Radiation detection element, radiation detector and radiation detection apparatus

Patent metadata

Field	Value
Publication number	US-10379231-B2
Application number	US-201816028597-A
Country	US
Kind code	B2
Filing date	Jul 6, 2018
Priority date	Jul 7, 2017
Publication date	Aug 13, 2019
Grant date	Aug 13, 2019

Abstract

A radiation detection element comprises: a semiconductor part generating an electric charge by entrance of radiation; a signal output electrode provided at the semiconductor part and outputting a signal caused by the electric charge; a potential gradient generation electrode provided at the semiconductor part, for applying voltage such that a potential gradient in which a potential varies toward the signal output electrode is generated inside the semiconductor part; a collection electrode provided at the semiconductor part, for collecting electric charges not derived from radiation; an insulating film provided on a side of the semiconductor part where the signal output electrode is located; and a conductive layer provided between the insulating film and a part of the semiconductor part, and having electric resistance lower than the electric resistance of the semiconductor part and higher than the electric resistance of the collection electrode. The conductive layer is located at a position where a distance from the signal output electrode is equal to or longer than a distance between the collection electrode and the signal output electrode.

First claim

What is claimed is:

1. A radiation detection element, comprising:
a semiconductor part generating an electric charge by entrance of radiation;
a signal output electrode provided at the semiconductor part and outputting a signal caused by the electric charge;
a potential gradient generation electrode provided at the semiconductor part, for applying voltage such that a potential gradient in which a potential varies toward the signal output electrode is generated inside the semiconductor part;
a collection electrode provided at the semiconductor part, for collecting electric charges not derived from radiation;
an insulating film provided on a side of the semiconductor part where the signal output electrode is located; and
a conductive layer provided between the insulating film and a part of the semiconductor part, and having electric resistance lower than electric resistance of the semiconductor part and higher than electric resistance of the collection electrode,
wherein the conductive layer is located at a position where a distance from the signal output electrode is equal to or longer than a distance between the collection electrode and the signal output electrode.

2. The radiation detection element according to claim 1 , further comprising
a plurality of potential gradient generation electrodes at different distances from the signal output electrode,
wherein the conductive layer is located at a position between the plurality of potential gradient generation electrodes.

3. The radiation detection element according to claim 1 , further comprising
a plurality of conductive layers located at different distances from the signal output electrode.

4. The radiation detection element according to claim 3 , wherein
the potential gradient generation electrode has a shape of a ring with a disconnected portion, and
electric charges move between the plurality of conductive layers through the disconnected portion of the potential gradient generation electrode.

5. A radiation detector, comprising:
the radiation detection element according to claim 1 ;
a circuit board on which the radiation detection element is mounted; and
a base plate for holding the radiation detection element and the circuit board.

6. A radiation detection apparatus, comprising:
the radiation detection element according to claim 1 ;
an output part outputting a signal corresponding to energy of radiation detected by the radiation detection element; and
a spectrum generation part generating a spectrum of the radiation based on the signal output by the output part.

7. A radiation detection apparatus, comprising:
an irradiation part irradiating a sample with radiation;
the radiation detection element according to claim 1 detecting radiation generated from the sample;
an output part outputting a signal corresponding to energy of radiation detected by the radiation detection element;
a spectrum generation part generating a spectrum of the radiation based on the signal output by the output part; and
a display part displaying a spectrum generated by the spectrum generation part.

Assignees

• Fond Bruno Kessler
• Horiba Ltd

Inventors

• Zorzi Nicola
• Giacomini Gabriele
• Borghi Giacomo
• Picciotto Antonino
• Ficorella Francesco
• Matsunaga Daisuke

Classifications

• H01L31/0224

  Electricity · mapped topic

• G01T1/24 Primary

  with semiconductor detectors · CPC title

• G01T1/241 Primary

  Electrode arrangements, e.g. continuous or parallel strips or the like · CPC title

• G01T1/244

  Auxiliary details, e.g. casings, cooling, damping or insulation against damage by, e.g. heat, pressure or the like · CPC title

• H01L31/085

  Electricity · mapped topic