Apparatus and method for the determination of the absolute coefficient of thermal expansion in ultralow expansion materials

Patent metadata

Field	Value
Publication number	US-10458936-B2
Application number	US-201715493944-A
Country	US
Kind code	B2
Filing date	Apr 21, 2017
Priority date	May 11, 2016
Publication date	Oct 29, 2019
Grant date	Oct 29, 2019

Abstract

An improved method and apparatus for determination of the absolute coefficient of thermal expansion of materials, including ultralow expansion materials, utilizes a metrology frame that is regulated within a first narrow temperature range that varies by only a small fraction of a degree Celsius from a set point temperature (e.g., less than about 0.01° C. from the set point temperature), while the temperature of the sample is varied to determine the coefficient of thermal expansion over a larger temperature range (e.g., 30, 40 or 50° C.). The method and apparatus permit determination of the coefficient of thermal expansion of a material to levels approaching 10−9/° C.

First claim

What is claimed is:

1. A process for determining an absolute coefficient of thermal expansion in a sample, comprising:
supporting a sample on a frame, the sample having a first boundary opposite a second boundary, the frame having a first end opposite a second end, the frame supporting at least one optical sensor on the first end and at least one optical sensor on the second end, the at least one optical sensor supported on the first end directing an optical signal at the first boundary of the sample, the at least one optical sensor supported on the second end directing an optical signal at the second boundary of the sample;
regulating the temperature of the frame within a first range that is within ±0.02 K of a frame set point temperature;
varying the temperature of the sample over a second range that is greater than 1K while maintaining the temperature of the frame within the first range;
measuring the change in length of the sample as a function of temperature over the second range; and
determining the absolute coefficient of thermal expansion based on the measured change in length of the sample as a function of temperature.

2. The process of claim 1 , wherein the frame comprises a frame material having a Tzc and the temperature of the frame is maintained within a temperature range of about ±0.01° C. of a frame set point temperature, the frame set point temperature being within about ±5° C. of the Tzc of the frame material.

3. The process of claim 1 , wherein the frame comprises a frame material having a Tzc and the temperature of the frame is maintained within a temperature range of about 0.005° C. of a frame set point temperature, the frame set point temperature being within about ±2° C. of the Tzc of the frame material.

4. The process of claim 1 , wherein the second range extends over at least 25 K and the measuring is completed within a period of 24 hours.

5. The process of claim 1 , wherein the temperature of the sample is varied non-monotonically.

6. The process in claim 5 , wherein the varying sample temperature includes a plurality of temperature steps, each of the sample temperature steps having a fixed sample temperature and including a hold time at the fixed sample temperature.

7. The process of claim 1 , wherein the first boundary of the sample is coated with a reflective film.

8. The process of claim 7 , wherein the reflective film comprises Al.

9. The process of claim 7 , wherein the thickness of the reflective film is less than 50 nm.

10. A method of determining the coefficient of thermal expansion of a sample of a material, comprising: supporting a sample on a frame, the sample having a first boundary opposite a second boundary, the frame having a first end opposite a second end, the frame supporting at least one optical sensor on the first end and at least one optical sensor on the second end, the at least one optical sensor supported on the first end directing an optical signal at the first boundary of the sample, the at least one optical sensor supported on the second end directing an optical signal at the second boundary of the sample;
regulating the temperature of the frame within a first range that is within ±0.02 K of a set point temperature;
varying the temperature of the sample over a second range that is greater than 1K while maintaining the temperature of the frame within the first range;
measuring the change in length of the sample as a function of temperature over the second range; and
determining the absolute coefficient of thermal expansion based on the measured change in length of the sample as a function of temperature.

11. The method of claim 10 , wherein the sample has a weight less than 50 grams, and the precision of the measurement is no greater than 10 ppb/K.

12. The method of claim 11 , wherein the sample has a volume less than 25 cubic centimeters.

Assignees

• Corning Inc

Inventors

• Duran Carlos Alberto

Classifications

• G01N25/16 Primary

  by investigating thermal coefficient of expansion · CPC title

• G03F7/70958

  Optical materials or coatings, e.g. with particular transmittance, reflectance or anti-reflection properties · CPC title

• G01N33/386

  Glass · CPC title