Aliphatic UV cured polyurethane optical endpoint detection windows with high UV transparency for CMP polishing pads

Patent metadata

Field	Value
Publication number	US-10465097-B2
Application number	US-201715815121-A
Country	US
Kind code	B2
Filing date	Nov 16, 2017
Priority date	Nov 16, 2017
Publication date	Nov 5, 2019
Grant date	Nov 5, 2019

Abstract

The present invention provides chemical mechanical (CMP) polishing pads for polishing a substrate chosen from a semiconductor substrate comprising the CMP polishing pad and having one or more endpoint detection windows which is the cured product of a reaction mixture of a linear cycloaliphatic urethane macromonomer having two (meth)acrylate endgroups bound via cycloaliphatic dicarbamate esters to a polyether, polycarbonate or polyester chain having an average molecular weight of from 450 to 2,000, or an cycloaliphatic urethane oligomer thereof, and an aliphatic initiator, wherein the total isocyanate content in the urethane macromonomer ranges from 3.3 to 10 wt. %, and, further wherein, the composition comprises less than 5 wt. % of unreacted (meth)acrylate monomer and is substantially free of unreacted isocyanate. Regardless of their hardness or lack thereof, the endpoint detection windows provide excellent durability when wet.

First claim

I claim:

1. A chemical mechanical (CMP) polishing pad for polishing a substrate chosen from at least one of a magnetic substrate, an optical substrate and a semiconductor substrate comprising a CMP polishing pad, the CMP polishing pad having one or more endpoint detection windows which is the cured product of a reaction mixture of a linear cycloaliphatic urethane macromonomer having two (meth)acrylate endgroups bound via cycloaliphatic dicarbamate esters to a polyether, polycarbonate or polyester chain, or an cycloaliphatic urethane oligomer thereof, and an aliphatic initiator, wherein the total isocyanate content in the urethane macromonomer ranges from 3.3 to 10 wt. %, and, further wherein, the composition comprises less than 5 wt. % of unreacted (meth)acrylate monomer and is substantially free of unreacted isocyanate.

2. The chemical mechanical (CMP) polishing pad as claimed in claim 1 , wherein the cycloaliphatic dicarbamate of the linear cycloaliphatic urethane macromonomer contains a C 6 to C 18 cycloaliphatic group.

3. The chemical mechanical (CMP) polishing pad as claimed in claim 1 , wherein the cycloaliphatic dicarbamate of the linear cycloaliphatic urethane macromonomer contains a C 10 to C 16 cycloaliphatic group.

4. The chemical mechanical (CMP) polishing pad as claimed in claim 1 , wherein the cycloaliphatic dicarbamate of the linear cycloaliphatic urethane macromonomer is the reaction product of an active hydrogen of a polymeric diol and a cycloaliphatic diisocyanate chosen from 1,4-cyclohexane diisocyanate, 4,4′-dicyclohexylmethane diisocyanate, or isophorone diisocyanate.

5. The chemical mechanical (CMP) polishing pad as claimed in claim 1 , wherein the linear cycloaliphatic urethane macromonomer comprises the carbamate of a polymeric diol having a polyether, polycarbonate or polyester chain having an average molecular weight of from 450 to 2,000.

6. The chemical mechanical (CMP) polishing pad as claimed in claim 5 , wherein the linear cycloaliphatic urethane macromonomer comprises the carbamate of a polymeric diol having a polyether, polycarbonate or polyester chain having an average molecular weight of from 600 to 1,500.

7. The chemical mechanical (CMP) polishing pad as claimed in claim 5 , wherein the polymeric diol comprises a polypropylene glycol; a polyethylene glycol; a polytetramethylene glycol; polycarbonate-group containing diol; or their block copolymers or mixtures.

8. The chemical mechanical (CMP) polishing pad as claimed in claim 1 , wherein the linear cycloaliphatic urethane macromonomer having two (meth)acrylate endgroups comprises from two to ten cycloaliphatic dicarbamate groups and has a weight average molecular weight of from 1,000 to 10,000.

9. The chemical mechanical (CMP) polishing pad as claimed in claim 1 , wherein the linear cycloaliphatic urethane macromonomer having two (meth)acrylate endgroups contains, in esterified form, a hydroxyl functional alkyl (meth)acrylate.

10. The chemical mechanical (CMP) polishing pad as claimed in claim 1 , wherein the aliphatic initiator is a photoinitiator and the amount of the photoinitiator ranges from 0.05 to 0.5 wt. % or, preferably, from 0.08 to 0.15 wt. %, based on the total solids weight of the reaction mixture.

Assignees

• Rohm & Haas Elect Materials Cmp Holdings Inc

Inventors

• Gadinski Matthew R

Classifications

• H10P52/403

  of conductive or resistive materials · CPC title

• C09G1/06

  Other polishing compositions · CPC title

• C08G18/4854

  Polyethers containing oxyalkylene groups having four carbon atoms in the alkylene group · CPC title

• C08F290/067

  Polyurethanes; Polyureas · CPC title

• C08G18/758

  containing two or more cycloaliphatic rings · CPC title