Light irradiation type heat treatment apparatus and method for manufacturing heat treatment apparatus
US-2016284573-A1 · Sep 29, 2016 · US
Light irradiation type heat treatment apparatus and method for manufacturing heat treatment apparatus
US10475674B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10475674-B2 |
| Application number | US-201615070147-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 15, 2016 |
| Priority date | Mar 25, 2015 |
| Publication date | Nov 12, 2019 |
| Grant date | Nov 12, 2019 |
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- Title
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Abstract
Official abstract text for this publication.
A sealing structure is achieved by sandwiching an O ring between an upper chamber window and a chamber side portion and pressing a clamping ring against a top of a peripheral portion of the upper chamber window. Grooving is performed on a lower surface and an upper surface of the peripheral portion of the upper chamber window, to thereby form a plurality of grooves thereon. Flash light traveling into the peripheral portion of the upper chamber window during irradiation with flash light is reflected by the plurality of grooves and is prevented from traveling toward the O ring. This significantly reduces an amount of flash light reaching the O ring, and thus degradation of the O ring due to the irradiation with the flash light can be prevented.
First claim
Opening claim text (preview).
What is claimed is: 1. A heat treatment apparatus that irradiates a substrate with flash light to heat the substrate, comprising: a chamber housing the substrate; a retainer configured to retain the substrate in the chamber; an exhaust configured to exhaust the chamber and to reduce an inside pressure in the chamber to less than atmospheric pressure; a flash lamp provided outside the chamber and on one side of the chamber; a quartz window covering an opening of the one side of the chamber; an O ring sandwiched between a side wall of the chamber and a contact surface of a peripheral portion of the quartz window; and a window retainer configured to press a counter surface opposed to the contact surface of the peripheral portion of the quartz window against the side wall of the chamber, wherein a step is provided in the contact surface of the quartz window, and an opaque quartz that contacts the O ring is provided in the step.
Assignees
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Classifications
- H10P72/0436Primary
mainly by radiation · CPC title
for semiconductors manufacturing · CPC title
- H01L21/67115Primary
Electricity · mapped topic
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- What does patent US10475674B2 cover?
- A sealing structure is achieved by sandwiching an O ring between an upper chamber window and a chamber side portion and pressing a clamping ring against a top of a peripheral portion of the upper chamber window. Grooving is performed on a lower surface and an upper surface of the peripheral portion of the upper chamber window, to thereby form a plurality of grooves thereon. Flash light travelin…
- Who is the assignee on this patent?
- Screen Holdings Co Ltd
- What technology area does this patent fall under?
- Primary CPC classification H10P72/0436. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Nov 12 2019 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 7 related publications on this page (citations in our corpus or others sharing the same primary CPC).