Transfer device and transfer method

Patent metadata

Field	Value
Publication number	US-10457498-B2
Application number	US-201715673242-A
Country	US
Kind code	B2
Filing date	Aug 9, 2017
Priority date	Aug 10, 2016
Publication date	Oct 29, 2019
Grant date	Oct 29, 2019

Abstract

A transfer device and a transfer method using the same. The transfer device comprises a first conveyance roller, a transfer roller and a second conveyance roller. The transfer roller includes a roller body and stamp contacts formed on and protruded from the roller body. The stamp contacts can absorb elements, axes of the first conveyance roller. The transfer roller and the second conveyance roller are arranged in parallel with each other. The transfer roller is interposed between the first and second conveyance rollers. A first roll gap is formed between the first conveyance roller and the transfer roller to convey a medium substrate, and a second roll gap is formed between the second conveyance roller and the transfer roller to convey a target substrate. The transfer device and method can be used to transfer a great amount of elements to the substrate having large size.

First claim

The invention claimed is:

1. A transfer device, comprising a first conveyance roller, a transfer roller and a second conveyance roller, wherein
the transfer roller includes a roller body and a plurality of first stamp contacts formed on and protruded from a peripheral surface of the roller body,
the first stamp contacts are able to absorb elements to be transferred,
an axis of the first conveyance roller, an axis of the transfer roller and an axis of the second conveyance roller are arranged in parallel with each other,
the transfer roller is interposed between the first conveyance roller and the second conveyance roller,
a first roll gap is formed between the first conveyance roller and the transfer roller to convey a medium substrate, and a second roll gap is formed between the second conveyance roller and the transfer roller to convey a target substrate, and
the transfer device further includes a driving mechanism configured to rotate the first conveyance roller, the transfer roller and the second conveyance roller.

2. The transfer device according to claim 1 , wherein
the first stamp contacts are made of dimethyl silicone polymer.

3. The transfer device according to claim 1 , wherein
the transfer device further comprises a panel stamp including a panel base and second stamp contacts formed on a surface of the panel base,
the second stamp contacts are able to absorb the elements to be transferred, and
an interval between adjacent two second stamp contacts is equivalent to an interval between adjacent two first stamp contacts, or an interval between adjacent two second stamp contacts is an integral multiple of an interval between adjacent two first stamp contacts.

4. The transfer device according to claim 3 , wherein
the second stamp contacts are made of dimethyl silicone polymer.

5. The transfer device according to claim 1 , wherein
the transfer device comprises the medium substrate.

6. The transfer device according to claim 1 , wherein
the transfer device comprises a station and a mounting rack fixed on the station,
the mounting rack comprises a support rod, a first mounting rod, a second mounting rod and a third mounting rod, wherein one end of the support rod is fixed to the station, and the first mounting rod, the second mounting rod and the third mounting rod are arranged along a height direction of the support rod and perpendicularly to the support rod, and
the first conveyance roller, the transfer roller and the second conveyance roller are mounted on the first mounting rod, the second mounting rod and the third mounting rod, respectively.

7. The transfer device according to claim 6 , wherein
the transfer device further comprises a cleaning mechanism configured to clean the transfer roller.

8. The transfer device according to claim 7 , wherein
the cleaning mechanism comprises a fourth mounting rod and a cleaning unit,
the fourth mounting rod is fixed to the station at one end therefore, and is provided with the cleaning unit at the other end thereof, and
the cleaning unit is able to spray cleaning fluid onto the transfer roller.

9. The transfer device according to claim 1 , wherein
the transfer device further comprises a plurality of medium substrate support rollers configured to support the medium substrate,
axes of the medium substrate support rollers are in parallel with the axis of the first conveyance roller,
the medium substrate support rollers are arranged on both sides of the first conveyance roller with respect to a width direction thereof, and
a space between a support surface of the medium substrate support rollers and a conveyance surface of the first conveyance roller is equivalent to a thickness of the medium substrate.

10. The transfer device according to claim 1 , wherein
the transfer device further comprises a plurality of target substrate support rollers configured to support the target substrate,
axes of the target substrate support rollers are in parallel with the axis of the second conveyance roller,
the target substrate support rollers are arranged on both sides of the second conveyance roller with respect to a width direction thereof, and
a support surface of the target substrate support rollers is flush with the conveyance surface of the first conveyance roller.

11. A transfer method, comprises steps of:
providing a transfer device comprising a first conveyance roller, a transfer roller and a second conveyance roller, wherein the transfer roller includes a roller body and a plurality of first stamp contacts formed on and protruded from a peripheral surface of the roller body, the first stamp contacts are able to absorb elements to be transferred, an axis of the first conveyance roller, an axis of the transfer roller and an axis of the second conveyance roller are arranged in parallel with each other, the transfer roller is interposed between the first conveyance roller and the second conveyance roller, a first roll gap is formed between the first conveyance roller and the transfer roller to convey a medium substrate, a second roll gap is formed between the second conveyance roller and the transfer roller to convey a target substrate and the transfer device further includes a driving mechanism configured to rotate the first conveyance roller, the transfer roller and the second conveyance roller;
absorbing elements to be transferred onto a surface on one side of the medium substrate;
interposing the medium substrate on which the elements are disposed between the first conveyance roller and the transfer roller, such that the elements face to the first stamp contacts of the transfer roller;
interposing the target substrate between the second conveyance roller and the transfer roller; and
driving the first conveyance roller and the second conveyance roller to rotate in one direction, while driving the transfer roller to rotate in a direction opposite to the rotation of the first conveyance roller and the second conveyance roller.

12. The transfer method according the claim 11 , wherein
the transfer device further comprises a panel stamp including a panel base and second stamp contacts formed on a surface of the panel base,
the second stamp contacts are able to absorb the elements to be transferred, and
an interval between adjacent two second stamp contacts is equivalent to an interval between adjacent two first stamp contacts, or an interval between adjacent two second stamp contacts is an integral multiple of an interval between adjacent two first stamp contacts.

13. The transfer method according the claim 11 , wherein
the transfer device comprises a station and a mounting rack fixed on the station,
the mounting rack comprises a support rod, a first mounting rod, a second mounting rod and a third mounting rod, wherein one end of the support rod is fixed to the station, and the first mounting rod, the second mounting rod and the third mounting rod are arranged along a height direction of the support rod and perpendicularly to the support rod, and
the first conveyance roller, the transfer roller and the second conveyance roller are mounted on the first mounting rod, the second mounting rod and the third mounting rod, respectively.

14. The transfer method according the claim 13 , wherein
the transfer device further comprises a cleaning mechanism configured to clean the transfer roller.

15. The transfer method according the claim 14 , wherein
the cleaning mechanism comprises a fourth mounting rod and a cleaning unit,
the fourth mounting rod is fixed to the station at one end therefore, and is provided with the cleaning unit at t

Assignees

• Boe Technology Group Co Ltd

Inventors

• He Xiaolong
• Li Zhifu
• Ji Zhiyuan
• Yao Jikai
• Guan Feng

Classifications

• H10P72/7602

  the wafers being placed on a robot blade or gripped by a gripper for conveyance · CPC title

• H10P72/3412

  Batch transfer of wafers · CPC title

• H10P72/3302

  Mechanical parts of transfer devices · CPC title

• H10P72/0606

  Position monitoring, e.g. misposition detection or presence detection · CPC title

• H10P72/0442

  Apparatus for placing on an insulating substrate, e.g. tape · CPC title