Printing system assemblies and methods

Patent metadata

Field	Value
Publication number	US-9884501-B2
Application number	US-201615354927-A
Country	US
Kind code	B2
Filing date	Nov 17, 2016
Priority date	Jun 17, 2014
Publication date	Feb 6, 2018
Grant date	Feb 6, 2018

Abstract

The present teachings disclose various embodiments of a printing system for printing a substrate, in which the printing system can be housed in a gas enclosure, where the environment within the enclosure can be maintained as a controlled printing environment. A controlled environment of the present teachings can include control of the type of gas environment within the gas enclosure, the size and level particulate matter within the enclosure, control of the temperature within the enclosure and control of lighting. Various embodiments of a printing system of the present teachings can include a Y-axis motion system and a Z-axis moving plate that are configured to substantially decrease excess thermal load within the enclosure by, for example, eliminating or substantially minimizing the use of conventional electric motors.

First claim

What is claimed is:

1. A printing system comprising:
a gas enclosure assembly defining an interior; and
the printing system housed within the interior of the gas enclosure assembly comprising:
a printhead assembly comprising at least one printhead;
a substrate support apparatus for supporting a substrate; and
a motion system for positioning the substrate relative to the printhead assembly, the motion system comprising:
an X, Z-axis motion system for controlling the printhead assembly motion in X, Z axes, said X, Z-axis motion system comprising:
a carriage assembly mounted on a bridge, wherein the carriage assembly is configured with a linear air bearing motion system for controlling the X-axis movement of the carriage assembly on the bridge;
a Z-axis moving plate assembly mounted on the carriage assembly, wherein the printhead assembly is mounted on the Z-axis moving plate; and

wherein the Z-axis moving plate is configured with a pneumatic counterbalance system to counterbalance a force against the printhead assembly load on the Z-axis moving plate assembly.

2. The printing system of claim 1 , wherein the substrate support apparatus is a floatation table.

3. The printing system of claim 2 , said floatation table having a printing zone; wherein the floatation table is configured to hold the substrate at a fly height of about 30 micrometers to about 50 micrometers above floatation table in the printing zone.

4. The printing system of claim 2 , wherein the floatation table comprises a porous plate.

5. The printing system of claim 1 , wherein the substrate support apparatus is configured to support a substrate of a size ranging from about generation 3.5 to about generation 10.

6. The printing system of claim 1 , wherein the printing system further comprises a gas circulation and filtration system.

7. The printing system of claim 6 , wherein the filtration system is configured to provide a low-particle environment comprising an on-substrate deposition rate specification of less than or equal to about 100 particles per square meter of substrate per minute for particles greater than or equal to 2 μm in size.

8. The printing system of claim 1 , wherein the printing system further comprises a gas purification system.

9. The printing system of claim 8 , wherein the gas purification system maintains the gas at less than 100 ppm of each of a reactive species.

10. The printing system of claim 9 , wherein the reactive species are selected from water vapor and oxygen.

11. The printing system of claim 1 , wherein a gas contained in the interior of the gas enclosure is an inert gas.

12. The printing system of claim 11 , wherein the inert gas is selected from nitrogen, any of the noble gases and combinations thereof.

13. The printing system of claim 6 , wherein the filtration system is configured to provide a low-particle environment as specified by ISO 14644-1:1999 Class 5 standards.

14. The printing system of claim 6 , wherein the filtration system is configured to provide a low-particle environment as specified by ISO 14644-1:1999 Class 1 standards.

15. The printing system of claim 1 , wherein the motion system further comprises a Y-axis linear air bearing motion system configured with a substrate gripper assembly for gripping the substrate, and a gripper motion control system for maintaining the substrate orientation parallel to the Y-axis of travel.

Assignees

• Kateeva Inc

Inventors

• Lowrance Robert B
• Ko Alexander Sou Kang
• Mauck Justin
• Vronsky Eliyahu
• Khrustalev Aleksey
• Mathia Karl
• Alderson Shandon

Classifications

• H10P72/78

  using vacuum or suction, e.g. Bernoulli chucks · CPC title

• H10P72/50

  for positioning, orientation or alignment · CPC title

• H10P72/36

  using air tracks · CPC title

• B41J25/304

  Bodily-movable mechanisms for print heads or carriages movable towards or from paper surface · CPC title

• B41J3/407 Primary

  for marking on special material · CPC title