Method and apparatus for drying substrate
US-10197333-B2 · Feb 5, 2019 · US
US10477695B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10477695-B2 |
| Application number | US-201715785938-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 17, 2017 |
| Priority date | Oct 18, 2016 |
| Publication date | Nov 12, 2019 |
| Grant date | Nov 12, 2019 |
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A drying apparatus of the present invention includes a drying tank for performing drying processing of a workpiece, a fixture for the workpiece, heating means opposed to a front surface of the workpiece, and heating means opposed to a back surface of the workpiece, wherein each heating means is inclined from a horizontal line in its longitudinal direction.
Opening claim text (preview).
What is claimed is: 1. A drying apparatus comprising: a drying tank for performing drying processing of a workpiece; a fixture for holding the workpiece in a vertical posture; a heating means opposed to a front surface of the workpiece; and a heating means opposed to a back surface of the workpiece, wherein each heating means is inclined downwardly in a conveying direction of the workpiece. 2. The drying apparatus according to claim 1 , wherein said drying tank includes a gas injection means opposed to the front surface of the workpiece and a gas injection means opposed to the back surface of the workpiece, wherein a nozzle hole of each gas injection means is inclined obliquely downward. 3. The drying apparatus according to claim 1 , wherein said drying tank includes a conveying mechanism of the fixture. 4. The drying apparatus according to claim 2 , wherein said drying tank includes an exhaust port provided in a bottom surface thereof. 5. The drying apparatus according to claim 4 , wherein said drying tank includes a gas straightening plate that is provided above the exhaust port to allow gas injected through the nozzle hole to strike on the gas straightening plate. 6. The drying apparatus according to claim 5 , wherein a surface of said gas straightening plate which faces the workpiece has a curved shape being convex upward. 7. The drying apparatus according to claim 2 , wherein said gas injection means includes a lifting mechanism. 8. The drying apparatus according to claim 1 , wherein said drying apparatus further includes: a front tank provided on an inlet side of the drying tank; and a rear tank provided on an outlet side of the drying tank, wherein the front tank and the rear tank each have a first gas injection means opposed to the front surface of the workpiece and a second gas injection means opposed to the back surface of the workpiece. 9. The drying apparatus according to claim 8 , wherein said first and second gas injection means in the rear tank are provided at least at one of a position facing an upper portion of the workpiece and a position facing a lower portion thereof. 10. The drying apparatus according to claim 8 , wherein said drying apparatus further includes a reserve heating tank provided on an inlet side of the front tank, wherein the reserve heating tank has heated liquid injection means. 11. The drying apparatus according to claim 1 , wherein the heating means is a conductive member capable of heating by radiant heating. 12. The drying apparatus according to claim 11 , wherein the conductive member is an elongated rod-shape member. 13. The drying apparatus according to claim 1 , wherein said drying apparatus further includes: a front tank provided on an inlet side of the drying tank; and a rear tank provided on an outlet side of the drying tank, wherein the front tank has an elongated gas injector opposed to an upper portion of the front surface of the workpiece and an elongated gas injector opposed to an upper portion of the back surface of the workpiece, wherein the rear tank has elongated gas injectors opposed to an upper portion of the front surface of the workpiece and a lower portion of the front surface of the workpiece, respectively, and wherein the rear tank has elongated gas injectors opposed to an upper portion of the back surface of the workpiece and a lower portion of the back surface of the workpiece, respectively.
Vertically held PCB · CPC title
the objects or batches of materials being carried by trays or racks {or receptacles, which may be connected to endless chains or belts (trays, racks per se F26B25/18; with vertical movement F26B15/22)} · CPC title
from infrared-emitting elements {(by radiation emanating from passages containing heated fluids other than combustion gases F26B23/10)} · CPC title
Ducting arrangements from the source of air or other gases to the materials or objects being dried · CPC title
Heating or thermal processing not related to soldering, firing, curing or laminating, e.g. for shaping the substrate or during finish plating · CPC title
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