Capacitive micromachined ultrasonic transducer (CMUT) device with through-substrate via (TSV)
US-9520811-B2 · Dec 13, 2016 · US
US10367429B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10367429-B2 |
| Application number | US-201314389140-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 28, 2013 |
| Priority date | Mar 30, 2012 |
| Publication date | Jul 30, 2019 |
| Grant date | Jul 30, 2019 |
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An object of this invention is to create an actuator in which the amount of deformation is maintained and no displacement in the reverse direction occurs, even when a constant voltage is continuously applied for a long period of time. As a means for achieving the above object, the invention provides a conductive thin film comprising a polymer gel containing at least one organic molecule selected from the group consisting of electron-donating organic molecules and electron-withdrawing organic molecules, a nano-carbon material, an ionic liquid, and a polymer.
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The invention claimed is: 1. A conductive thin film comprising a homogeneous mixture comprising 5-90% by weight of a nano-carbon material, 5-80% by weight of an ionic liquid, 4-70% by weight of a polymer, and an organic molecule component, wherein the homogeneous mixture forms a gel, wherein the organic molecule component comprises at least one electron-withdrawing organic molecule that is tetracyanoquinodimethane (TCNQ), and wherein the organic molecule component is present in an amount of 3 to 80 parts by weight per 100 parts by weight of a total amount of the nano-carbon material, the ionic liquid, and the polymer. 2. The conductive thin film according to claim 1 , wherein the nano-carbon material is selected from the group consisting of carbon nanotubes, carbon nanohorns, and carbon nanofibers. 3. The conductive thin film according to claim 1 , wherein the organic molecule component further comprises at least one electron-donating organic molecule that is tetrathiafulvalene (TTF). 4. The conductive thin film according to claim 1 , wherein the organic molecule component is present in an amount of 15 to 40 parts by weight per 100 parts by weight of the total amount of the nano-carbon material, the ionic liquid, and the polymer. 5. The conductive thin film according to claim 3 , wherein the organic molecule component comprises both an electron-donating organic molecule and the electron-withdrawing organic molecule. 6. The conductive thin film according to claim 1 , wherein the organic molecule component further comprises at least one electron-withdrawing organic molecule that is not tetracyanoquinodimethane (TCNQ). 7. The conductive thin film according to claim 1 , wherein tetracyanoquinodimethane is present in an amount of 20 to 100 parts by weight per 50 parts by weight of the nano-carbon material. 8. The conductive thin film according to claim 1 , wherein the homogenous mixture further comprises a conductive additive. 9. A laminate comprising one or more of the conductive thin films according to claim 1 and one or more electrolyte membranes comprising an ionic liquid and a polymer. 10. An actuator element comprising the laminate according to claim 9 . 11. The actuator element according to claim 10 , wherein the laminate comprises two or more conductive thin films, wherein the two or more conductive thin films are formed as electrodes so as to be insulated from each other on surfaces of the one or more electrolyte membranes, and wherein the actuator element can be deformed by application of a potential difference between the conductive thin films. 12. A conductive thin film comprising a homogeneous mixture comprising 5-90% by weight of a nano-carbon material, 5-80% by weight of an ionic liquid, 4-70% by weight of a polymer, and an organic molecule component comprising at least one electron-withdrawing organic molecule, wherein the organic molecule component is present in an amount of 20 to 100 parts by, weight per 50 parts by weight of the nano-carbon material, and wherein the homogeneous mixture forms a gel. 13. The conductive thin film according to claim 12 , wherein the organic molecule component further comprises at least one electron-donating organic molecule. 14. A conductive thin film comprising a homogeneous mixture comprising 5-90% by weight of a nano-carbon material, 5-80% by weight of an ionic liquid, 4-70% by weight of a polymer, and an organic molecule component, wherein the organic molecule component is present in an amount of 30 to 80 parts by weight per 50 parts by weight of the nano-carbon material, and wherein the organic molecule component is: (i) tetrathiafulvalene (TTF) and tetracyanoquinodimethane (TCNQ) in a ratio of from 1:2 to 2:1, or (ii) tetracyanoquinodimethane (TCNQ), and wherein the homogeneous mixture forms a gel. 15. A method of making the conductive thin film according to claim 1 , the method comprising: homogeneously mixing the nano-carbon material, the ionic liquid, the polymer, and the organic molecule component, to form a gel.
Carbon nanotubes · CPC title
Transducers for transforming electrical into mechanical energy or vice versa (dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00) · CPC title
Bimorph and unimorph actuators, e.g. piezo and thermo · CPC title
Electrical equipment · CPC title
Carbon nanorods, nanowires, nanoplatelets or nanofibres · CPC title
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