Substrate polishing method, top ring, and substrate polishing apparatus

Patent metadata

Field	Value
Publication number	US-10464185-B2
Application number	US-201715458513-A
Country	US
Kind code	B2
Filing date	Mar 14, 2017
Priority date	Mar 15, 2016
Publication date	Nov 5, 2019
Grant date	Nov 5, 2019

Abstract

According to one embodiment, a substrate polishing method includes: conveying a substrate to a position above a polishing pad by sucking the substrate by a first region of an elastic film; polishing the substrate while bringing the substrate into contact with the polishing pad; and lifting off the substrate by sucking the substrate by a second region of the elastic film, the second region being larger than the first region.

First claim

What is claimed is:

1. A substrate polishing method comprising:
conveying a substrate to a position above a polishing pad by suctioning the substrate by a first region of an elastic film, wherein regions other than the first region are not suctioned;
polishing the substrate while bringing the substrate into contact with the polishing pad; and
lifting off the substrate by suctioning the substrate by a second region of the elastic film, the second region being larger than the first region.

2. A substrate polishing method comprising:
conveying a substrate to a position above a polishing pad by depressurizing a first area among pressure adjustable areas between a top-ring main body and an elastic film to suction the substrate by a lower surface of the elastic film, wherein no suction is applied to areas other than the first area;
polishing the substrate while bringing the substrate into contact with the polishing pad; and
lifting off the substrate by depressurizing a second area among the pressure adjustable areas to suction the substrate by the lower surface of the elastic film, the second area being larger than the first area.

3. The substrate polishing method according to claim 2 , wherein
the plurality of pressure adjustable areas are formed between the top-ring main body and the elastic film,
the first area comprises a first number of areas among the plurality of areas, and
the second area comprises a second number of areas among the plurality of areas, the second number being larger than the first number.

4. The substrate polishing method according to claim 3 , wherein the second area is concentrically larger than the first area.

5. The substrate polishing method according to claim 3 , wherein the first area is a circular or annular area.

6. The substrate polishing method according to claim 2 , wherein upon polishing the substrate, at least part of the pressure adjustable areas is pressurized.

7. The substrate polishing method according to claim 2 , wherein a supporter extending toward the elastic film is provided in the pressure adjustable area.

8. A substrate polishing apparatus comprising:
a top ring;
a polishing table having a polishing pad configured to contact the substrate retained by the top ring to polish the substrate; and
a pressure controller configured to control a pressure of the pressure adjustable areas,
wherein the top ring comprises:
the top-ring main body;
an elastic film below the top-ring main body and configured to form one or a plurality of pressure adjustable areas between the top-ring main body and the elastic film; and
a supporter in the area extending toward the elastic film, and
wherein the pressure controller is configured to
depressurize a first area among the pressure adjustable areas when the substrate is conveyed before the substrate is polished, wherein areas other than the first area are not depressurized, and
depressurize a second area among the pressure adjustable areas when the substrate is lifted off from the polishing pad after the substrate is polished, second area being larger than the first area.

Assignees

• Ebara Corp

Inventors

• Isono Shintaro
• Yasuda Hozumi
• Namiki Keisuke
• Nabeya Osamu
• Fukushima Makoto
• Togashi Shingo
• Yamaki Satoru

Classifications

• B24B37/32

  Retaining rings · CPC title

• B24B37/20

  Lapping pads for working plane surfaces · CPC title

• B24B37/042 Primary

  operating processes therefor · CPC title