Method of manufacturing an oxide single crystal substrate for a surface acoustic wave device

Patent metadata

Field	Value
Publication number	US-10418543-B2
Application number	US-201615542703-A
Country	US
Kind code	B2
Filing date	Jan 6, 2016
Priority date	Jan 26, 2015
Publication date	Sep 17, 2019
Grant date	Sep 17, 2019

Abstract

[Object]
An object of the present invention is to provide a method for manufacturing an oxide single crystal substrate having less dispersion in characteristics within the substrate surface.
[Means to solve the Problems]
In the manufacture method of the present invention, a powder containing a Li compound is dispersed in a medium to form a slurry, and heat is applied while the slurry is in contact with the surface of the oxide single crystal substrate, so as to diffuse Li into the substrate from the surface thereof to effect a modification of the substrate; or after the slurry is brought into contact with the surface of the oxide single crystal substrate, the oxide single crystal substrate is buried in a powder containing the Li compound, and heat is applied to effect the diffusion of Li in the substrate from the surface thereof whereby a modification of the substrate occurs.

First claim

The invention claimed is:

1. A method of manufacturing a piezoelectric oxide single crystal substrate product for a surface acoustic wave device, comprising steps of:
preparing a slurry by dispersing a first powder containing a Li compound in a medium, the first powder having an average particle size of 0.001 through 50 μm;
applying said slurry to a surface of a piezoelectric oxide single crystal substrate made of a lithium compound cut from a piezoelectric oxide single crystal ingot having a roughly congruent composition which has been subjected to single polarization treatment;
burying said substrate with said slurry in a second powder containing said Li compound, the second powder having an average particle size of 0.001 through 50 μm; and
heating said substrate buried in said second powder in a temperature range from 850° C. through 1000° C. in an oxygen-free atmosphere selected from a nitrogen atmosphere, an inert gas atmosphere and a vacuum, so as to diffuse Li into said substrate about 10 μm to 50 μm in depth in the thickness direction from the surface thereof so as to make a profile of Li concentration wherein the Li concentration is higher at the surface, and the Li concentration decreases inwardly,
wherein the piezoelectric oxide single crystal substrate product has a sound velocity distribution of 0.5 m/s or less,
wherein the Li compound comprises Li 3 TaO 4 .

2. The method according to claim 1 , wherein the thickness of the substrate is from 200 μm to 400 μm.

3. A method of manufacturing a piezoelectric oxide single crystal substrate product for a surface acoustic wave device, comprising steps of:
preparing a slurry by dispersing a first powder containing a Li compound in a medium, the first powder having an average particle size of 0.001 through 50 μm;
applying said slurry to a surface of a piezoelectric oxide single crystal substrate made of a lithium compound cut from a piezoelectric oxide single crystal ingot having a roughly congruent composition which has been subjected to single polarization treatment;
burying said substrate with said slurry in a second powder containing said Li compound, the second powder having an average particle size of 0.001 through 50 μm; and
heating said substrate buried in said second powder in a temperature range from 850° C. through 1000° C. in an oxygen-free atmosphere selected from a nitrogen atmosphere, an inert gas atmosphere and a vacuum, so as to diffuse Li into said substrate about 10 μm to 50 μm in depth in the thickness direction from the surface thereof so as to make a profile of Li concentration wherein the Li concentration is higher at the surface, and the Li concentration decreases inwardly, wherein the piezoelectric oxide single crystal substrate product has a sound velocity distribution of 0.5 m/s or less wherein the Li compound comprises Li 3 NbO 4 .

4. The method according to claim 3 , wherein the thickness of the substrate is from 200 μm to 400 μm.

5. A method of manufacturing a piezoelectric oxide single crystal substrate product for a surface acoustic wave device, comprising steps of:
preparing a slurry by dispersing a first powder containing a Li compound in a medium, the first powder having an average particle size of 0.001 through 50 μm;
applying said slurry to a surface of a piezoelectric oxide single crystal substrate made of a lithium compound cut from a piezoelectric oxide single crystal ingot having a roughly congruent composition which has been subjected to single polarization treatment;
burying said substrate with said slurry in a second powder containing said Li compound, the second powder having an average particle size of 0.001 through 50 μm; and
heating said substrate buried in said second powder in a temperature range from 850° C. through 1000° C. in an oxygen-free atmosphere selected from a nitrogen atmosphere, an inert gas atmosphere and a vacuum, so as to diffuse Li into said substrate about 10 μm to 50 μm in depth in the thickness direction from the surface thereof so as to make a profile of Li concentration wherein the Li concentration is higher at the surface, and the Li concentration decreases inwardly, wherein the piezoelectric oxide single crystal substrate product has a sound velocity distribution of 0.5 m/s or less,
wherein the oxide single crystal substrate is made of LiTaO 3 , and the first powder and the second powder comprise Li 3 TaO 4 .

6. The method according to claim 5 , wherein the thickness of the substrate is from 200 μm to 400 μm.

7. A method of manufacturing a piezoelectric oxide single crystal substrate product for a surface acoustic wave device, comprising steps of:
preparing a slurry by dispersing a first powder containing a Li compound in a medium, the first powder having an average particle size of 0.001 through 50 μm;
applying said slurry to a surface of a piezoelectric oxide single crystal substrate made of a lithium compound cut from a piezoelectric oxide single crystal ingot having a roughly congruent composition which has been subjected to single polarization treatment;
burying said substrate with said slurry in a second powder containing said Li compound, the second powder having an average particle size of 0.001 through 50 μm; and
heating said substrate buried in said second powder in a temperature range from 850° C. through 1000° C. in an oxygen-free atmosphere selected from a nitrogen atmosphere, an inert gas atmosphere and a vacuum, so as to diffuse Li into said substrate about 10 μm to 50 μm in depth in the thickness direction from the surface thereof so as to make a profile of Li concentration wherein the Li concentration is higher at the surface, and the Li concentration decreases inwardly, wherein the piezoelectric oxide single crystal substrate product has a sound velocity distribution of 0.5 m/s or less,
wherein the oxide single crystal substrate is made of LiNbO 3 , and the first powder and the second powder comprise Li 3 NbO 4 .

8. The method according to claim 7 , wherein the thickness of the substrate is from 200 μm to 400 μm.

Assignees

• Shinetsu Chemical Co

Inventors

• Abe Jun
• Tanno Masayuki
• Kuwabara Yoshinori

Classifications

• C30B29/30 Primary

  Niobates; Vanadates; Tantalates · CPC title

• H03H9/02559

  of lithium niobate or lithium-tantalate substrates · CPC title

• C30B31/02

  by contacting with diffusion materials in the solid state · CPC title

• H03H3/08

  for the manufacture of resonators or networks using surface acoustic waves · CPC title

• H03H9/25

  Constructional features of resonators using surface acoustic waves {(devices for manipulating acoustic surface waves in general G10K11/36)} · CPC title