Fluidic device including BAW resonators along opposing channel surfaces

Patent metadata

Field	Value
Publication number	US-10458982-B2
Application number	US-201615337429-A
Country	US
Kind code	B2
Filing date	Oct 28, 2016
Priority date	Oct 30, 2015
Publication date	Oct 29, 2019
Grant date	Oct 29, 2019

Abstract

Multiple bulk acoustic wave (BAW) resonator structures are arranged along opposing surfaces of a fluidic passage arranged to receive a fluid. At least one resonator structure may be overlaid with functionalization (e.g., specific binding or non-specific binding) material to bind one or more analytes contained in the fluid. Combinations of BAW resonators providing dominant shear response for detection, and providing dominant longitudinal response for mixing or analyte movement, may be provided on one or more surfaces bounding a fluidic passage. Embodiments may reduce the footprint of multi-resonator fluidic device, enhance analyte binding rate, and/or enhance mixing of sample constituents.

First claim

What is claimed is:

1. A fluidic device comprising:
a channel arranged to receive a fluid;
a first bulk acoustic wave resonator structure arranged between a first substrate and a first surface bounding the channel, wherein the first bulk acoustic wave resonator structure includes a first piezoelectric material, a first distal electrode arranged between the first piezoelectric material and the first substrate, and a first proximal electrode arranged between the first piezoelectric material and the channel, wherein at least a portion of the first piezoelectric material is arranged between the first distal electrode and the first proximal electrode to form a first active region; and
a second bulk acoustic wave resonator structure arranged between a second substrate and a second surface bounding the channel, wherein the second surface opposes the first surface, and wherein the second bulk acoustic wave resonator structure includes a second piezoelectric material, a second distal electrode arranged between the second piezoelectric material and the second substrate, and a second proximal electrode arranged between the second piezoelectric material and the channel, wherein at least a portion of the second piezoelectric material is arranged between the second distal electrode and the second proximal electrode to form a second active region.

2. The fluidic device of claim 1 , further comprising at least one intermediate layer defining at least a portion of the channel, wherein the at least one intermediate layer is arranged between the first bulk acoustic wave resonator structure and the second bulk acoustic wave resonator structure.

3. The fluidic device of claim 1 , comprising at least one of the following features: the first piezoelectric material comprises a c-axis having an orientation distribution that is predominantly non-parallel to normal of a face of the first substrate; or the second piezoelectric material comprises a c-axis having an orientation distribution that is predominantly non-parallel to normal of a face of the second substrate.

4. The fluidic device of claim 1 , wherein:
the first piezoelectric material comprises a c-axis having an orientation distribution that is predominantly non-parallel to normal of a face of the first substrate, and the first bulk acoustic wave resonator structure is configured to exhibit a dominant shear response upon application of an alternating current signal across the first distal electrode and the first proximal electrode; and
the second piezoelectric material comprises a c-axis having an orientation distribution that is predominantly non-parallel to normal of a face of the second substrate, and the second bulk acoustic wave resonator structure is configured to exhibit a dominant shear response upon application of an alternating current signal across the second distal electrode and the second proximal electrode.

5. A method for biological or chemical sensing, the method comprising:
supplying a fluid containing a target species into the channel of the fluidic device of claim 4 , wherein said supplying is configured to cause at least some of the target species to bind to at least one first functionalization material arranged over the first active region, and to cause at least some of the target species to bind to at least one second functionalization material arranged over the second active region;
inducing a first bulk acoustic wave in the first active region, and sensing a change in at least one of a frequency, an amplitude, or a phase via the first bulk acoustic wave resonator structure to indicate at least one of presence or quantity of target species bound to the at least one first functionalization material; and
inducing a second bulk acoustic wave in the second active region, and sensing a change in at least one of a frequency, an amplitude, or a phase via the second bulk acoustic wave resonator structure to indicate at least one of presence or quantity of target species bound to the at least one second functionalization material.

6. The fluidic device of claim 1 , wherein:
the first bulk acoustic wave resonator structure is configured to exhibit a dominant longitudinal response upon application of an alternating current signal across the first distal electrode and the first proximal electrode; and
the second piezoelectric material comprises a c-axis having an orientation distribution that is predominantly non-parallel to normal of a face of the second substrate, and the second bulk acoustic wave resonator structure is configured to exhibit a dominant shear response upon application of an alternating current signal across the second distal electrode and the second proximal electrode.

7. A method for biological or chemical sensing, the method comprising:
supplying a fluid containing a target species into the channel of the fluidic device of claim 6 , wherein said supplying is configured to cause at least some of the target species to bind to at least one functionalization material arranged over the second active region;
inducing a first bulk acoustic wave in the first active region to promote at least one of mixing of the fluid or movement of the target species; and
inducing a second bulk acoustic wave in the second active region, and sensing a change in at least one of a frequency, an amplitude, or a phase via the second bulk acoustic wave resonator structure to indicate at least one of presence or quantity of target species bound to the at least one functionalization material.

8. The fluidic device of claim 1 , wherein the first bulk acoustic wave resonator structure comprises a first acoustic reflector structure arranged between the first substrate and the first distal electrode, and the second bulk acoustic wave resonator structure comprises a second acoustic reflector structure arranged between the second substrate and the second distal electrode.

9. The fluidic device of claim 1 , wherein:
the first substrate defines a first cavity registered with an active region of the first bulk acoustic wave resonator structure, and the second substrate defines a second cavity registered with an active region of the second bulk acoustic wave resonator structure.

10. The fluidic device of claim 1 , wherein the first active region is arranged at a first location along the first surface disposed a first distance from an upstream end of the channel, and the second active region is arranged at a second location along the second surface disposed the first distance from the upstream end of the channel.

11. The fluidic device of claim 1 , wherein the first active region is arranged at a first location along the first surface disposed a first distance from an upstream end of the channel, and the second active region is arranged at a second location along the second surface disposed a second distance from the upstream end of the channel, wherein the second distance is greater than the first distance.

12. The fluidic device of claim 1 , further comprising at least one first functionalization material arranged over at least a portion of at least one of the first active region or the second active region, wherein the at least one first functionalization material is in fluid communication with the channel.

13. The fluidic device of claim 12 , wherein the at least one functionalization material comprises at least one of a specific binding material or a non-specific binding material.

14. The fluidic device of claim 1 , further comprising at least one of the following features (i) or (ii):
at least one first functionalization material is arranged over at least a portion of the first active region, wherein the at

Assignees

• Qorvo Us Inc

Inventors

• Rivas Rio
• Mccarron Kevin

Classifications

• G01N2291/0255

  (Bio)chemical reactions, e.g. on biosensors · CPC title

• B01L2200/12

  Specific details about manufacturing devices · CPC title

• B01L3/502707

  characterised by the manufacture of the container or its components · CPC title

• G01N29/222

  Constructional or flow details for analysing fluids (optoacoustic fluid cells G01N29/2425) · CPC title

• G01N33/5438 Primary

  Electrodes · CPC title