalent diameter ranging from ⅛″ to 1″, and sealed on the sides;
each jet on the hollow bars has an equivalent diameter ranging from 0.01 inches (0.025 cm) to 0.05 inches (0.125 cm); and
the chemical precursor is selected from the group consisting of tungsten pentachloride, dicobalt hexacarbonyl tert-butylacetylene (CCTBA), tantalum pentachloride, tungsten hexachloride, molybdenum pentachloride, pentakis(dimethylamino)tantalum, and combinations thereof.

14. The system of claim 8 , wherein
the hollow showerhead having a height of ⅛″ to 1″ with a cross section shape selected from the group consisting of tubular, circular, square, rectangular, and combinations thereof;
the hollow showerhead has cross section area parallel to the lid ranging from 30% to 90% of cross section area of the container parallel to the lid, and
each jet on the hollow showerhead has an equivalent diameter ranging from 0.01 inches (0.025 cm) to 0.05 inches (0.125 cm), and
the chemical precursor is selected from the group consis

Assignees

• Versum Mat Us Llc

Inventors

• Birtcher Charles Michael
• Nehlsen James Patrick
• Ivanov Sergei Vladimirovich
• Steidl Thomas Andrew
• Kang Kai
• Bailey Iii Wade Hampton

Classifications

• C23C16/4481 Primary

  by evaporation using carrier gas in contact with the source material (C23C16/4486 takes precedence) · CPC title

• C23C16/45568

  Porous nozzles · CPC title

• B01B1/005

  Evaporation for physical or chemical purposes; Evaporation apparatus therefor, e.g. evaporation of liquids for gas phase reactions · CPC title

• C23C16/4482

  by bubbling of carrier gas through liquid source material · CPC title

• B01J4/002

  Nozzle-type elements (nozzle-type reactors B01J19/26) · CPC title