Transport path correction techniques and related systems, methods and devices

Patent metadata

Field	Value
Publication number	US-10420225-B2
Application number	US-201715816443-A
Country	US
Kind code	B2
Filing date	Nov 17, 2017
Priority date	Jul 8, 2016
Publication date	Sep 17, 2019
Grant date	Sep 17, 2019

Abstract

A printer deposits material onto a substrate as part of a manufacturing process for an electronic product. At least one mechanical component experiences mechanical error, which is mitigated using transducers that equalize position of a transported thing, e.g., to provide an “ideal” conveyance path; a substrate conveyance system and/or a printhead conveyance system can each use transducers in this manner to improve precise droplet placement. In one embodiment, errors are measured in advance, with corrections being “played back” during production runs to mitigate repeatable transport path error. In a still more detailed embodiment, the transducers can be predicated on voice coils, which cooperate with a floatation table and floating, mechanical pivot assembly to provide frictionless, but mechanically-supported error correction.

First claim

We claim:

1. A transport system for use with an electronic product manufacturing apparatus having a deposition source to deposit a material on a substrate and having a flotation table to support the substrate on a fluidic cushion while the material is being deposited thereon, the transport system comprising:
a first component to travel along a track according to electronic stimuli, the track extending in a first direction;
a second component conveyed by the first component, the second component to selectively engage the substrate so as to transport the substrate in the first direction;
at least one transducer coupling the first component and the second component, the at least one transducer to displace the second component and the substrate in a direction orthogonal to the first direction;
wherein the at least one transducer is to be driven so as to cause the substrate to travel along a straight line, notwithstanding that the track deviates from the straight line.

2. The transport system of claim 1 , wherein the second component comprises a vacuum chuck that is to selectively engage the substrate using suction.

3. The transport system of claim 1 , wherein the transport system further comprises a memory to store predetermined data, wherein the at least one transducer is to be driven according to the predetermined data to perform predetermined displacements of the second component and the substrate in the direction orthogonal to the first direction, in dependence on the electronic stimuli.

4. The transport system of claim 1 , wherein the transport system further comprises a memory to store predetermined data, wherein the at least one transducer is to be driven according to the predetermined data to perform predetermined displacements of the second component and the substrate in the direction orthogonal to the first direction, in dependence on a position of the first component along the track.

5. The transport system of claim 1 , wherein each transducer of the at least one transducer comprises one of a voice coil, a linear motor or a piezoelectric transducer.

6. The transport system of claim 1 , wherein the at least one transducer comprises at least two transducers that are actuated using common-mode control, wherein the at least two transducers are driven together so as to displace the second component and the substrate in the direction orthogonal to the first direction, and differential-mode control, wherein the at least two transducers are differentially driven so as to rotate the substrate relative to the first direction.

7. The transport system of claim 6 , wherein each transducer of the at least one transducer comprises a voice coil, wherein the transport system further comprises a mechanical pivot that couples the first component and the second component, the mechanical pivot defining a pivot point, and wherein:
actuation of the at least two transducers using the common-mode control is effective to displace the mechanical pivot in the direction orthogonal to the first direction; and
actuation of the at least two transducers using the differential-mode control is effective to rotate the second component and the substrate relative to the first component about the pivot point.

8. The transport system of claim 1 , wherein the transport system further comprises a mechanical pivot that couples the first component and the second component, the mechanical pivot to permit the substrate to rotate relative to the first direction while constraining the substrate to travel with the first component along the first direction.

9. The transport system of claim 1 , wherein the transport system is to transport the substrate within a plane of conveyance while the material is being deposited thereon, and wherein the direction orthogonal to the first direction is parallel to the plane of conveyance.

10. The transport system of claim 1 , wherein the transport system is to transport the substrate within a plane of conveyance while the material is being deposited thereon, and wherein the direction orthogonal to the first direction is normal to the plane of conveyance.

11. The transport system of claim 10 , wherein the at least one transducer is to displace the substrate toward and away from the deposition source.

Assignees

• Kateeva Inc

Inventors

• Darrow David C
• Pun Digby
• Lowrance Robert B
• Ko Alexander Sou-Kang

Classifications

• H10P72/3314 Primary

  Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers · CPC title

• H10P72/0448

  Apparatus for applying a liquid, a resin, an ink or the like · CPC title

• H10P72/70

  for supporting or gripping · CPC title

• H10P72/50

  for positioning, orientation or alignment · CPC title

• H10P72/36

  using air tracks · CPC title