Wafer support column with interlocking features

Patent metadata

Field	Value
Publication number	US-10475682-B2
Application number	US-201615751122-A
Country	US
Kind code	B2
Filing date	Aug 24, 2016
Priority date	Aug 25, 2015
Publication date	Nov 12, 2019
Grant date	Nov 12, 2019

Abstract

A substrate support assembly for a substrate container. The assembly may include a pair of substrate support columns each including a stack of a plurality of shelf members and a plurality of support rods inserted through the stack for securing the stack together. Each shelf member may include a blade portion having first and second opposing surfaces and an inner and outer periphery. Each surface of the blade portion may include a rib structure and a plurality of bosses positioned towards the outer periphery and extending from a forward portion to a rearward portion of the blade portion. Interlocking features may be defined on the rib structures. The stack of the shelf members may include each shelf member stacked with one or more adjacent shelf members via the rib structures, thereby interlocking each shelf member with the one or more adjacent shelf members via the interlocking features.

First claim

What is claimed is:

1. A substrate support assembly comprising:
a pair of substrate support columns, each pair of substrate support columns including a stack of a plurality of shelf members and a plurality of support rods inserted through the stack for securing the stack together, each shelf member of the plurality of shelf members including a blade portion having a pair of first and second opposing surfaces and a pair of lengthwise edges extending from a forward portion to a rearward portion of the blade portion and defining an outer periphery and an inner periphery of the blade portion, the blade portion including;
a first rib structure extending from the first opposing surface and a second rib structure extending from the second opposing surface, the first and second rib structures positioned proximate the outer periphery of the blade portion and extending from the forward portion to the rearward portion of the blade portion;
a first plurality of bosses extending from the first opposing surface and a second plurality of bosses extending from the second opposing surface, the first and second plurality of bosses positioned proximate the outer periphery of the blade portion, each of the first and second plurality of bosses including a forward boss positioned at the forward portion of the blade portion and a rearward boss positioned at the rearward portion of the blade portion, each of the forward bosses and rearward bosses defining apertures through the shelf member; and
a first group of interlocking features defined on an edge of the first rib structure and a second group of interlocking features defined on an edge of the second rib structure, the first group of interlocking features including projections and the second group of interlocking features including corresponding recesses for complementary interlocking between adjacent shelf members of the plurality of shelf members;

wherein the stack of the plurality of shelf members includes each of the shelf members stacked with one or more adjacent shelf members via at least one of the first and second rib structures, thereby interlocking each shelf member with the one or more adjacent shelf members of the plurality of shelf members via at least one of the first and second groups of interlocking features, the apertures of the plurality of shelf members being aligned and defining a plurality of channels through the stack for insertion of the plurality of support rods.

2. The substrate support assembly of claim 1 , wherein:
the first rib structure extends between the forward boss and the rearward boss of the first plurality of bosses, and the second rib structure extends between the forward boss and the rearward boss of the second plurality of bosses.

3. The substrate support assembly of claim 1 , wherein:
the blade portion further includes a first alignment feature defined on the first opposing surface and a second alignment feature defined on the second opposing surface, the first and second alignment features positioned proximate the outer periphery of the blade portion and including a rib extending from the first and second opposing surfaces for engagement with a groove in a substrate container for alignment of the pair of substrate support columns.

4. The substrate support assembly of claim 1 , wherein:
the stack of a plurality of shelf members includes a topmost shelf member, the topmost shelf defining an uppermost surface of the stack of the plurality of shelf members; and
the stack of a plurality of shelf members includes an upper bracket connected to the forward boss of the uppermost surface, the upper bracket including a main body portion and an alignment feature extended upwardly from the main body portion, the alignment feature including a rib for engagement with a groove in a substrate container for alignment of the plurality of substrate support columns.

5. The substrate support assembly of claim 4 , wherein:
the topmost shelf member and the upper bracket are a unitary structure.

6. The substrate support assembly of claim 1 , wherein:
the stack of a plurality of shelf members includes a bottommost shelf member defining a downwardly facing surface; and
the stack of a plurality of shelf members includes a first lower bracket connected to the forward boss of the downwardly facing surface and a second lower bracket connected to the rearward boss of the downwardly facing surface, each of the first and second lower brackets including a support rod inlet connected to an end of one of the plurality of support rods, a mounting portion for connection to a bottom plate of a substrate container, and an offset portion offsetting the mounting portion from the support rod inlet.

7. The substrate support assembly of claim 6 , wherein:
the bottommost shelf member and the first and second lower brackets are a unitary structure.

8. The substrate support assembly of claim 1 , wherein:
the first and second pluralities of bosses each include an intermediate boss positioned between the forward boss and the rearward boss, the intermediate boss defining an aperture through the shelf member.

9. The substrate support assembly of claim 1 , wherein:
each of the first and second opposing surfaces of the plurality of shelf members is a mirror image of one another.

10. The substrate support assembly of claim 1 , wherein:
each of the plurality of shelf members is an individually molded piece.

11. A substrate container comprising:
a container portion including two opposing sidewalls, a back sidewall, a top sidewall, and a bottom plate, the container portion defining an opening in a front portion of the substrate container to an interior for containing substrates, the container portion mounted on a conveyor plate;
a door configured for covering and sealing the opening defined by the container portion; and
a pair of substrate support columns mounted the interior for supporting substrates, each of the pair of substrate support columns including a stack of a plurality of shelf members and a plurality of support rods inserted through the stack of the plurality of shelf members for securing the stack of the plurality of shelf members together, each shelf member of the plurality of shelf members including a blade portion having a pair of first and second opposing surfaces and a pair of lengthwise edges extending from a forward portion to a rearward portion of the blade portion and defining an outer periphery and an inner periphery, the blade portion including:
a first rib structure extending from the first opposing surface and a second rib structure extending from the second opposing surface, the first and second rib structures positioned proximate the outer periphery of the blade portion and extending from the forward portion to the rearward portion of the blade portion;
a first plurality of bosses extending from the first opposing surface and a second plurality of bosses extending from the second opposing surface, the first and second plurality of bosses positioned proximate the outer periphery of the blade portion and each including a forward boss positioned at the forward portion of the blade portion and a rearward boss positioned at the rearward portion of the blade portion, the forward bosses and rearward bosses defining apertures through the shelf member; and
a first group of interlocking features defined on an edge of the first rib structure and a second group of interlocking features defined on an edge of the second rib structure, the first group of interlocking features including projections and the second group of interlocking features including corresponding recesses for complementary interlocking between the two;

wherein the stack of the pl

Assignees

• Entegris Inc

Inventors

• Fuller Matthew
• Harr Colton

Classifications

• H10P72/1921 Primary

  characterised by substrate supports · CPC title

• H01L21/67383 Primary

  Electricity · mapped topic

• H10P72/18

  characterised by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports · CPC title

• H10P72/14

  Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls · CPC title

• H10P72/1918 Primary

  characterised by coupling elements, kinematic members, handles or elements to be externally gripped · CPC title