Advanced layered bulk ceramics via field assisted sintering technology

Patent metadata

Field	Value
Publication number	US-10385459-B2
Application number	US-201514712059-A
Country	US
Kind code	B2
Filing date	May 14, 2015
Priority date	May 16, 2014
Publication date	Aug 20, 2019
Grant date	Aug 20, 2019

Abstract

Disclosed herein are methods for fabricating layered ceramic materials via field assisted sintering technology. A method includes forming a ceramic green body on a surface of a substrate, and sintering the ceramic green body using a field-assisted sintering process to form a ceramic layer joined to the substrate.

First claim

What is claimed is:

1. A method comprising:
forming a first ceramic green body on a first surface of a chamber component, wherein the first ceramic green body comprises at least one of Er 3 Al 3 O 12 , Gd 3 Al 5 O 12 , Er 4 Al 2 O 9 , ErAlO 3 , Gd 4 Al 2 O 9 , GdAlO 3 , Nd 3 Al 5 O 12 , Nd 4 Al 2 O 9 , NdAlO 3 , or a ceramic compound comprising a solid-solution of Y 2 O 3 —ZrO 2 ; and
sintering the first ceramic green body using a field-assisted sintering process to form a first ceramic layer joined to the chamber component, wherein the sintering comprises contacting a first electrode to a first side of the first ceramic green body and a second electrode to a second side of the first ceramic green body to apply an electric field to the first ceramic green body via a longitudinal current flow along the first ceramic green body.

2. The method of claim 1 , further comprising:
forming a second ceramic green body on a second surface of the first ceramic green body prior to sintering the first ceramic green body, wherein sintering the first ceramic green body further comprises sintering the second ceramic green body using the field-assisted sintering process to form a second ceramic layer joined to the first ceramic layer.

3. The method of claim 1 , further comprising:
forming a second ceramic green body on a second surface of the first ceramic layer; and
sintering the second ceramic green body using the field-assisted sintering process to form a second ceramic layer joined to the first ceramic layer.

4. The method of claim 1 , wherein the first ceramic green body is formed by pressing a moldable ceramic green body onto the chamber component, and wherein the field-assisted sintering process comprises spark plasma sintering by applying a pulsed electric current and compressive forces to the first ceramic green body.

5. The method of claim 1 , wherein the first ceramic green body is a nanoparticle slurry of ceramic particles within a solvent, wherein a pH of the nanoparticle slurry may be between about 5 and 12, wherein a mass-median-diameter (D50) of the ceramic particles is between about 10 nanometers and 10 micrometers, and wherein the field-assisted sintering process comprises a flash sintering process comprising applying the electric field to the first ceramic green body while the first ceramic green body is at a temperature that meets a threshold temperature between 500° C. and 900° C.

6. The method of claim 5 , wherein forming the first ceramic green body on the first surface of the chamber component comprises dip-coating the nanoparticle slurry onto the first surface of the chamber component, wherein the D50 of the ceramic particles is less than 1 micrometer.

7. The method of claim 1 , wherein the first ceramic green body further comprises at least one of Y 3 Al 5 O 12 , Y 2 O 3 , Er 2 O 3 , Gd 2 O 3 , YF 3 , or Nd 2 O 3 .

8. The method of claim 1 , wherein the chamber component comprises at least one of Al 2 O 3 , AlN, SiN, or SiC.

9. The method of claim 1 , wherein the chamber component is a pre-sintered ceramic material.

10. The method of claim 9 , wherein the pre-sintered ceramic material was sintered using field-assisted sintering.

11. The method of claim 9 , wherein the pre-sintered ceramic material comprises at least one of Y 3 Al 5 O 12 , Y 4 Al 2 O 9 , Y 2 O 3 , Er 2 O 3 , Gd 2 O 3 , Er 3 Al 5 O 12 , Gd 3 Al 5 O 12 , YF 3 , Nd 2 O 3 , Er 4 Al 2 O 9 , ErAlO 3 , Gd 4 Al 2 O 9 , GdAlO 3 , Nd 3 Al 5 O 12 , Nd 4 Al 2 O 9 , NdAlO 3 , or the ceramic compound comprising Y 4 Al 2 O 9 and the solid-solution of Y 2 O 3 —ZrO 2 .

12. The method of claim 1 , wherein the chamber component is selected from the group consisting of: a lid, a nozzle, an electrostatic chuck, a showerhead, a liner kit, or a ring.

13. The method of claim 1 , wherein the sintering comprises:
ramping, at a rate between 1° C./min and 10° C./min, temperature of a sintering chamber up to a threshold sintering temperature between 500° C. and 900° C.; and
applying the electric field between 50 V/cm and 1000 V/cm for between 2 seconds and 20 seconds to the first ceramic green body while the first ceramic green body is incubated at the threshold sintering temperature.

14. The method of claim 1 , wherein the first ceramic green body comprises the ceramic compound comprising the solid-solution of Y 2 O 3 —ZrO 2 .

15. A method comprising:
contacting a first ceramic green body with a second ceramic green body, wherein at least one of the first ceramic green body or the second ceramic green body comprises a ceramic compound comprising a solid-solution of Y 2 O 3 —ZrO 2 ; and
flash sintering the first and second ceramic green bodies to join the first and second ceramic green bodies together, wherein the flash sintering comprises contacting a first electrode to a first end of the first and second ceramic green bodies and a second electrode to a second end of the first and second ceramic green bodies to apply an electric field to the first and second ceramic green bodies via a longitudinal current flow along each of the first and second ceramic green bodies.

16. The method of claim 15 , wherein the second ceramic green body is a nanoparticle slurry of ceramic particles within a solvent, wherein a pH of the nanoparticle slurry may be between about 5 and 12, wherein a mass-median-diameter (D50) of the ceramic particles is between about 10 nanometers and 10 micrometers.

17. The method of claim 15 , wherein the first ceramic green body is in contact with a surface of a chamber component, and wherein flash sintering the first and second ceramic green bodies further joins the first ceramic green body to the chamber component, wherein the electric field is applied to the first and second ceramic green bodies while temperature of the first and second ceramic green bodies meets a threshold sintering temperature between 500° C. and 900° C.

18. The method of claim 15 , wherein each of the first and second ceramic green bodies further comprise at least one of Y 3 Al 5 O 12 , Y 2 O 3 , Er 2 O 3 , Gd 2 O 3 , YF 3 , or Nd 2 O 3 .

19. The method of claim 15 , further comprising:
contacting the second ceramic green body with a third ceramic green body, wherein the flash sintering of the first and second ceramic green bodies further comprises applying the electric field to the third ceramic green body via the longitudinal current flow along the third ceramic green body to join the third ceramic green body to the second ceramic green body.

20. The method of claim 15 , further comprising:
contacting the second ceramic green body with a third ceramic green body after the flash sintering of the first and second ceramic green bodies; and
flash sintering the third ceramic green body to join the third ceramic green body to the second ceramic green body.

Assignees

• Applied Materials Inc

Inventors

• Sun Jennifer Y
• Chen Yikai
• Kanungo Biraja Prasad

Classifications

• C04B2237/366

  Aluminium nitride · CPC title

• C04B2237/343

  Alumina or aluminates · CPC title

• B32B9/048

  made of particles · CPC title

• C04B2237/368

  Silicon nitride · CPC title

• C23C24/10 Primary

  with intermediate formation of a liquid phase in the layer · CPC title