Field emission apparatus

Patent metadata

Field	Value
Publication number	US-10438764-B2
Application number	US-201715835073-A
Country	US
Kind code	B2
Filing date	Dec 7, 2017
Priority date	Dec 7, 2016
Publication date	Oct 8, 2019
Grant date	Oct 8, 2019

Abstract

Disclosed is a field emission apparatus. The apparatus comprises a cathode electrode and an anode electrode spaced apart from each other, an emitter on the cathode electrode, a gate electrode between the cathode and anode electrodes and including at least one gate aperture overlapping the emitter, and an electron transmissive sheet on the gate electrode and including a plurality of fine openings overlapping the gate aperture.

First claim

What is claimed is:

1. A field emission apparatus, comprising:
a cathode electrode and an anode electrode spaced apart from each other;
an emitter on the cathode electrode;
a gate electrode between the cathode and anode electrodes and including at least one gate aperture overlapping the emitter; and
an electron transmissive sheet on the gate electrode and including a plurality of fine openings overlapping the gate aperture,
wherein each of the fine openings has a width in a range from 5 μm to 45 μm,
wherein the gate electrode comprises a first surface facing the cathode electrode and a second surface facing the anode electrode, and
wherein the electron transmissive sheet is positioned directly on the first surface.

2. The field emission apparatus of claim 1 , wherein the electron transmissive sheet comprises at least one electron transmissive atomic layer, the electron transmissive atomic layer including a two-dimensional material.

3. The field emission apparatus of claim 2 , wherein the two-dimensional material comprises at least one of graphene, molybdenum disulfide (MoSO 2 ), tungsten disulfide (WS 2 ), hexagonal boron nitride (h-BN), molybdenum ditelluride (MoTe 2 ), and transition metal dichalcogenide (TMDC).

4. The field emission apparatus of claim 1 , wherein the width of each of the fine openings is less than a spacing between adjacent ones of the fine openings.

5. The field emission apparatus of claim 4 , wherein the width of each of the fine openings is less than one-third a width of the gate aperture.

6. The field emission apparatus of claim 5 , wherein the width of each of the fine openings is less than one-third a spacing between the cathode electrode and the gate electrode.

7. The field emission apparatus of claim 1 , wherein the gate aperture has a width greater than that of the emitter.

8. The field emission apparatus of claim 1 , further comprising at least one focusing electrode between the anode electrode and the gate electrode,
wherein the focusing electrode comprises a focusing electrode aperture vertically overlapping the gate aperture.

9. The field emission apparatus of claim 1 , wherein the emitter is positioned on a surface of the cathode electrode, the surface of the cathode electrode facing the anode electrode.

10. The field emission apparatus of claim 1 , wherein the anode electrode comprises a target on its surface facing the cathode electrode.

11. The field emission apparatus of claim 1 , wherein the cathode electrode and the gate electrode are spaced apart at a spacing of more than about 150 μm and less than about 500 μm.

12. The field emission apparatus of claim 1 , wherein at least one of the fine openings has a different width from those of other fine openings.

13. The field emission apparatus of claim 1 , wherein the fine opening has a width within a range in which a trajectory of an electron beam emitted from the emitter is not substantially distorted by distortion of potential distribution caused by the fine opening.

14. The field emission apparatus of claim 1 , wherein a spacing between the cathode electrode and the gate electrode is greater than 150 μm.

15. The field emission apparatus of claim 1 , wherein the plurality of fine openings are arranged in a regular pattern.

16. The field emission apparatus of claim 1 , wherein the plurality of fine openings are arranged in an irregular pattern, the plurality of fine openings being arranged asymmetrically with respect to the emitter when seen in a plan view.

Assignees

• Electronics & Telecommunications Res Inst

Inventors

• Choi Young Chul
• Song Yoon-Ho
• Jeon Hyo Jin
• Kang Jun Tae
• Park Sora
• Lee Jeong Woong
• Go Eunsol
• Shin Min-Sik
• Kim Jae-Woo
• Jeong Jin-Woo
• Yeon Ji-Hwan
• Kim Sunghee

Classifications

• H01J35/065

  Field emission, photo emission or secondary emission cathodes · CPC title

• H01J2235/062

  Cold cathodes · CPC title

• H01J29/085

  Anode plates, e.g. for screens of flat panel displays · CPC title

• H01J29/62 Primary

  Electrostatic lenses · CPC title

• H01J35/14

  Arrangements for concentrating, focusing, or directing the cathode ray · CPC title