Methods and apparatus for co-sputtering multiple targets

Patent metadata

Field	Value
Publication number	US-10468238-B2
Application number	US-201615240927-A
Country	US
Kind code	B2
Filing date	Aug 18, 2016
Priority date	Aug 21, 2015
Publication date	Nov 5, 2019
Grant date	Nov 5, 2019

Abstract

Embodiments of a method and apparatus for co-sputtering multiple target materials are provided herein. In some embodiments, a process chamber including a substrate support to support a substrate; a plurality of cathodes coupled to a carrier and having a corresponding plurality of targets to be sputtered onto the substrate; and a process shield coupled to the carrier and extending between adjacent pairs of the plurality of targets.

First claim

The invention claimed is:

1. A process chamber, comprising:
a substrate support to support a substrate;
a plurality of cathodes coupled to a carrier and having a corresponding plurality of targets to be sputtered onto the substrate; and
a process shield coupled to the carrier and extending between adjacent pairs of the plurality of targets, wherein the process shield is configured to move vertically and rotate with respect to the plurality of cathodes.

2. The process chamber of claim 1 , wherein the process shield is star-shaped.

3. The process chamber of claim 1 , wherein the plurality of cathodes includes five cathodes.

4. The process chamber of claim 1 , wherein all of the plurality of targets are exposed.

5. The process chamber of claim 4 , wherein a height of the process shield is proportional to a diameter of each of the plurality of targets.

6. The process chamber of claim 5 , wherein each of the plurality of targets have a diameter of approximately 6 inches, and wherein the process shield has a height of less than approximately 15 inches.

7. The process chamber of claim 1 , further comprising:
a plurality of shrouds each surrounding a corresponding one of the plurality of targets.

8. The process chamber of claim 7 , wherein each of the plurality of shrouds has a height of approximately 1 inch.

9. The process chamber of claim 7 , wherein the plurality of shrouds are formed of aluminum.

10. The process chamber of claim 9 , wherein the plurality of shrouds are texturized to improve particle adhesion of the plurality of shrouds.

11. A physical vapor deposition (PVD) chamber, comprising:
a substrate support to support a substrate;
a plurality of cathodes coupled to a carrier and having a corresponding plurality of targets to be sputtered onto the substrate;
a shield coupled to the carrier and extending between adjacent pairs of the plurality of targets, wherein the shield is configured to move vertically and rotate with respect to the plurality of cathodes and wherein the plurality of targets are exposed through the shield; and
a plurality of shrouds each surrounding a corresponding one of the plurality of targets.

12. The PVD chamber of claim 11 , wherein the plurality of targets includes five targets.

13. The PVD chamber of claim 11 ,
wherein the plurality of shrouds have an angle relative to a top surface of the substrate support that conforms to a shape of the shield.

14. The PVD chamber of claim 13 , wherein the plurality of shrouds are formed of aluminum.

15. The PVD chamber of claim 14 , wherein the plurality of shrouds are texturized to improve particle adhesion of the plurality of shrouds.

16. The PVD chamber of claim 15 , wherein the plurality of shrouds include one of an aluminum, a tantalum, or a molybdenum coating.

17. The PVD chamber of claim 11 , wherein each of the plurality of shrouds has a height of approximately 5 inches to approximately 6 inches.

18. The PVD chamber of claim 11 , wherein the shield moves vertically with respect to the plurality of targets before rotating.

19. A method for processing a substrate, comprising:
exposing a plurality of targets through holes of a shield, wherein the shield is coupled to a carrier disposed above a substrate support supporting the substrate and wherein the shield extends between adjacent pairs of the plurality of targets and is configured to move vertically and rotate with respect to the plurality of targets; and
co-sputtering a first set of the plurality of targets.

20. The method of claim 19 , further comprising:
rotating the shield to expose at least one section of the shield previously exposed to at least one target of the first set of the plurality of targets to at least one target of a second set of the plurality of targets, wherein the second set is different than the first set; and
co-sputtering the second set of the plurality of targets.

Assignees

• Applied Materials Inc

Inventors

• Subramani Anantha K
• Wu Hanbing
• Wang Wei W
• Goel Ashish
• Guggilla Srinivas
• Nistor Lavinia

Classifications

• H01J37/3447

  Collimators, shutters, apertures · CPC title

• H01J37/3441

  Dark space shields · CPC title

• H01J37/3429

  Plural materials · CPC title

• H01J37/32871

  Means for trapping or directing unwanted particles · CPC title

• C23C14/564

  Means for minimising impurities in the coating chamber such as dust, moisture, residual gases · CPC title