Apparatus and method for measuring energy of electrons

Patent metadata

Field	Value
Publication number	US-10386314-B2
Application number	US-201615772501-A
Country	US
Kind code	B2
Filing date	Nov 2, 2016
Priority date	Nov 2, 2015
Publication date	Aug 20, 2019
Grant date	Aug 20, 2019

Abstract

Electrons excited by irradiation of a visible light to a sample is at an energy level lower than a vacuum level, thus photoelectrons are not emitted from the sample and energy of excited electrons cannot be measured. The visible light is irradiated to the sample through a mesh electrode. A surface film for reducing the vacuum level is formed on a surface of the sample. With the surface film being formed, photoelectrons are obtained by the visible light, and these photoelectrons are accelerated by the mesh electrode toward a photoelectron spectrometer. Ultraviolet light may be irradiated to the sample and metal having same potential therewith. In this case, the mesh electrode is set at a retracted position to prohibit interaction of the mesh electrode and the ultraviolet light. A difference between the valence band and the Fermi level of the sample can be measured.

First claim

The invention claimed is:

1. An apparatus configured to measure energy of photoelectrons, the apparatus comprising:
a sample holder configured to hold a sample;
a vacuum chamber configured to vacuum a surrounding of the sample held on the sample holder;
a primary excitation light irradiator configured to irradiate a primary excitation light to the sample held on the sample holder;
a reference excitation light irradiator configured to irradiate a reference excitation light to the sample held on the sample holder;
a photoelectron spectrometer; and
an accelerator configured to accelerate photoelectrons emitted from the sample held on the sample holder toward the photoelectron spectrometer,
wherein the accelerator allows the primary excitation light and the photoelectrons to pass therethrough.

2. The measuring apparatus according to claim 1 , wherein the accelerator comprises an acceleration electrode including an opening.

3. The measuring apparatus according to claim 2 , wherein the acceleration electrode is a mesh electrode.

4. The measuring apparatus according to claim 3 , wherein D/L<0.1 is satisfied, where a distance between the sample and the mesh electrode is L and a mesh size of the mesh electrode is D.

5. The measuring apparatus according to claim 2 , wherein
the acceleration electrode, the vacuum chamber, and the photoelectron spectrometer have an equipotent potential, and
the sample has a negative potential with respect to the equipotent potential.

6. The measuring apparatus according to claim 2 , wherein
a potential difference exists between the sample and the acceleration electrode, and
a potential difference exists between the acceleration electrode and the photoelectron spectrometer.

7. The measuring apparatus according to claim 6 , wherein the sample and the photoelectron spectrometer have a negative potential with respect to the acceleration electrode.

8. The measuring apparatus according to claim 1 , wherein one of the primary excitation light irradiator and the reference excitation light irradiator is selectively driven.

9. The measuring apparatus according to claim 8 , wherein
a wavelength of the reference excitation light is shorter than a wavelength of the primary excitation light,
the accelerator is configured capable of moving between a facing position facing the sample and a retracted position not facing the sample, and
the accelerator is at the facing position when the sample is irradiated with the primary excitation light and the accelerator is at the retracted position when the sample is irradiated with the reference excitation light.

10. The measuring apparatus according to claim 9 , wherein
the wavelength of the primary excitation light is longer than a wavelength which excites electrons within the sample to a vacuum level, and
the wavelength of the reference excitation light is shorter than the wavelength which excites the electrons within the sample to the vacuum level.

11. The measuring apparatus according to claim 10 , wherein
the primary excitation light is visible light, and
the reference excitation light is ultraviolet light.

12. The measuring apparatus according to claim 9 , wherein
the wavelength of the primary excitation light is longer than a wavelength which excites electrons within the accelerator to a vacuum level, and
the wavelength of the reference excitation light is shorter than the wavelength which excites the electrons within the accelerator to the vacuum level.

13. The measuring apparatus according to claim 1 , wherein
a primary excitation light source and a concave reflector are arranged outside the vacuum chamber, and
the primary excitation light from the primary excitation light source is guided into the vacuum chamber by the concave reflector and a window provided on a wall of the vacuum chamber.

14. The measuring apparatus according to claim 1 , further comprising:
a surface film forming chamber configured to form a surface film on a surface of the sample, the surface film being configured to reduce vacuum level,
wherein the surface film forming chamber and the vacuum chamber are connected via a path.

15. A method of measuring an energy difference between a Fermi level and a highest energy level of a valence band of a sample, the method comprising:
irradiating a reference excitation light to a metal having a same potential as the sample and measuring energy of photoelectrons emitted from the metal with respect to the Fermi level;
irradiating the reference excitation light to the sample and measuring energy of photoelectrons emitted from the sample with respect to the Fermi level; and
measuring the energy difference between the Fermi level and the highest energy level of the valence band of the sample from a difference between the measured energy.

16. A method of measuring energy of photoelectrons, the method comprising:
arranging an acceleration electrode including an opening at a position facing a sample;
irradiating a primary excitation light to the sample via the opening of the acceleration electrode;
attracting photoelectrons emitted from the sample toward the acceleration electrode using a potential of the acceleration electrode;
sending the photoelectrons to a photoelectron spectrometer via the opening of the acceleration electrode;
measuring energy of the photoelectrons by the photoelectron spectrometer relative to a Fermi level; and
correcting the measured energy relative to the Fermi level based on an energy difference between the Fermi level and the highest energy level of the valence band measured by using the method according to claim 15 to measure energy of the photoelectrons relative to the highest energy level of the valence band or the lowest energy level of a conduction band.

Assignees

• Univ Nagoya Nat Univ Corp

Inventors

• Ujihara Toru
• Ichihashi Fumiaki
• Kawaguchi Takahiko
• Ito Takahiro
• Kuwahara Makoto
• Baltzer Peter
• Takeuchi Yukio

Classifications

• G01N2223/085

  photo-electron spectrum [ESCA, XPS] · CPC title

• H01J49/46

  Static spectrometers · CPC title

• G01N23/2273 Primary

  Measuring photoelectron spectrum, e.g. electron spectroscopy for chemical analysis [ESCA] or X-ray photoelectron spectroscopy [XPS] · CPC title

• G01N2223/6116

  semiconductor wafer · CPC title

• G01N33/0095

  Semiconductive materials · CPC title