Guided transport path correction

Patent metadata

Field	Value
Publication number	US-10433434-B2
Application number	US-201715828335-A
Country	US
Kind code	B2
Filing date	Nov 30, 2017
Priority date	Jul 8, 2016
Publication date	Oct 1, 2019
Grant date	Oct 1, 2019

Abstract

A printer deposits material onto a substrate as part of a manufacturing process for an electronic product; at least one transported component experiences error, which affects the deposition. This error is mitigated using transducers that equalize position of the component, e.g., to provide an “ideal” conveyance path, thereby permitting precise droplet placement notwithstanding the error. In one embodiment, an optical guide (e.g., using a laser) is used to define a desired path; sensors mounted to the component dynamically detect deviation from this path, with this deviation then being used to drive the transducers to immediately counteract the deviation. This error correction scheme can be applied to correct for more than type of transport error, for example, to correct for error in a substrate transport path, a printhead transport path and/or split-axis transport non-orthogonality.

First claim

We claim:

1. An apparatus to fabricate a thin-film layer, the apparatus comprising:
a material source;
a support structure to support a substrate;
a conveyance system to provide relative transport between the material source and the substrate along a conveyance path, wherein during the relative transport, the material source is to deposit a material onto the substrate, in order to form the thin-film layer;
an optical source to form an optical beam;
an optical detector fixed in position relative to at least one of the material source or the substrate, the optical detector to detect divergence of the position of the optical detector from the optical beam; and
at least one transducer to displace at least one of the material source or the detector relative to the conveyance path, the at least one transducer to be driven in dependence on an output of the optical detector so as to cause the position of the optical detector to remain coincident with the beam during the relative transport.

2. The apparatus of claim 1 , wherein the conveyance system comprises a gripper that is to selectively engage the substrate and transport the substrate along the conveyance path, and wherein the at least one transducer is to cause the substrate to travel a straight line relative to the optical beam for at least a portion of the conveyance path.

3. The apparatus of claim 2 , wherein the material source comprises a printhead to deposit a liquid ink onto the substrate, the material to be supplied to the substrate by the liquid ink and comprising a film-forming substance, and wherein the apparatus further comprises a system to solidify the film-forming substance relative to the liquid ink, to form the thin-film layer, the system comprising at least one of a (1) a radiation source that is to cure the film-forming substance to form the thin-film layer, or a (2) a heat source that is to evaporate solvent from the liquid ink to cause the film-forming substance to form the thin-film layer.

4. The apparatus of claim 1 , wherein the optical source is a laser and the optical beam is a laser beam which is oriented parallel to the conveyance path, and wherein the optical beam is to serve as a virtual guide, with the at least one transducer driven so as to correct for deviation between the virtual guide and the conveyance path.

5. The apparatus of claim 1 , wherein the support structure comprises a floatation table that is to support the substrate on a gas cushion during the relative transport, and wherein the conveyance system comprises a vacuum gripper that is to use a vacuum to selectively engage and pull the substrate along the conveyance path atop the gas cushion during the relative transport.

6. The apparatus of claim 5 , wherein the at least one transducer comprises a voice coil having a linear throw which is oriented in a direction independent to a direction of the optical beam.

7. The apparatus of claim 6 , wherein the direction of the linear throw is normal to a surface of the substrate, to adjust a height of the substrate relative to the support structure.

8. The apparatus of claim 6 , wherein the direction of the linear throw is parallel to the surface of the substrate.

9. The apparatus of claim 6 , wherein:
the conveyance system comprises a track;
the gripper comprises a first part, which travels along the track, and a second part, which mounts the optical detector and the vacuum gripper;
the voice coil couples the first part and the second part; and
the gripper further comprises a mechanical linkage between the first part and the second part, the mechanical linkage to constrain the second part to travel with the first part in a direction of the conveyance path, but to permit the displacement of the second part relative to the first part by the voice coil, toward and away from the track.

10. The apparatus of claim 1 , wherein the substrate is a first substrate and the apparatus is to fabricate the thin-film layer on each given substrate of a series of substrates, including the first substrate, wherein each given substrate of the series of substrates features at least one fiducial, and wherein:
the apparatus comprises a camera to image the fiducial of each given substrate of the series of substrates, including the first substrate, and at least one processor;
the at least one processor is to cause said apparatus to mechanically position each given substrate of the series of substrates so as to align the given substrate of the series of substrates relative to the conveyance path; and
the at least one processor is to cause the vacuum gripper to engage each given substrate of the series of substrates for the relative transport following the alignment of the given substrate of the series of substrates relative to the conveyance path.

11. The apparatus of claim 1 , wherein the at least one transducer comprises two transducers, each having a linear throw that is parallel to a surface of the substrate, the two transducers being driven in common-mode to displace the substrate in a direction perpendicular to the conveyance path and being driven in differential-mode to rotate the substrate relative to the conveyance path.

12. The apparatus of claim 1 , wherein the at least one transducer comprises a piezoelectric transducer.

13. The apparatus of claim 1 , further comprising an enclosure to contain a controlled atmosphere, wherein the relative transport and the deposition are to occur within the controlled atmosphere.

14. The apparatus of claim 1 , wherein the conveyance path is characterized by mechanical imperfections, and wherein the optical beam, the optical detector and the at least one transducer are to cause the relative transport to follow a straight line notwithstanding the mechanical imperfections.

Assignees

• Kateeva Inc

Inventors

• Vronsky Eliyahu
• Mathia Karl
• Ko Alexander Sou-Kang

Classifications

• H10P72/3314 Primary

  Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers · CPC title

• H10P72/0448

  Apparatus for applying a liquid, a resin, an ink or the like · CPC title

• H10P72/70

  for supporting or gripping · CPC title

• H10P72/50

  for positioning, orientation or alignment · CPC title

• H10P72/36

  using air tracks · CPC title