Purge stocker and purging method

Patent metadata

Field	Value
Publication number	US-10410894-B2
Application number	US-201515319724-A
Country	US
Kind code	B2
Filing date	Apr 21, 2015
Priority date	Jun 16, 2014
Publication date	Sep 10, 2019
Grant date	Sep 10, 2019

Abstract

A purge stocker includes a first supply unit including N first purge apparatuses, each having a first supply unit configured to support a storage container, a first supply pipe configured to supply the purge gas into the storage container supported by the first supporting unit, and a first flow rate adjusting unit configured to adjust the flow rate of the purge gas in the first supply pipe; and a second supply unit including M second purge apparatuses, each having a second supporting unit configured to support the storage container and a second supply pipe configured to supply the purge gas into the storage container supported by the second supporting unit. When the storage containers are supported by a certain number of second supporting units, the second supply unit supplies the storage containers with the purge gas through the respective second supply pipes.

First claim

The invention claimed is:

1. A purge stocker for purging an inside of storage containers which store a product with purge gas, the purge stocker comprising:
a first supply unit including N first purge apparatuses, wherein N is an integer equal to or larger than 2, each of the N first purge apparatuses having a first supporting unit configured to support one of the storage containers, a first supply pipe configured to supply the purge gas to the one of the storage containers supported by the first supporting unit, and a first flow rate adjusting unit positioned to measure a mass flow rate of the purge gas in the first supply pipe, and individually provide flow rate control;
a second supply unit including:
M second purge apparatuses and M second supply pipes correspondingly associated with each of the M second purge apparatuses, wherein M is a positive integer between 2 and N, inclusive, each of the M second purge apparatuses having a second supporting unit configured to support the one of the storage containers, and one of the M second supply pipes configured to supply the purge gas to the one of the storage containers supported by the second supporting unit,
a main pipe connected with, and configured to supply the purge gas to, each of the M second supply pipes, and
a single second flow rate adjusting unit positioned on the main pipe to measure a mass flow rate of the purge gas flowing through the main pipe, to the each of the M second supply pipes, and then to each of the one of the storage containers associated with the second flow rate adjusting unit and provide collective flow rate control;

a transferring device configured to transfer the one of the storage containers from the first supply unit to the second supply unit, once initial purging is complete, for maintained purging in the second supply unit, wherein
the second flow rate adjusting unit controls a flow rate of the purge gas supplied to each of the M second supply pipes of the each of the M second purge apparatuses, and then to the each of the one of the storage containers, and
the second supply unit supplies the each of the one of the storage containers with the purge gas through the M second supply pipes when the each of the one of the storage containers are supported by an associated second supporting unit.

2. The purge stocker according to claim 1 , wherein, when all of the second supporting units in the M second purge apparatuses support a respective one of the storage containers, the second supply unit supplies the respective one of the storage containers with the purge gas through the one of the M second supply pipes.

3. The purge stocker according to claim 2 , wherein
when a number of storage containers that have been supplied with the purge gas are at a certain flow rate for a certain period in the first supply unit reaches M, the transferring device transfers M ones of the storage containers from the first supply unit to the second supply unit, and
upon completion of transfer of the M ones of the storage containers, the second supply unit supplies the storage containers with the purge gas through the M second supply pipes.

4. The purge stocker according to claim 1 , wherein the second flow rate adjusting unit adjusts the flow rate of the purge gas in the main pipe to a set flow rate that is determined based on a number of the storage containers connected with the M second supply pipes in the second supply unit.

5. The purge stocker according to claim 1 , wherein, when starting supplying the purge gas to the one of the storage containers, the first flow rate adjusting unit increases the flow rate of the purge gas in the first supply pipe in a continuous or stepwise manner to obtain a certain supply flow rate.

6. The purge stocker according to claim 1 , wherein, when at least one of the storage containers is delivered out of the second supply unit, the transferring device transfers as many storage containers as the storage containers delivered from the first supply unit to the second supply unit.

7. The purge stocker according to claim 6 , further comprising:
one or more empty storage containers storing no products, wherein
when at least one of the storage containers is delivered out of the second supply unit, the transferring device transfers as many empty storage containers as the storage containers delivered to the second supply unit.

8. The purge stocker according to claim 1 , wherein the purge stocker further comprises a control unit which controls operations of the first flow rate adjusting unit and the second flow rate adjusting unit, wherein
each of the M second supply pipes is connected to the main pipe,
the second flow rate adjusting unit is provided further upstream in terms of purge gas flow than each portion connected to the each of the M second supply pipes in the main pipe, and
the control unit controls the second flow rate adjusting unit in the second supply unit so as to supply the purge gas to the each of the ones of the storage containers via the each of the M second supply pipes when the each of the ones of the storage containers is supported by each of the second supporting units.

9. A purging method for a purge stocker that is configured to purge an inside of storage containers storing a product with purge gas, the purge stocker including: a first supply unit including N first purge apparatuses, wherein N is an integer equal to or larger than 2, each of the N first purge apparatuses having a first supporting unit configured to support one of the storage containers, and a second supply unit including M second purge apparatuses and M second supply pipes associated with each of the M second purge apparatuses, wherein M is a positive integer between 2 and N, inclusive, each of the M second purge apparatuses having a second supporting unit configured to support the one of the storage containers, the purging method comprising:
supplying the purge gas, via a first supply pipe, to the one of the storage containers supported by the first supporting unit;
measuring, via a first flow rate adjusting unit, a mass flow rate of the purge gas in the first supply pipe;
controlling, via the first flow rate adjusting unit, a mass flow rate of the purge gas through the first supply pipe individually;
supplying the purge gas to the one of the storage containers supported by the second supporting unit by supplying the purge gas to a main pipe connected with one of the M second supply pipes and configured to supply the purge gas to the one of the second supply pipes;
measuring, via a second flow rate adjusting unit, a mass flow rate of the purge gas in the main pipe;
controlling, via the second flow rate adjusting unit, a mass flow rate of the purge gas;
transferring the one of the storage containers from the first supply unit to the second supply unit, once initial purging is complete, for maintained purging in the second supply unit;
collectively controlling a flow rate of the purge gas supplied to the main pipe of the M second purge apparatuses, to each of the M second supply pipes of the M second purge apparatuses, and then to each of the one of the storage containers associated with the second flow rate adjusting unit; and
when the each of the one of the storage containers are supported by the second supporting units, supplying the each of the one of the storage containers with the purge gas through the each of the M second supply pipes in the second supply unit.

Assignees

• Murata Machinery Ltd

Inventors

• Onishi Shinji
• Murata Masanao
• Yamaji Takashi

Classifications

• H10P72/3404

  Storage means · CPC title

• H10P72/1926

  characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier · CPC title

• H10P72/1924 Primary

  characterised by atmosphere control · CPC title

• H10P72/0618 Primary

  using identification means, e.g. labels on substrates or labels on containers · CPC title

• H10P72/10 Primary

  using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] · CPC title