Detector for x-ray imaging

Patent metadata

Field	Value
Publication number	US-10126437-B1
Application number	US-201715595087-A
Country	US
Kind code	B1
Filing date	May 15, 2017
Priority date	May 15, 2017
Publication date	Nov 13, 2018
Grant date	Nov 13, 2018

Abstract

Disclosed is an edge-on photon counting detector and a method for manufacturing a charge collecting side of such detector. The edge-on photon counting detector includes a semi-conducting substrate. The semi-conducting substrate includes, a first end adapted to face an x-ray source and a second end opposite the first end in the direction of incoming x-rays, and at least one strip having N depth segments, N≥2, each of the depth segments including a charge collecting metal electrode and a charge collecting side including doped regions and insulating regions, wherein each of the charge collecting metal electrodes is arranged over a corresponding doped region and is connected to a respective routing trace arranged on the insulating regions, the respective routing trace being adapted to conduct signals from the charge collecting metal electrode to a read-out pad E, connectable to front-end electronics, arranged at the second end.

First claim

The invention claimed is:

1. An edge-on photon counting detector comprising a semi-conducting substrate comprising:
a first end adapted to face an x-ray source and a second end opposite said first end in the direction of incoming x-rays;
at least one strip having N depth segments, N≥2, each of said depth segments comprising a charge collecting metal electrode;
a charge collecting side comprising doped regions and insulating regions;
wherein each of said charge collecting metal electrodes is arranged over a corresponding doped region and is connected to a respective routing trace arranged on said insulating regions, said respective routing trace being adapted to conduct signals from the charge collecting metal electrode to a read-out pad, connectable to front-end electronics, arranged at said second end,
wherein the number of strips is at least two, and
wherein the width dimensions of the charge collecting metal electrodes are such that the ratio of the charge collecting metal electrode width to strip pitch is less than 0.8 in order to reduce capacitance.

2. The edge-on detector according to claim 1 , wherein said semi-conducting substrate comprises silicon.

3. The edge-on detector according to claim 1 , wherein said charge collecting metal electrodes and said routing traces are manufactured from the same metal.

4. The edge-on detector according to claim 3 , wherein said charge collecting metal electrodes and said routing traces are provided in a single metal layer.

5. The edge-on detector according to claim 4 , wherein said metal is aluminum.

6. The edge-on detector according to claim 1 , wherein said insulating regions comprises regions of silicon dioxide.

7. The edge-on detector according to claim 1 , wherein the number of strips is at least two and wherein the width dimension of the routing traces are such that the ratio of the routing trace width to strip pitch is less than 0.05 in order to reduce capacitance.

8. The edge-on detector according to claim 1 , wherein the semi-conducting substrate is provided with doped regions in the area adjacent to the read-out pad arranged at said second end.

9. The edge-on detector according to claim 8 , wherein said area adjacent to the read-out pad are further provided with insulating regions, whereby said doped regions and said insulating regions are arranged to form a pattern so that said routing traces run on the insulating regions to said read-out pad.

10. The edge-on detector according to claim 1 , wherein said semi-conducting substrate have a tapered shape, whereby the first end of said semi-conducting substrate have a first width and the second end of said semi-conducting substrate have a second width, larger than said first width.

11. The edge-on detector according to claim 10 , wherein said semi-conducting substrate comprises at least two strips of charge collecting metal electrodes, said strips being angled relative each other so that the charge collecting electrodes are provided on said charge collecting side in a tapered pattern following adapted to the tapered shape of said substrate.

12. The edge-on detector according to claim 1 , wherein said second end of said substrate comprises at least one chamfered corner.

13. A method for manufacturing a charge collecting surface for an edge-on detector, wherein the method comprises:
providing (S1) a semi-conducting substrate, said semi-conducting substrate having a first end adapted to face an x-ray source and a second end opposite said first end;
providing (S2) a surface of said semi-conducting substrate, referred to as the charge collecting surface, with doped regions;
providing (S3) an insulating layer on the regions of said second surface that are not provided with doped regions;
arranging (S4) a read-out pad at said second end of said semi-conducting substrate;
depositing (S4) a single metal layer on top of said charge collecting surface comprising said doped regions and said insulating layer; and
patterning (S5) said single metal layer in order to:
i) form charge collecting metal electrodes on top of said doped regions, and;
ii) form routing traces on top of said insulating layer that connects said charge collecting metal electrode with said read-out pad.

14. The method according to claim 13 , wherein the step (S4) of depositing a single metal layer comprises to use Physical Vapor Deposition (PVD), plating and/or Chemical Vapor Deposition (CVD).

15. The method according to claim 13 , wherein the step (S5) of patterning said single metal layer comprises the use of photolithography.

16. The method according to claim 13 , wherein the step (S1) of a semi-conducting substrate B comprises to provide a silicon substrate.

17. The method according to claim 13 , wherein the step of depositing (S4) a single metal layer on top of said charge collecting surface comprises depositing a single aluminum layer.

18. The method according to claim 13 , wherein the step of providing (S3) an insulating layer F on the regions of said second surface that are not provided with doped regions (R) comprises providing a silicon dioxide layer.

19. A method according to claim 13 , wherein the step (S5) of patterning said metal layer comprises to form at least two strips of charge collecting electrodes, where each of the charge collecting electrodes have width dimensions such that the ratio of the charge collecting metal electrode width to strip pitch is less than 0.8.

20. A method according to claim 19 , wherein the step (S5) of patterning said metal layer further comprises to form routing traces having width dimension such that the ratio of the routing trace width to strip pitch is less than 0.05.

21. An edge-on detector comprising a charge collecting surface manufactured according to claim 13 .

Assignees

• Prismatic Sensors Ab

Inventors

• Danielsson Mats
• Karlsson Staffan
• Hjarn Torbjorn
• Xu Cheng

Classifications

• G01T1/241 Primary

  Electrode arrangements, e.g. continuous or parallel strips or the like · CPC title

• G01T1/242 Primary

  Stacked detectors, e.g. for depth information (constructional or manufacturing details H10W90/00) · CPC title

• G01T1/00

  Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation (G01T3/00, G01T5/00 take precedence) · CPC title

• H10B99/00

  Subject matter not provided for in other groups of this subclass · CPC title