Stacked elongated nanoshapes of different semiconductor materials and structures that incorporate the nanoshapes

Patent metadata

Field	Value
Publication number	US-10453750-B2
Application number	US-201715629884-A
Country	US
Kind code	B2
Filing date	Jun 22, 2017
Priority date	Jun 22, 2017
Publication date	Oct 22, 2019
Grant date	Oct 22, 2019

Abstract

Disclosed herein are a method of forming stacked elongated nanoshapes (NSs) (e.g., stacked nanowires (NWs)) of different semiconductor materials above a substrate, a method of forming different devices (e.g., stacked field effect transistors (FETs) having different type conductivities) using the stacked NSs and the resulting structures. In the methods, stacked elongated NSs made of the same first semiconductor material can be formed above a substrate. The stacked elongated NSs can include at least a first NS and a second NS above the first NS. The second NS can then be selectively processed in order to convert the second NS from the first semiconductor material to a second semiconductor material. The first and second NSs can subsequently be used to form first and second devices, respectively, wherein the second device is stacked above the first device. The first and second device can be, for example, first and second FETs, respectively.

First claim

What is claimed is:

1. A method comprising:
forming elongated nanoshapes comprising a first semiconductor material, the elongated nanoshapes being stacked on a substrate and comprising at least:
a first nanoshape above, parallel to and physically separated from a surface of the substrate; and
a second nanoshape aligned above, parallel to and physically separated from the first nanoshape such that the first nanoshape is stacked vertically between the second nanoshape and the surface of the substrate; and

selectively processing the second nanoshape to convert the second nanoshape from the first semiconductor material to a second semiconductor material that is different from the first semiconductor material,
the forming of the elongated nanoshapes comprising:
forming a multi-layer semiconductor body adjacent to the surface of the substrate, the multi-layer semiconductor body comprising at least four alternating layers of a sacrificial material and the first semiconductor material, wherein the sacrificial material is different from the first semiconductor material;
forming a mask over the multi-layer semiconductor body, the mask having an opening that exposes a first portion of the multi-layer semiconductor body, the first portion being positioned laterally between second portions; and
selectively removing exposed sections of the sacrificial material from the first portion, and

the selectively processing of the second nanoshape comprising:
after the selectively removing of the exposed sections, depositing a dielectric layer so as to fill the opening;
recessing the dielectric layer in the opening to expose the second nanoshape;
depositing a third semiconductor material on exposed top, bottom and side surfaces of the second nanoshape; and
performing an anneal process to covert the second nanoshape from the first semiconductor material to the second semiconductor material, the second semiconductor material being an alloy of the first semiconductor material and the third semiconductor material.

2. The method of claim 1 , the elongated nanoshapes comprising any of nanowires, nanosheets and nanofins.

3. The method of claim 1 , the sacrificial material comprising a sacrificial semiconductor material.

4. The method of claim 1 , the first semiconductor material comprising silicon, the second semiconductor material comprising silicon germanium and the third semiconductor material comprising germanium.

5. The method of claim 1 , further comprising, after the performing of the anneal process, further recessing the dielectric layer to expose the first nanoshape.

6. A method comprising:
forming elongated nanoshapes comprising a first semiconductor material, the elongated nanoshapes being stacked on a substrate and comprising at least:
a first nanoshape above, parallel to and physically separated from a surface of the substrate; and
a second nanoshape aligned above, parallel to and physically separated from the first nanoshape such that the first nanoshape is stacked vertically between the second nanoshape and the surface of the substrate;

selectively processing the second nanoshape to convert the second nanoshape from the first semiconductor material to a second semiconductor material that is different from the first semiconductor material; and
after the selectively processing, forming a first transistor using the first nanoshape and forming a second transistor using the second nanoshape such that the first transistor is between the second transistor and the surface of the substrate.

7. The method of claim 6 , the elongated nanoshapes comprising any of nanowires, nanosheets and nanofins.

8. The method of claim 6 , the forming of the elongated nanoshapes comprising:
forming a multi-layer semiconductor body adjacent to the surface of the substrate, the multi-layer semiconductor body comprising at least four alternating layers of a sacrificial material and the first semiconductor material, wherein the sacrificial material is different from the first semiconductor material;
forming a mask over the multi-layer semiconductor body, the mask having an opening that exposes a first portion of the multi-layer semiconductor body, the first portion being positioned laterally between second portions; and
selectively removing exposed sections of the sacrificial material from the first portion.

9. The method of claim 8 , the sacrificial material comprising a sacrificial semiconductor material.

10. The method of claim 8 , the selectively processing of the second nanoshape comprising:
after the selectively removing of the exposed sections, depositing a dielectric layer so as to fill the opening;
recessing the dielectric layer in the opening to expose the second nanoshape;
depositing a third semiconductor material on exposed top, bottom and side surfaces of the second nanoshape; and
performing an anneal process to covert the second nanoshape from the first semiconductor material to the second semiconductor material, the second semiconductor material being an alloy of the first semiconductor material and the third semiconductor material.

11. The method of claim 10 , the first semiconductor material comprising silicon, the second semiconductor material comprising silicon germanium and the third semiconductor material comprising germanium.

12. The method of claim 10 , the first transistor having a first-type conductivity and the second transistor having a second-type conductivity that is different from the first-type conductivity and the forming of the first transistor and the second transistor comprising:
after the performing of the anneal process, recessing the dielectric layer to expose the first nanoshape;
removing the mask;
forming a sacrificial gate structure with a gate sidewall spacer adjacent to the first nanoshape and the second nanoshape;
forming recesses in the second portions of the multi-layer semiconductor body;
forming first source/drain regions with the first-type conductivity in the recesses such that the first nanoshape is positioned laterally between the first source/drain regions;
forming second source/drain regions with the second-type conductivity above the first source/drain regions such that the second nanoshape is positioned laterally between the second source/drain regions;
selectively removing the sacrificial gate structure to create a second opening that exposes the first nanoshape and the second nanoshape;
forming a first gate structure in the second opening adjacent to the first nanoshape, the first gate structure having a first work function; and
forming a second gate structure above the first gate structure and adjacent to the second nanoshape, the second gate structure having a second work function that is different from the first work function.

13. The method of claim 12 , further comprising at least one of the following:
before the forming of the second gate structure, forming an isolation region on the first gate structure; and
before the forming of the second source/drain regions, forming at least one additional isolation region on at least one first source/drain region.

14. A method comprising:
forming elongated nanoshapes comprising a first semiconductor material, the elongated nanoshapes being stacked and comprising at least:
a first nanoshape adjacent to a surface of a substrate; and

a second nanoshape parallel to and physically separated from the first nanoshape such that the first nanoshape is between the second nanoshape and the surface of the substrate;
selectively processing the second nanoshape to convert the second nanoshape from the first semiconductor material to a sec

Assignees

• Globalfoundries Inc

Inventors

• Pawlak Bartlomiej J
• Bouche Guillaume
• Jacob Ajey P

Classifications

• H10P14/3411

  Silicon, silicon germanium or germanium · CPC title

• H10P14/3238

  being insulating materials · CPC title

• H10P14/38

  characterised by treatments done after the formation of the materials · CPC title

• B82Y10/00

  Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic · CPC title

• H01L29/775

  Electricity · mapped topic