Cost-efficient high power PECVD deposition apparatus for solar cells

Patent metadata

Field	Value
Publication number	US-10403779-B2
Application number	US-201514717482-A
Country	US
Kind code	B2
Filing date	May 20, 2015
Priority date	May 10, 2012
Publication date	Sep 3, 2019
Grant date	Sep 3, 2019

Abstract

A method for forming a photovoltaic device includes providing a substrate. A layer is deposited to form one or more layers of a photovoltaic stack on the substrate. The depositing of the amorphous layer includes performing a high power flash deposition for depositing a first portion of the layer. A low power deposition is performed for depositing a second portion of the layer.

First claim

What is claimed is:

1. A plasma enhanced chemical vapor deposition (PECVD) system, comprising:
a vacuum chamber having a single electrode positioned over a platform, the vacuum chamber being configured to receive a substrate for forming a photovoltaic device;
a first power generator configured to generate an electric field in the vacuum chamber for performing a high power PECVD flash deposition for depositing a first portion of a layer on the substrate, the layer being included in one or more layers of a photovoltaic stack; and
a second power generator configured to generate an electric field in the vacuum chamber for performing a low power PECVD deposition for depositing a second portion of the layer on the substrate, wherein the first power generator and the second power generator are each separately connected to the single electrode at opposing ends of the single electrode in the vacuum chamber and configured to provide a buffer layer of a photovoltaic stack including germanium containing material layers directly on a transparent electrode and between said transparent electrode of zinc oxide and a p-type layer of hydrogenated silicon carbide of said photovoltaic stack, wherein the buffer layer is a single material layer of silicon germanium that is in direct contact with both the transparent electrode and the p-type layer of the photovoltaic stack, wherein the high power PECVD flash deposition forms a first portion of the germanium containing material layers having an increasing crystallinity with increasing depth; and the low power PECVD deposition forms a second portion of the germanium containing material layers that is amorphous to provide the single material layer for the buffer layer having a varying crystal structure having said first portion with said increasing crystallinity with said increasing depth and said second portion being said amorphous, wherein the increasing crystallinity is in a direction towards the p-type layer of hydrogenated silicon carbide to provide for alignment of a conduction band of the buffer layer and the p-type layer of hydrogenated silicon carbide to reduce a Schottky barrier between the buffer layer and the p-type layer of hydrogenated silicon carbide such that an intrinsic layer of amorphous silicon is formed on the p-type layer of hydrogenated silicon carbide and an n-type silicon layer to provide a PIN junction.

2. The system as recited in claim 1 , wherein the high power flash deposition forms a thickness of less than about 5 nm in less than about 5 seconds.

3. The system as recited in claim 1 , wherein the first power generator provides a plasma at a power of between about 100 mW/cm 2 and about 100 W/cm 2 .

4. The system as recited in claim 1 , wherein first power generator is configured to pulse to provide a plurality of the high power flash deposition cycles to form multiple layers of high power flash deposited material.

5. The system as recited in claim 4 , wherein the high power flash deposition cycles include different pulse durations.

6. The system as recited in claim 1 , wherein the vacuum chamber includes a support structure for holding or conveying the substrate.

7. The system as recited in claim 1 , wherein the Schottky barrier is eliminated.

Assignees

• IBM

Inventors

• Chen Tze-Chiang
• Hong Augustin J
• Kim Jeehwan
• Sadana Devendra K

Classifications

• H10P14/3411

  Silicon, silicon germanium or germanium · CPC title

• H10P14/24

  using chemical vapour deposition [CVD] · CPC title

• C23C16/50

  using electric discharges {(generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34)} · CPC title

• C23C16/45523

  Pulsed gas flow or change of composition over time · CPC title

• Y02E10/546

  Polycrystalline silicon PV cells · CPC title