Systems and methods for measuring magnetic fields produced within microscopes

Patent metadata

Field	Value
Publication number	US-10373801-B2
Application number	US-201715495874-A
Country	US
Kind code	B2
Filing date	Apr 24, 2017
Priority date	Apr 22, 2016
Publication date	Aug 6, 2019
Grant date	Aug 6, 2019

Abstract

In some embodiments, a system for measuring magnetic fields produced within a microscope comprising an electromagnetic lens includes a sensor support element configured to be mounted to a distal end of an elongated support member that is configured to be inserted into the microscope, and a magnetic field sensor supported by the sensor support element, the magnetic field sensor being configured to sense magnetic fields at a position within the electron microscope at which specimens are imaged during operation of the microscope.

First claim

The invention claimed is:

1. A system for measuring the magnetic field produced by an electromagnetic lens within a microscope, the system comprising:
a magnetic field sensor configured to sense magnetic fields generated by the electromagnetic lens of the microscope;
a sensor support element that supports the magnetic field sensor;
an elongated support member to which the sensor support element is mounted, the support member being configured to be inserted into a specimen port of the microscope and position the magnetic field sensor at a position within the microscope at which specimens are imaged; and
a magnetometer that is in electrical communication with the magnetic field sensor.

2. The system of claim 1 , wherein the magnetic field sensor comprises a Hall effect sensor.

3. The system of claim 1 , wherein the sensor support element comprises a circuit board to which the magnetic field sensor is electrically connected.

4. The system of claim 1 , wherein the elongated support member is a specimen holder comprising a pole piece that is configured to pass through the specimen port and wherein the sensor support element is mounted to a distal end of the pole piece.

5. The system of claim 4 , wherein the specimen holder further comprises an end member comprising an electrical connector that is in electrical communication with the magnetic field sensor.

6. The system of claim 1 , further comprising a computing device to which the magnetometer is connected, the computing device executing software configured to plot magnetic fields sensed by the magnetic field sensor versus voltages applied to the electromagnetic lens of the microscope.

7. A method for measuring the magnetic field produced by an electromagnetic lens within a microscope, the method comprising:
mounting a magnetic field sensor to the distal end of an elongated support member;
inserting the elongated support member into a specimen port of the microscope such that the magnetic field sensor is positioned within a high vacuum column of the microscope at a position at which a specimen can be positioned for imaging;
exciting the electromagnetic lens of the microscope; and
measuring magnetic fields within the electron microscope generated by excitation of the electromagnetic lens using the magnetic field sensor.

8. The method of claim 7 , wherein the elongated support member comprises a specimen holder and wherein mounting comprises mounting the magnetic field sensor to a distal end of a pole piece of the specimen holder.

9. The method of claim 7 , wherein measuring magnetic fields comprises transmitting signals sensed by the magnetic field sensor to a magnetometer using a cable that extends between the elongated support member and the magnetometer.

10. The method of claim 7 , further comprising adjusting a voltage applied to the electromagnetic lens of the microscope and measuring the magnetic fields as they change with changes in the voltage so as to correlate the voltage applied to the electromagnetic lens with the magnetic fields applied to a specimen within the microscope.

Assignees

• Ponce Pedraza Arturo
• Jose Yacaman Miguel
• Sanchez John Eder
• Univ Texas

Inventors

• Ponce-Pedraza Arturo
• Jose Yacaman Miguel
• Sanchez John Eder

Classifications

• G01R33/07 Primary

  Hall effect devices · CPC title

• H01J37/20

  Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support · CPC title

• H01J2237/262

  Non-scanning techniques · CPC title

• H01J37/141

  Electromagnetic lenses · CPC title

• H01J2237/24564

  Measurements of electric or magnetic variables, e.g. voltage, current, frequency · CPC title