Dust collection apparatus and dust collection system

Patent metadata

Field	Value
Publication number	US-10464110-B2
Application number	US-201615069360-A
Country	US
Kind code	B2
Filing date	Mar 14, 2016
Priority date	Sep 14, 2015
Publication date	Nov 5, 2019
Grant date	Nov 5, 2019

Abstract

According to one embodiment, a dust collection apparatus includes a liquid supplier, a first member, and a liquid recoverer. One end of the first member is connected to the liquid supplier, one other end of the first member is connected to the liquid recoverer. The first member is conductive. The first member has a first surface including a plurality of trenches.

First claim

What is claimed is:

1. A dust collection system, comprising:
a dust collection apparatus including
a liquid supplier,
a liquid recoverer, and
a first member provided between the liquid supplier and the liquid recoverer, the first member having a first surface and a plurality of trenches provided in the first surface, the plurality of trenches extending in a direction toward the liquid recoverer from the liquid supplier; and

a processing chamber containing the dust collection apparatus, wherein
the first surface of the first member is exposed to ambient air in the processing chamber, and
the liquid supplier provides liquid flowing over the first surface along the plurality of trenches to the liquid recoverer, the liquid collecting dust particles in the ambient air while flowing over the first surface.

2. The system according to claim 1 , wherein
the processing chamber includes:
a support platform supporting a processing object;
a mounting surface where the support platform is mounted;
a bottom surface provided on a lower side of the mounting surface; and
a side surface provided around the support platform with a direction from the bottom surface toward the support platform as an axis, and

the dust collection apparatus is provided attachably and removably on at least one surface of the bottom surface, the mounting surface, or the side surface.

3. The system according to claim 2 , wherein
the first surface is disposed along the side surface, and
the liquid supplier is positioned above the liquid recoverer.

4. The system according to claim 2 , wherein
the first surface is disposed along the mounting surface or the bottom surface,
the liquid supplier is disposed at a position higher than the liquid recoverer, and
the first surface is tilted with respect to a direction of gravity.

5. The system according to claim 1 , wherein the processing chamber further includes a gas supplier blowing a gas toward the first surface.

Assignees

• Toshiba Memory Corp

Inventors

• Sakurai Hideaki

Classifications

• B01D2247/04

  Regenerating the washing fluid · CPC title

• B08B3/04

  Cleaning involving contact with liquid · CPC title

• B08B17/00 Primary

  Methods preventing fouling {(preventing accumulation of deposits in pneumatic conveyors B65G53/521)} · CPC title

• B01D47/024

  by impinging the gas to be cleaned essentially in a perpendicular direction onto the liquid surface · CPC title

• B01D47/027

  by directing the gas to be cleaned essentially tangential to the liquid surface · CPC title