High removal rate chemical mechanical polishing pads from amine initiated polyol containing curatives

Patent metadata

Field	Value
Publication number	US-10464187-B2
Application number	US-201715828601-A
Country	US
Kind code	B2
Filing date	Dec 1, 2017
Priority date	Dec 1, 2017
Publication date	Nov 5, 2019
Grant date	Nov 5, 2019

Abstract

A CMP polishing pad for polishing a semiconductor substrate is provided containing a polishing layer that comprises a polyurethane reaction product of a reaction mixture comprising a (i) curative of from 15 to 30 wt. % of an amine initiated polyol having an average of from 3 to less than 5 hydroxyl groups and a number average molecular weight of 150 to 400, and from 70 to 85 wt. % of an aromatic diamine and a (ii) polyisocyanate prepolymer having a number average molecular weight of from 600 to 5,000 and having an unreacted isocyanate content ranging from 6.5 to 11%. The CMP polishing pad has a tunable tan-delta peak temperature at from 50 to 80° C. which has a value of from 0.2 to 0.8 at the tan-delta peak temperature and is useful for polishing a variety of substrates.

First claim

We claim:

1. A chemical mechanical (CMP) polishing pad for polishing a substrate chosen from at least one of a magnetic substrate, an optical substrate and a semiconductor substrate comprises a polishing layer adapted for polishing the substrate which is a polyurethane reaction product of a reaction mixture comprising (i) a curative of from 15 to 30 wt. % of an amine initiated polyol having an average of from 3 to less than 5 hydroxyl groups and a number average molecular weight of 150 to 400, and from 70 to 85 wt. % of an aromatic diamine and (ii) a polyisocyanate prepolymer having a number average molecular weight of from 600 to 5,000 and having an unreacted isocyanate content ranging from 6.5 to 11%.

2. The CMP polishing pad as claimed in claim 1 , comprising as the (i) curative in the reaction mixture from 15 to less than 20 wt. % of an amine initiated polyol having an average of from 3 to less than 5 hydroxyl groups and a number average molecular weight of 150 to 400 and from more than 80 to 85 wt. % of an aromatic diamine.

3. The CMP polishing pad as claimed in claim 1 , comprising in the reaction mixture as the (i) curative from 15 to 30 wt. % of an amine initiated polyol having an average of 4 hydroxyl groups.

4. The CMP polishing pad as claimed in claim 1 , wherein in the (i) curative of the reaction mixture, the amine initiated polyol is an ethylene diamine or aminoethylethanolamine (AEEA) initiated polyol.

5. The CMP polishing pad as claimed in claim 1 , wherein the gel time of the reaction mixture ranges from 2 to 15 minutes and in the (i) curative, the aromatic diamine is chosen from 4,4′-methylenebis(3-chloro-2,6-diethylaniline) (MCDEA); 4,4′-methylene-bis-o-chloroaniline (MbOCA); diethyl toluene diamines; tert-butyl toluene diamines; chlorotoluenediamines; dimethylthio-toluene diamines (DMTDA); 1,2-bis(2-aminophenylthio)ethane; trimethylene glycol di-p-amino-benzoate; tert-amyl toluenediamines; tetramethyleneoxide di-p-aminobenzoate; (poly)propyleneoxide di-p-aminobenzoates; chloro diaminobenzoates; methylene dianilines; isophorone diamine; 1,2-diaminocyclohexane; bis(4-aminocyclohexyl)methane; 4,4′-diaminodiphenyl sulfone; m-phenylenediamine; xylene diamines; 1,3-bis(aminomethyl cyclohexane); and mixtures thereof.

6. The CMP polishing pad as claimed in claim 1 , comprising in the reaction mixture (ii) a polyisocyanate prepolymer having a number average molecular weight of from 600 to 5,000 and having an unreacted isocyanate content ranging from 8 to 9.5 wt. %.

7. The CMP polishing pad as claimed in claim 1 , wherein in the reaction mixture the (ii) polyisocyanate prepolymer is formed from an aromatic diisocyanate; an aromatic isocyanurate from a diisocyanate; aromatic diisocyanates mixed with up to 50 wt. % of an alicyclic diisocyanate, based on the total weight of the aromatic and any alicyclic diisocyanates; or a mixture of aromatic diisocyanates; and from a polyol chosen from polypropylene glycol (PPG), polytetramethylene ether glycol (PTMEG), polyethylene glycol, or a mixture thereof.

8. The CMP polishing pad as claimed in claim 1 , wherein the reaction mixture is “substantially water free”, based on the total weight of the reaction mixture.

9. The CMP polishing pad as claimed in claim 1 , wherein the polishing pad or polishing layer contains no microelements and the reaction mixture further comprises a surfactant.

10. The CMP polishing pad as claimed in claim 1 , wherein the polishing layer has a tan-delta peak temperature at from 50 to 80° C. which has a value of from 0.2 to 0.8 at the tan-delta peak temperature, and which has a ratio of torsional storage modulus (G′) measured at 30° C. to torsional storage modulus (G′) measured at 90° C. of from 5 to 45.

Assignees

• Rohm & Haas Elect Materials Cmp Holdings Inc

Inventors

• Qian Bainian
• Reddy Kancharla-Arun K
• Jacob George C
• Degroot Marty W

Classifications

• B24B37/22

  characterised by a multi-layered structure · CPC title

• B24B37/24 Primary

  characterised by the composition or properties of the pad materials · CPC title

• B24B37/044

  characterised by the composition of the lapping agent · CPC title

• C08G18/3825

  containing amide groups (C08G18/3821 takes precedence) · CPC title

• C08G18/3814

  Polyamines · CPC title