Direct bonding method

Patent metadata

Field	Value
Publication number	US-10403597-B2
Application number	US-201615747246-A
Country	US
Kind code	B2
Filing date	Jun 29, 2016
Priority date	Jul 24, 2015
Publication date	Sep 3, 2019
Grant date	Sep 3, 2019

Abstract

A bonding between a first substrate and a second substrate, the method includes the steps of: a) providing the first substrate and the second substrate, b) forming a first bonding layer having tungsten oxide on the first substrate and a second bonding layer having tungsten oxide on the second substrate, at least one of the first bonding layer and of the second bonding layer including a third element M so as to form an MWxOy-type alloy, the atomic content of M in the composition of the alloy being between 0.5 and 20% and preferably between 1 and 10%, c) carrying out a direct bonding between the first bonding layer and the second bonding layer, and d) performing a heat treatment at a temperature greater than 250° C.

First claim

The invention claimed is:

1. A method of direct bonding between a first substrate and a second substrate, the method comprising the steps of:
a) Providing the first substrate and the second substrate,
b) Forming a first bonding layer comprising tungsten oxide on the first substrate and a second bonding layer comprising tungsten oxide on the second substrate, at least one of the first bonding layer and of the second bonding layer including a third element M so as to form an MWxOy-type alloy, the atomic content of M in the composition of the alloy being comprised between 0.5 and 20%,
c) Carrying out the direct bonding between the first bonding layer and the second bonding layer, and
d) Performing a heat treatment at a temperature greater than 250° C.

2. The method according to claim 1 , wherein the heat treatment is performed at a temperature comprised between 400° C. and 600° C.

3. The method according to claim 1 , wherein the third element M is selected from the transition metals and the combination thereof, so as to promote the electric conduction between the first substrate and the second substrate.

4. The method according to claim 1 , wherein the third element M is selected from Ti, Y, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Mo, Ru, Pd, Ag, Hf, Ta, Ir, Pt and Au and the combination thereof, so as to form an alloy compatible with a use in microelectronics.

5. The method according to claim 1 , wherein the first bonding layer and the second bonding layer have independently of each other a thickness comprised between about 5 and 50 nanometers.

6. The method according to claim 1 , wherein the formation of the first bonding layer and the second bonding layer according to step b) comprises the formation of a tungsten oxide followed by the incorporation of the third element M to the tungsten oxide.

7. The method according to claim 6 , wherein the third element M is incorporated to the tungsten oxide by ion diffusion.

8. The method according to claim 6 , wherein the third element M is incorporated to the tungsten oxide by ion implantation.

9. The method according to claim 1 , wherein the at least one of the first bonding layer and of the second bonding layer including the third element M is formed by depositing by a reactive co-spray of tungsten and of the third element M, under a plasma comprising a determined amount of gaseous oxygen.

10. The method according to claim 9 , wherein the reactive co-spray is performed from a tungsten target and a third element M target.

11. The method according to claim 9 , wherein the deposition is performed from a single target comprising an alloy formed of tungsten and of the third element M, the atomic content of the third element M of said alloy of the target being comprised between about 0.5 and 20%.

12. The method according to claim 9 , wherein the third element M is molybdenum oxidized by the gaseous oxygen present in the plasma.

13. The method according to claim 12 , wherein the respective rates of molybdenum and tungsten deposition are adjusted so that the atomic molybdenum content in the composition of the alloy is comprised between 1 and 10%.

14. The method according to claim 1 , comprising before step b), a step a 1 ) of depositing by spray a first thin tungsten layer and a second thin tungsten layer respectively on the first substrate and the second substrate and wherein step b) of depositing by co-spray the first bonding layer and the second bonding layer is performed respectively on the first thin tungsten layer and the second thin tungsten layer in the same enclosure as the deposition of step a 1 ), the method being devoid of any intermediate re-venting step between step a 1 ) and step b).

15. The method according to any of claim 1 , wherein the first bonding layer and the second bonding layer comprise the third element M.

Assignees

• Commissariat Energie Atomique

Inventors

• Gondcharton Paul
• Benaissa Lamine
• Imbert Bruno
• Rodriguez Guillaume
• Sabbione Chiara

Classifications

• H10P14/69397

  the material containing two or more metal elements · CPC title

• H10P14/6329

  using physical ablation of a target, e.g. physical vapour deposition or pulsed laser deposition · CPC title

• H10P90/1914 Primary

  using bonding · CPC title

• H10P90/00

  Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement · CPC title

• H10W80/301

  Bonding techniques, e.g. hybrid bonding · CPC title