Method of manufacturing ceramic sintered body, ceramic sintered body, and ceramic heater

Patent metadata

Field	Value
Publication number	US-10462850-B2
Application number	US-201113879882-A
Country	US
Kind code	B2
Filing date	Oct 24, 2011
Priority date	Oct 29, 2010
Publication date	Oct 29, 2019
Grant date	Oct 29, 2019

Abstract

A method of manufacturing a ceramic sintered body, includes: a film forming step of forming, on a surface of a heat-resistant metal material, a metal coating film made of a metal material having a standard free energy of formation of metal carbides lower than that of the heat-resistant metal material; a molding step of disposing the heat-resistant metal material provided with the coating film in the film forming step at a predetermined position in powder that serves as a starting material of a ceramic base, and molding a ceramic green body by press-molding the powder; and a sintering step of generating a ceramic sintered body by sintering the ceramic green body molded in the molding step.

First claim

The invention claimed is:

1. A method of manufacturing a ceramic sintered body, comprising:
a film forming step of forming, on a surface of a heat-resistant metal material which is molybdenum or a molybdenum alloy, a metal coating film made of titanium, tantalum, or zirconium which is a metal material having a standard free energy of formation of metal carbides lower than that of the heat-resistant metal material;
a molding step of disposing the heat-resistant metal material provided with the coating film in the film forming step at a predetermined position in powder that serves as a starting material of a ceramic base, and molding a ceramic green body by press-molding the powder; and
a sintering step of generating a ceramic sintered body by sintering the ceramic green body molded in the molding step;
wherein the metal coating film suppresses a carbonization reaction of the heat-resistant metal material during the sintering.

2. The method of manufacturing a ceramic sintered body according to claim 1 ,
wherein the ceramic base is aluminum nitride, silicon nitride, or aluminum oxide.

3. The method of manufacturing a ceramic sintered body according to claim 1 ,
wherein a sintering temperature of the ceramic sintered body is 1,300 to 2,000° C.

4. The method of manufacturing a ceramic sintered body according to claim 1 ,
wherein a thickness of the metal coating film is 0.10 to 10.0 μm.

5. A ceramic sintered body formed by sintering a precursor ceramic, the precursor ceramic comprising:
a heat-resistant metal material which is molybdenum or a molybdenum alloy;
a metal coating film which is formed on a surface of the heat-resistant metal material, and is formed of titanium, tantalum, or zirconium which is a metal material having a standard free energy of formation of metal carbides lower than that of the heat-resistant metal material; and
a ceramic green body obtained by disposing the heat-resistant metal material provided with the metal coating film at a predetermined position in powder that serves as a starting material of a ceramic base, and press-molding the powder,
wherein a metal carbide coating film is formed when the metal coating film is carbonized during the sintering.

6. The ceramic sintered body according to claim 5 ,
wherein the ceramic base is aluminum nitride, silicon nitride, or aluminum oxide.

7. The ceramic sintered body according to claim 5 ,
wherein a sintering temperature of the ceramic sintered body is 1,300 to 2,000° C.

8. The ceramic sintered body according to claim 5 ,
wherein a thickness of the metal coating film is 0.10 to 10.0 μm.

9. A ceramic heater comprising a ceramic sintered body formed by sintering a precursor ceramic, the precursor ceramic comprising:
a heat-resistant metal material which is molybdenum or a molybdenum alloy;
a metal coating film which is formed on a surface of the heat-resistant metal material, and is formed of titanium, tantalum, or zirconium which is a metal material having a standard free energy of formation of metal carbides lower than that of the heat-resistant metal material; and
a ceramic green body obtained by disposing the heat-resistant metal material provided with the metal coating film at a predetermined position in powder that serves as a starting material of a ceramic base, and press-molding the powder,
wherein a metal carbide coating film is formed when the metal coating film is carbonized during the sintering.

Assignees

• Hirano Satoshi
• Tachikawa Toshihiro
• Miyahara Junichi
• Hanamachi Toshihiko
• Nhk Spring Co Ltd

Inventors

• Hirano Satoshi
• Tachikawa Toshihiro
• Miyahara Junichi
• Hanamachi Toshihiko

Classifications

• C04B2237/72

  Forming laminates or joined articles comprising at least two interlayers directly next to each other · CPC title

• C04B2237/40

  Metallic · CPC title

• C04B2237/60

  Forming at the joining interface or in the joining layer specific reaction phases or zones, e.g. diffusion of reactive species from the interlayer to the substrate or from a substrate to the joining interface, carbide forming at the joining interface · CPC title

• C04B2237/366

  Aluminium nitride · CPC title

• C04B2237/083

  Carbide interlayers, e.g. silicon carbide interlayers · CPC title